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1. 发明授权

US06831728B2 Method of manufacturing nonlinear element, method of manufacturing electrooptic device, electrooptic device, and electronic apparatus 失效
标题翻译：制造非线性元件的方法，制造电光装置的方法，电光装置和电子装置
公开(公告)号：US06831728B2
公开(公告)日：2004-12-14
申请号：US10115005
申请日：2002-04-04
申请人： Yoshihiro Watanabe , Takumi Seki , Hideaki Naono , Satoshi Taguchi
发明人： Yoshihiro Watanabe , Takumi Seki , Hideaki Naono , Satoshi Taguchi
IPC分类号： G02F11365
CPC分类号： G02F1/1365 , H01L45/00
摘要： The present invention provides a method of manufacturing a nonlinear element capable further improving nonlinearity of a nonlinear element, an electrooptic device, and electronic apparatus. In forming an element substrate of a liquid crystal device, an underlying layer is formed on the surface of the element substrate in the underlying layer forming step (a), and then a first metal film having a metal film containing at least Ta is formed in the first metal film forming step (b). Then, in the insulating film forming step (c), the first metal film is annealed under high pressure in an atmosphere containing water vapor to form an insulating film on the first metal film. Then, in the second metal film forming step, a second metal film is formed on the surface of the insulating film to produce a nonlinear element.
摘要翻译：本发明提供一种制造能够进一步改善非线性元件，电光装置和电子设备的非线性的非线性元件的方法。在形成液晶装置的元件基板时，在下层形成工序（a）中在元件基板的表面上形成下层，然后形成具有至少含有Ta的金属膜的第一金属膜第一金属膜形成步骤（b）。然后，在绝缘膜形成步骤（c）中，第一金属膜在含有水蒸汽的气氛中在高压下退火，以在第一金属膜上形成绝缘膜。然后，在第二金属膜形成工序中，在绝缘膜的表面上形成第二金属膜，制作非线性元件。

2. 发明授权

US06384880B1 Two-terminal type non-linear element, manufacturing method thereof and liquid crystal display panel 失效
标题翻译：双端型非线性元件，其制造方法和液晶显示面板
公开(公告)号：US06384880B1
公开(公告)日：2002-05-07
申请号：US09002954
申请日：1998-01-05
申请人： Takashi Inoue , Yasushi Takano , Hideaki Naono , Wataru Ito , Tsutomu Asakawa , Takeyoshi Ushiki
发明人： Takashi Inoue , Yasushi Takano , Hideaki Naono , Wataru Ito , Tsutomu Asakawa , Takeyoshi Ushiki
IPC分类号： G02F1136
CPC分类号： H01L45/00 , G02F1/1365
摘要： The present invention provides a MIM type non-linear element in which the capacitance is sufficiently small and in which little changes over time are exhibited in the current-voltage characteristics, a liquid crystal display panel with high image quality using the MIM type non-linear element, and a method of manufacturing the MIM type non-linear element. The MIM type non-linear element includes a first conductive film, an insulation film and a second conductive film, which are laminated on a substrate. The insulation film has a relative dielectric constant of 25.5 or less, preferably 24.0-25.5. In elementary analysis by SIMS, a hydrogen spectrum of the boundary region between the first conductive film and the insulation film has a width of 10 nm or more in the depth direction at an intensity of one tenth of the peak intensity. The first conductive film of the MIM type non-linear element shows a peak temperature of 300° C. or higher in a thermal desorption spectroscopy of hydrogen. The MIM type non-linear element is manufactured by, for example, a method containing the steps of (a) forming the first conductive film, (b) heat-treating the first conductive film at a temperature of 300° C. or higher in an inert gas, (c) forming the insulation film on the surface of the first conductive film by anodization of the first conductive film, and (d) forming the second conductive film on the surface of the insulation film.
摘要翻译：本发明提供了一种MIM型非线性元件，其中电容足够小，并且在电流 - 电压特性中随时间呈现小的变化，使用MIM型非线性的具有高图像质量的液晶显示面板元件，以及MIM型非线性元件的制造方法。 MIM型非线性元件包括层叠在基板上的第一导电膜，绝缘膜和第二导电膜。绝缘膜的相对介电常数为25.5以下，优选为24.0〜25.5。在通过SIMS的元素分析中，第一导电膜和绝缘膜之间的边界区域的氢谱在峰强度的十分之一处具有在深度方向上的10nm或更大的宽度。 MIM型非线性元件的第一导电膜在氢的热解吸光谱中显示出300℃以上的峰值温度。 MIM型非线性元件例如通过以下步骤制造：（a）形成第一导电膜，（b）在300℃以上的温度下对第一导电膜进行热处理惰性气体，（c）通过第一导电膜的阳极氧化在第一导电膜的表面上形成绝缘膜，以及（d）在绝缘膜的表面上形成第二导电膜。

3. 发明授权

US06710826B2 Two-terminal type non-linear element, manufacturing method and liquid crystal display panel 失效
标题翻译：双端子型非线性元件，制造方法和液晶显示面板
公开(公告)号：US06710826B2
公开(公告)日：2004-03-23
申请号：US10095688
申请日：2002-03-13
申请人： Takashi Inoue , Yasushi Takano , Hideaki Naono , Wataru Ito , Tsutomu Asakawa , Takeyoshi Ushiki
发明人： Takashi Inoue , Yasushi Takano , Hideaki Naono , Wataru Ito , Tsutomu Asakawa , Takeyoshi Ushiki
IPC分类号： G02F1136
CPC分类号： H01L45/00 , G02F1/1365
摘要： The present invention provides a MIM type non-linear element in which the capacitance is sufficiently small and in which little changes over time are exhibited in the current-voltage characteristics, a liquid crystal display panel with high image quality using the MIM type non-linear element, and a method of manufacturing the MIM type non-linear element. The MIM type non-linear element includes a first conductive film, an insulation film and a second conductive film, which are laminated on a substrate. The insulation film has a relative dielectric constant of 25.5 or less, preferably 24.0-25.5. In elementary analysis by SIMS, a hydrogen spectrum of the boundary region between the first conductive film and the insulation film has a width of 10 nm or more in the depth direction at an intensity of one tenth of the peak intensity. The first conductive film of the MIM type non-linear element shows a peak temperature of 300° C. or higher in a thermal desorption spectroscopy of hydrogen. The MIM type non-linear element is manufactured by, for example, a method containing the steps of (a) forming the first conductive film, (b) heat-treating the first conductive film at a temperature of 300° C. or higher in an inert gas, (c) forming the insulation film on the surface of the first conductive film by anodization of the first conductive film, and (d) forming the second conductive film on the surface of the insulation film.
摘要翻译：本发明提供了一种MIM型非线性元件，其中电容足够小，并且在电流 - 电压特性中随时间呈现小的变化，使用MIM型非线性的具有高图像质量的液晶显示面板元件，以及MIM型非线性元件的制造方法。 MIM型非线性元件包括层叠在基板上的第一导电膜，绝缘膜和第二导电膜。绝缘膜的相对介电常数为25.5以下，优选为24.0〜25.5。在通过SIMS的元素分析中，第一导电膜和绝缘膜之间的边界区域的氢谱在峰强度的十分之一处具有在深度方向上的10nm或更大的宽度。 MIM型非线性元件的第一导电膜在氢的热解吸光谱中显示出300℃以上的峰值温度。 MIM型非线性元件例如通过以下步骤制造：（a）形成第一导电膜，（b）在300℃以上的温度下对第一导电膜进行热处理惰性气体，（c）通过第一导电膜的阳极氧化在第一导电膜的表面上形成绝缘膜，以及（d）在绝缘膜的表面上形成第二导电膜。

4. 发明授权

US08400055B2 Organic electroluminescence apparatus with metal auxiliary wiring 有权
标题翻译：带金属辅助布线的有机电致发光装置
公开(公告)号：US08400055B2
公开(公告)日：2013-03-19
申请号：US12413060
申请日：2009-03-27
申请人： Hideaki Naono
发明人： Hideaki Naono
IPC分类号： H01J1/62 , H01J63/04
CPC分类号： H01L51/5228 , H01L27/3276 , H01L51/5234 , H01L51/5265 , H01L51/5284 , H01L2251/5315
摘要： An organic electroluminescence apparatus includes a support substrate having a pixel region; a plurality of pixels; organic electroluminescence devices each having at least a first electrode layer, an emission layer, and a translucent second electrode layer; and an auxiliary wiring layer having a stripe-like pattern or a grid-like pattern. The apparatus emits light emitted from the organic electroluminescence device from the side where the second electrode layer is disposed, the second electrode layer is disposed over the entire or approximately the entire pixel region, and the auxiliary wiring layer is formed of a metal layer having a thickness capable of achieving translucency and is disposed so as to, in the plan view, overlap at least part of the organic electroluminescence device of each of the plurality of the pixels.
摘要翻译：有机电致发光装置包括具有像素区域的支撑基板; 多个像素; 各自具有至少第一电极层，发光层和半透明的第二电极层的有机电致发光器件; 以及具有条状图案或网格状图案的辅助布线层。该装置从设置第二电极层的一侧发射从有机电致发光器件发射的光，第二电极层设置在整个或大致整个像素区域上，并且辅助布线层由具有能够实现半透明的厚度并且被设置成在平面图中与多个像素中的每一个的有机电致发光器件的至少一部分重叠。

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