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    • 1. 发明申请
    • Nitride semiconductor laser device
    • 氮化物半导体激光器件
    • US20090116528A1
    • 2009-05-07
    • US12285337
    • 2008-10-02
    • Yoshinobu KawaguchiTakeshi KamikawaShigetoshi Ito
    • Yoshinobu KawaguchiTakeshi KamikawaShigetoshi Ito
    • H01S5/04
    • H01S5/32341H01S5/028H01S5/0287H01S5/2214H01S5/3202
    • A nitride semiconductor laser device has a multilayer structure formed by stacking a plurality of nitride semiconductor layers made of hexagonal nitride semiconductors, while the multilayer structure is provided with a waveguide structure for guiding a laser beam, the nitride semiconductor layers forming the multilayer structure are stacked in a direction substantially perpendicular to the c-axes of the hexagonal nitride semiconductors constituting the nitride semiconductor layers, a first cavity facet forming a side surface of the waveguide structure is a c-plane having Ga-polarity, a second cavity facet forming another side surface of the waveguide structure opposed to the first cavity facet is a c-plane having N-polarity, a crystalline nitrogen-containing film is formed on the surface of the first cavity facet, and the reflectance of the first cavity facet is smaller than the reflectance of the second cavity facet.
    • 氮化物半导体激光器件具有通过堆叠由六方氮化物半导体制成的多个氮化物半导体层而形成的多层结构,而多层结构设置有用于引导激光束的波导结构,形成多层结构的氮化物半导体层被堆叠 在与构成氮化物半导体层的六方氮化物半导体的c轴大致垂直的方向上,形成波导结构的侧面的第一空腔面是具有Ga极性的c面,形成另一侧的第二腔面 与第一腔面相对的波导结构的表面是具有N极性的c面,在第一腔面的表面上形成结晶含氮膜,第一腔面的反射率小于 第二腔面的反射率。
    • 2. 发明授权
    • Nitride semiconductor laser device
    • 氮化物半导体激光器件
    • US07792172B2
    • 2010-09-07
    • US12285337
    • 2008-10-02
    • Yoshinobu KawaguchiTakeshi KamikawaShigetoshi Ito
    • Yoshinobu KawaguchiTakeshi KamikawaShigetoshi Ito
    • H01S5/00
    • H01S5/32341H01S5/028H01S5/0287H01S5/2214H01S5/3202
    • A nitride semiconductor laser device has a multilayer structure formed by stacking a plurality of nitride semiconductor layers made of hexagonal nitride semiconductors, while the multilayer structure is provided with a waveguide structure for guiding a laser beam, the nitride semiconductor layers forming the multilayer structure are stacked in a direction substantially perpendicular to the c-axes of the hexagonal nitride semiconductors constituting the nitride semiconductor layers, a first cavity facet forming a side surface of the waveguide structure is a c-plane having Ga-polarity, a second cavity facet forming another side surface of the waveguide structure opposed to the first cavity facet is a c-plane having N-polarity, a crystalline nitrogen-containing film is formed on the surface of the first cavity facet, and the reflectance of the first cavity facet is smaller than the reflectance of the second cavity facet.
    • 氮化物半导体激光器件具有通过堆叠由六方氮化物半导体制成的多个氮化物半导体层而形成的多层结构,而多层结构设置有用于引导激光束的波导结构,形成多层结构的氮化物半导体层被堆叠 在与构成氮化物半导体层的六方氮化物半导体的c轴大致垂直的方向上,形成波导结构的侧面的第一空腔面是具有Ga极性的c面,形成另一侧的第二腔面 与第一腔面相对的波导结构的表面是具有N极性的c面,在第一腔面的表面上形成结晶含氮膜,第一腔面的反射率小于 第二腔面的反射率。
    • 4. 发明申请
    • Nitride semiconductor light-emitting device and method for producing same
    • 氮化物半导体发光器件及其制造方法
    • US20080283866A1
    • 2008-11-20
    • US12216533
    • 2008-07-07
    • Teruyoshi TakakuraShigetoshi ItoTakeshi Kamikawa
    • Teruyoshi TakakuraShigetoshi ItoTakeshi Kamikawa
    • H01L33/00
    • H01S5/3202B82Y20/00H01L33/007H01S5/0202H01S5/0207H01S5/0211H01S5/0425H01S5/2201H01S5/2214H01S5/34333
    • In a method for producing a nitride semiconductor light-emitting device according to the present invention, first, a nitride semiconductor substrate having groove portions formed is prepared. An underlying layer comprising nitride semiconductor is formed on the nitride semiconductor substrate including the side walls of the groove portions, in such a manner that the underlying layer has a crystal surface in each of the groove portions and the crystal surface is tilted at an angle of from 53.5° to 63.4° with respect to the surface of the substrate. Over the underlying layer, a light-emitting-device structure composed of a lower cladding layer containing Al, an active layer, and an upper cladding layer containing Al is formed. According to the present invention, thickness nonuniformity and lack of surface flatness, which occur when accumulating a layer with light-emitting-device structure of nitride semiconductor over the nitride semiconductor substrate, are alleviated while inhibiting occurrence of cracking.
    • 在本发明的氮化物半导体发光元件的制造方法中,首先,准备形成有槽部的氮化物半导体基板。 在包括沟槽部分的侧壁的氮化物半导体衬底上形成包括氮化物半导体的下层,使得下层在每个沟槽部分中具有晶体表面,并且晶体表面以 相对于基板的表面为53.5°〜63.4°。 在下层之上,形成由包含Al的下包层,有源层和含有Al的上包层组成的发光器件结构。 根据本发明,在氮化物半导体衬底上堆积具有氮化物半导体的发光器件结构的层时发生的厚度不均匀性和表面平坦度不足,同时抑制裂纹的发生。
    • 7. 发明授权
    • Nitride semiconductor light-emitting device
    • 氮化物半导体发光器件
    • US07700963B2
    • 2010-04-20
    • US12216533
    • 2008-07-07
    • Teruyoshi TakakuraShigetoshi ItoTakeshi Kamikawa
    • Teruyoshi TakakuraShigetoshi ItoTakeshi Kamikawa
    • H01L33/00
    • H01S5/3202B82Y20/00H01L33/007H01S5/0202H01S5/0207H01S5/0211H01S5/0425H01S5/2201H01S5/2214H01S5/34333
    • In a method for producing a nitride semiconductor light-emitting device according to the present invention, first, a nitride semiconductor substrate having groove portions formed is prepared. An underlying layer comprising nitride semiconductor is formed on the nitride semiconductor substrate including the side walls of the groove portions, in such a manner that the underlying layer has a crystal surface in each of the groove portions and the crystal surface is tilted at an angle of from 53.5° to 63.4° with respect to the surface of the substrate. Over the underlying layer, a light-emitting-device structure composed of a lower cladding layer containing Al, an active layer, and an upper cladding layer containing Al is formed. According to the present invention, thickness nonuniformity and lack of surface flatness, which occur when accumulating a layer with light-emitting-device structure of nitride semiconductor over the nitride semiconductor substrate, are alleviated while inhibiting occurrence of cracking.
    • 在本发明的氮化物半导体发光元件的制造方法中,首先,准备形成有槽部的氮化物半导体基板。 在包括沟槽部分的侧壁的氮化物半导体衬底上形成包括氮化物半导体的下层,使得下层在每个沟槽部分中具有晶体表面,并且晶体表面以 相对于基板的表面为53.5°〜63.4°。 在下层之上,形成由包含Al的下包层,有源层和含有Al的上包层组成的发光器件结构。 根据本发明,在氮化物半导体衬底上堆积具有氮化物半导体的发光器件结构的层时发生的厚度不均匀性和表面平坦度不足,同时抑制裂纹的发生。
    • 9. 发明申请
    • Nitride semiconductor light-emitting device and method for producing same
    • 氮化物半导体发光器件及其制造方法
    • US20060131590A1
    • 2006-06-22
    • US11296532
    • 2005-12-08
    • Teruyoshi TakakuraShigetoshi ItoTakeshi Kamikawa
    • Teruyoshi TakakuraShigetoshi ItoTakeshi Kamikawa
    • H01L21/00H01L33/00
    • H01S5/3202B82Y20/00H01L33/007H01S5/0202H01S5/0207H01S5/0211H01S5/0425H01S5/2201H01S5/2214H01S5/34333
    • In a method for producing a nitride semiconductor light-emitting device according to the present invention, first, a nitride semiconductor substrate having groove portions formed is prepared. An underlying layer comprising nitride semiconductor is formed on the nitride semiconductor substrate including the side walls of the groove portions, in such a manner that the underlying layer has a crystal surface in each of the groove portions and the crystal surface is tilted at an angle of from 53.5° to 63.4° with respect to the surface of the substrate. Over the underlying layer, a light-emitting-device structure composed of a lower cladding layer containing Al, an active layer, and an upper cladding layer containing Al is formed. According to the present invention, thickness nonuniformity and lack of surface flatness, which occur when accumulating a layer with light-emitting-device structure of nitride semiconductor over the nitride semiconductor substrate, are alleviated while inhibiting occurrence of cracking.
    • 在本发明的氮化物半导体发光元件的制造方法中,首先,准备形成有槽部的氮化物半导体基板。 在包括沟槽部分的侧壁的氮化物半导体衬底上形成包括氮化物半导体的下层,使得下层在每个沟槽部分中具有晶体表面,并且晶体表面以 相对于基板的表面为53.5°〜63.4°。 在下层之上,形成由包含Al的下包层,有源层和含有Al的上包层组成的发光器件结构。 根据本发明,在氮化物半导体衬底上堆积具有氮化物半导体的发光器件结构的层时发生的厚度不均匀性和表面平坦度不足,同时抑制裂纹的发生。