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1. 发明申请

US20120290124A1 ROBOT SYSTEM 有权
标题翻译：机器人系统
公开(公告)号：US20120290124A1
公开(公告)日：2012-11-15
申请号：US13403997
申请日：2012-02-24
申请人： Yoshiki KIMURA
发明人： Yoshiki KIMURA
IPC分类号： G06F7/00
CPC分类号： H01L21/67265
摘要： A robot system includes a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction, and a position detecting unit for detecting storage positions of the substrates stored within the storage unit. The robot system further includes a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit, and an entry permission/prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.
摘要翻译：机器人系统包括用于沿着垂直方向以多级传送存储在存储单元内的基板的机器人手和用于检测存储在存储单元内的基板的存储位置的位置检测单元。机器人系统还包括间隙计算单元，用于基于由位置检测单元检测到的基板的存储位置来计算相邻基板之间的间隙，以及用于确定允许或禁止进入的位置的入口允许/禁止确定单元基于由间隙计算单元计算的间隙，机器人进入基板之间的空间。

2. 发明申请

US20100209225A1 SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR PRODUCING SEMICONDUCTOR 有权
标题翻译：基板传送机器人，基板传送装置，半导体制造装置及其半导体制造方法
公开(公告)号：US20100209225A1
公开(公告)日：2010-08-19
申请号：US12704538
申请日：2010-02-12
申请人： Mitsuaki MATSUO , Yoshiki KIMURA
发明人： Mitsuaki MATSUO , Yoshiki KIMURA
IPC分类号： H01L21/677 , H01L21/02 , G06F19/00
CPC分类号： H01L21/67742 , H01L21/67745
摘要： A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot.
摘要翻译：基板传送机器人包括基板夹持部分，臂单元和控制器。基板夹持部构造成保持基板。臂单元包括能够在水平面上转动的多个臂。臂单元具有在臂单元的前端处的基板夹持部分，并且构造成在预先教导的多个教导位置之间传送基板。当教导教导的位置时，控制器被配置为产生对应于多个教导位置中的每一个的访问待命位置，并且被配置为生成并存储从访问备用位置到基板传送的最小转动姿势的多条路线机器人。

3. 发明申请

US20100161124A1 SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER APPARATUS INCLUDING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME 有权
标题翻译：基板传送机器人，包括它们的基板传送装置和包括它们的半导体制造装置
公开(公告)号：US20100161124A1
公开(公告)日：2010-06-24
申请号：US12560423
申请日：2009-09-16
申请人： Yoshiki KIMURA
发明人： Yoshiki KIMURA
IPC分类号： G05B19/18
CPC分类号： B25J9/1666 , G05B2219/40476 , G05B2219/45031 , H01L21/67742
摘要： A substrate transfer robot sets an interference region in advance in the range of motion of the substrate transfer robot; stores a plurality of patterns of a combination of a starting position, a target position, and the interference region, the starting position and the target position being among taught positions; determines which pattern among the plurality of patterns a movement of the substrate transfer robot from the starting position to the target position matches when the substrate transfer robot moves between the plurality of taught positions; and determines a movement path from the starting position to the target position so as to avoid the interference region in accordance with the determined pattern so that the substrate transfer robot avoids the interference region.
摘要翻译：基板传送机器人在基板传送机器人的运动范围内预先设定干涉区域; 存储起始位置，目标位置和干扰区域的组合的多个图案，起始位置和目标位置在教导位置之间; 确定当所述基板传送机器人在所述多个教导位置之间移动时，所述多个图案中的所述基板传送机器人从所述起始位置到所述目标位置的移动匹配的所述图案; 并且确定从起始位置到目标位置的移动路径，以便根据所确定的图案避免干涉区域，使得基板传送机器人避免干涉区域。

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