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1. 发明授权

US5815366A Electrostatic chuck and the method of operating the same 失效
标题翻译：静电吸盘及其操作方法
公开(公告)号：US5815366A
公开(公告)日：1998-09-29
申请号：US575864
申请日：1995-12-20
申请人： Yoshihisa Morita , Nobuo Okumura , Toshio Nakanishi
发明人： Yoshihisa Morita , Nobuo Okumura , Toshio Nakanishi
IPC分类号： B23Q3/15 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck, which includes a plurality of ejector pins, means of moving up and down the ejector pins and means of grounding the ejector pins, is provided with an ejector buffer mechanism disposed between the ejector pins and the ejector pin moving means for exerting a buffer action for the tip positions of individual ejector pins. The electrostatic chuck facilitates the positioning control of the ejector pins and enables the ejector pins to come in tight contact with the wafer rear surface, and consequently the wafer can be clamped and released quickly and reliably. At the plasma processing of wafer, the ejector pins are brought to tight contact with the wafer rear surface, or a clearance within a prescribed range is created for the ejector pins from the wafer rear surface, thereby suppressing the occurrence of discharge in the gap between an ejector pin and the wafer rear surface, and consequently problems associated with the discharge can be dissolved.
摘要翻译：包括多个顶出销的静电卡盘，设置在顶出销和上下推杆的装置的装置设有一个排出器缓冲机构，该弹出器缓冲机构设置在顶出销和顶针移动装置之间，用于施加针对各个顶针的尖端位置的缓冲作用。静电卡盘有利于顶针的定位控制，使顶针能够与晶片后表面紧密接触，从而可快速可靠地夹紧和释放晶片。在晶片的等离子体处理中，顶针与晶片后表面紧密接触，或者在晶片后表面上产生用于顶针的规定范围内的间隙，从而抑制在晶片后表面之间的间隙中的放电发生顶针和晶片后表面，因此可以解决与放电有关的问题。

2. 发明授权

US08283816B2 Superconducting apparatus and vacuum container for the same 有权
标题翻译：超导设备和真空容器相同
公开(公告)号：US08283816B2
公开(公告)日：2012-10-09
申请号：US12640535
申请日：2009-12-17
申请人： Yoshimasa Ohashi , Nobuo Okumura , Hidetoshi Kusumi
发明人： Yoshimasa Ohashi , Nobuo Okumura , Hidetoshi Kusumi
IPC分类号： H02K9/00
CPC分类号： H02K55/02 , Y02E40/622
摘要： A vacuum container for housing therein a superconducting apparatus includes first and second partition walls made of magnetic-permeable nonmetallic materials, respectively, and facing each other to form a vacuum heat insulation chamber that is adapted to cover a superconductor that generates a magnetic flux. The first and second partition walls are exposed to relatively higher and lower temperatures, respectively. The first partition wall includes a radiation surface emitting thermal radiation while the second partition wall includes an absorption surface absorbing the thermal radiation. One of the radiation surface and the absorption surface is provided with a metal layer group in an exposed manner relative to the other of the radiation surface and the absorption surface. The metal layer group includes a plurality of metal layers spaced apart from one another and the nonmetallic material appears between the plurality of metal layers.
摘要翻译：用于在其中容纳超导装置的真空容器包括分别由磁性可渗透的非金属材料制成的第一和第二隔壁，并且彼此面对以形成适于覆盖产生磁通量的超导体的真空隔热室。第一和第二分隔壁分别暴露于相对较高和较低的温度。第一分隔壁包括发射热辐射的辐射表面，而第二分隔壁包括吸收热辐射的吸收表面。辐射表面和吸收表面之一相对于辐射表面和吸收表面中的另一个以暴露的方式设置有金属层组。金属层组包括彼此间隔开的多个金属层，并且非金属材料出现在多个金属层之间。

3. 发明申请

US20110025438A1 SUPERCONDUCTING APPARATUS 有权
标题翻译：超级设备
公开(公告)号：US20110025438A1
公开(公告)日：2011-02-03
申请号：US12694377
申请日：2010-01-27
申请人： Yoshimasa OHASHI , Nobuo Okumura , Hidetoshi Kusumi
发明人： Yoshimasa OHASHI , Nobuo Okumura , Hidetoshi Kusumi
IPC分类号： H01F6/04 , H02K9/00
CPC分类号： H02K55/02 , Y02E40/622
摘要： A superconducting apparatus includes a superconducting member generating a magnetic field when an electric power is supplied to the superconducting member, a permeable yoke into which a magnetic flux of the magnetic field generated by the superconducting member permeates, and a conductive portion cooled to a low temperature state by a low temperature portion and cools the permeable yoke by thermally making contact therewith.
摘要翻译：超导装置包括当向超导构件供电时产生磁场的超导构件，由超导构件产生的磁场的磁通渗透到其中的可渗透磁轭，以及冷却至低温的导电部分通过低温部分状态，并通过与其接触而冷却可渗透的轭。

4. 发明授权

US5010737A Multi-headed cryopump apparatus 失效
标题翻译：多头低温泵装置
公开(公告)号：US5010737A
公开(公告)日：1991-04-30
申请号：US501778
申请日：1990-03-30
申请人： Nobuo Okumura , Atsuyuki Miura
发明人： Nobuo Okumura , Atsuyuki Miura
IPC分类号： F25B9/10
CPC分类号： F25B9/10 , F25B2309/002
摘要： A multi-headed cryopump apparatus includes a plurality of cryopumps driven by a common compressor. There is a valve system between each cryopump and the compressor. A motor is provided for driving each cryopump, and a sensor is provided for detecting the amount of current supplied to each motor. By use of a control system, which accepts input from the sensors, the valve systems are controlled such that they operate in turn with a constant cycle.
摘要翻译：多头低温泵装置包括由公共压缩机驱动的多个低温泵。每个低温泵和压缩机之间都有阀门系统。提供用于驱动每个低温泵的电动机，并且提供用于检测供应给每个电动机的电流量的传感器。通过使用接收来自传感器的输入的控制系统，控制阀系统使得它们以恒定的循环依次操作。

5. 发明授权

US08384255B2 Superconducting rotating electrical machine 有权
标题翻译：超导旋转电机
公开(公告)号：US08384255B2
公开(公告)日：2013-02-26
申请号：US12877401
申请日：2010-09-08
申请人： Yoshimasa Ohashi , Nobuo Okumura
发明人： Yoshimasa Ohashi , Nobuo Okumura
IPC分类号： H02K9/00
CPC分类号： H02K55/04 , H02K5/1732 , H02K7/083 , Y02E40/625
摘要： A superconducting rotating electrical machine configuring a motor or generator, includes a base member, a stator supported by the base member, a rotor rotatably provided relative to the stator and including a superconducting material, a rotary shaft supporting the rotor, a cooling portion cooling the stator, a low temperature container forming an accommodating chamber accommodating the stator, the rotor, and a coolant, the accommodating chamber being arranged within the base member, a vacuum heat insulation chamber arranged at an outer side of the accommodating chamber and thermally insulating the accommodating chamber with vacuum, and a bearing positioned a portion of the base member where the accommodating chamber is prevented from being provided and which is exposed to an ambient atmosphere including atmospheric air, the bearing rotatably supporting the rotary shaft.
摘要翻译：构成电动机或发电机的超导旋转电机包括基座部件，由基部部件支撑的定子，相对于定子可旋转地设置的转子，并且包括超导材料，支撑转子的旋转轴，冷却部件定子，形成容纳定子的容纳室的低温容器，转子和冷却剂，所述容纳室布置在所述基座构件内;真空隔热室，布置在所述容纳室的外侧，并将所述容纳并具有定位在所述基座部件的一部分的轴承，其中所述容纳室被防止设置并暴露于包括大气的环境气氛中，所述轴承可旋转地支撑所述旋转轴。

6. 发明授权

US08362860B2 Superconducting apparatus 有权
标题翻译：超导装置
公开(公告)号：US08362860B2
公开(公告)日：2013-01-29
申请号：US12694377
申请日：2010-01-27
申请人： Yoshimasa Ohashi , Nobuo Okumura , Hidetoshi Kusumi
发明人： Yoshimasa Ohashi , Nobuo Okumura , Hidetoshi Kusumi
IPC分类号： H01F1/00 , H01F6/00
CPC分类号： H02K55/02 , Y02E40/622
摘要： A superconducting apparatus includes a superconducting member generating a magnetic field when an electric power is supplied to the superconducting member, a permeable yoke into which a magnetic flux of the magnetic field generated by the superconducting member permeates, and a conductive portion cooled to a low temperature state by a low temperature portion and cools the permeable yoke by thermally making contact therewith.
摘要翻译：超导装置包括当向超导构件供电时产生磁场的超导构件，由超导构件产生的磁场的磁通渗透到其中的可渗透磁轭，以及冷却至低温的导电部分通过低温部分状态，并通过与其接触而冷却可渗透的轭。

7. 发明授权

US4708725A Cryogenic refrigerator 失效
标题翻译：低温冰箱
公开(公告)号：US4708725A
公开(公告)日：1987-11-24
申请号：US931038
申请日：1986-11-17
申请人： Nobuo Okumura
发明人： Nobuo Okumura
IPC分类号： F25B9/14 , F25B9/00
CPC分类号： F25B9/14
摘要： A cryogenic refrigerator has an upper chamber formed at an upper end portion of a cylinder above a displacer. An upper end portion of a rod is movable in a bore and lower end portion of the rod is connected to an upper end portion of the displacer. Pressure varies in the upper chamber between high and low values upon movement of the displacer. The bore is always supplied with low-pressure such that the displacer may be moved by the differential pressure between the upper chamber and the bore.
摘要翻译：低温冰箱具有在置换器上方的气缸的上端部形成的上室。杆的上端部可以在孔中移动，并且杆的下端部连接到置换器的上端部。在置换器移动时，上室之间的压力在高值和低值之间变化。孔总是提供低压，使得置换器可以通过上室和孔之间的压差而移动。

8. 发明授权

US08283821B2 Superconducting apparatus 失效
标题翻译：超导装置
公开(公告)号：US08283821B2
公开(公告)日：2012-10-09
申请号：US12639267
申请日：2009-12-16
申请人： Yoshimasa Ohashi , Nobuo Okumura , Hidetoshi Kusumi
发明人： Yoshimasa Ohashi , Nobuo Okumura , Hidetoshi Kusumi
IPC分类号： H02K11/00
CPC分类号： H02K55/02 , H01F6/00 , H02K5/225 , H02K9/20 , Y02E40/622
摘要： A superconducting apparatus includes a magnetic field generating portion including a superconducting coil, an extremely low temperature generating portion maintaining the superconducting coil at an extremely low temperature and in a superconducting state, a container defining a heat insulation chamber that accommodates the superconducting coil, a first terminal electrically connected to the superconducting coil and supplying an electric power to the superconducting coil, a second terminal connected to an external electric power source and supplying the electric power to the first terminal in a case where the magnetic field generating portion is driven, and a heat penetration preventing element holding one of the first and second terminals and thermally separating the first and second terminals from each other in a case where a driving of the magnetic field generating portion is stopped, the heat penetration preventing element restraining a heat penetration from the second terminal to the first terminal.
摘要翻译：超导装置包括：包括超导线圈的磁场产生部分，将超导线圈保持在极低温度和超导状态的极低温产生部分，限定容纳超导线圈的隔热室的容器，第一端子，电连接到超导线圈并向超导线圈提供电力;第二端子，连接到外部电源并且在驱动磁场产生部分的情况下将电力提供给第一端子;以及在第一和第二端子中的一个上保持防热元件，并且在停止磁场产生部分的驱动的情况下，使第一和第二端子彼此热分离，防止热渗透元件从第二终端到t 他第一个终端。

9. 发明申请

US20120165198A1 SUPERCONDUCTING ELECTRIC MOTOR 审中-公开
标题翻译：超级电机
公开(公告)号：US20120165198A1
公开(公告)日：2012-06-28
申请号：US13335109
申请日：2011-12-22
申请人： Ryoji Mizutani , Yoshimasa Ohashi , Nobuo Okumura , Kenji Ishida
发明人： Ryoji Mizutani , Yoshimasa Ohashi , Nobuo Okumura , Kenji Ishida
IPC分类号： H01L39/02 , H02K9/00
CPC分类号： H02K55/02 , H02K3/24
摘要： A superconducting electric motor includes: a rotor that is rotatably arranged; and a stator that is arranged in a radial direction of the rotor so as to face the rotor. The stator has a plurality of superconducting coils that are wound at a radial end portion of a stator core and that are formed of a superconducting wire material. The superconducting electric motor includes a refrigerator that has at least one narrow tube that flows low-temperature refrigerant inside. The at least one narrow tube is in thermal contact with the stator core and at least one of the coils.
摘要翻译：超导电动机包括：可旋转地布置的转子; 以及定子，其以与转子相对的方式布置在转子的径向方向上。定子具有多个超导线圈，其被缠绕在定子芯的径向端部并且由超导线材形成。超导电动机包括至少一个使低温制冷剂内部流动的细管的冰箱。至少一个窄管与定子芯和至少一个线圈热接触。

10. 发明申请

US20110062806A1 SUPERCONDUCTING ROTATING ELECTRICAL MACHINE 有权
标题翻译：超级旋转电机
公开(公告)号：US20110062806A1
公开(公告)日：2011-03-17
申请号：US12877401
申请日：2010-09-08
申请人： Yoshimasa Ohashi , Nobuo Okumura
发明人： Yoshimasa Ohashi , Nobuo Okumura
IPC分类号： H02K9/12
CPC分类号： H02K55/04 , H02K5/1732 , H02K7/083 , Y02E40/625
摘要： A superconducting rotating electrical machine configuring a motor or generator, includes a base member, a stator supported by the base member, a rotor rotatably provided relative to the stator and including a superconducting material, a rotary shaft supporting the rotor, a cooling portion cooling the stator, a low temperature container forming an accommodating chamber accommodating the stator, the rotor, and a coolant, the accommodating chamber being arranged within the base member, a vacuum heat insulation chamber arranged at an outer side of the accommodating chamber and thermally insulating the accommodating chamber with vacuum, and a bearing positioned a portion of the base member where the accommodating chamber is prevented from being provided and which is exposed to an ambient atmosphere including atmospheric air, the bearing rotatably supporting the rotary shaft.
摘要翻译：构成电动机或发电机的超导旋转电机包括基座部件，由基部部件支撑的定子，相对于定子可旋转地设置的转子，并且包括超导材料，支撑转子的旋转轴，冷却部件定子，形成容纳定子的容纳室的低温容器，转子和冷却剂，所述容纳室布置在所述基座构件内;真空隔热室，布置在所述容纳室的外侧，并将所述容纳并具有定位在所述基座部件的一部分的轴承，其中所述容纳室被防止设置并暴露于包括大气的环境气氛中，所述轴承可旋转地支撑所述旋转轴。

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