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    • 8. 发明授权
    • Thermal flow meter, thermal flow meter control method, and sensor element of thermal flow meter
    • 热流量计,热流量计控制方法和热流量计传感器元件
    • US07814785B2
    • 2010-10-19
    • US12242347
    • 2008-09-30
    • Yoshihiro SukegawaNoboru TokuyasuHiroaki HoshikaKaori Kashio
    • Yoshihiro SukegawaNoboru TokuyasuHiroaki HoshikaKaori Kashio
    • G01F1/68
    • G01F1/684G01F1/698G01F1/74G01F15/02G01F15/04
    • A thermal flow meter corrects flow rate detection errors produced by vaporization of liquid phase components included in a gas to be measured. The thermal flow meter includes a correction circuit 500 that applies respectively different predetermined voltages to heating resistors consisting of first heating resistor Rh1 and second heating resistor Rh2 of a sensor element disposed in the gas to be measured to set a first temperature state and a second temperature state, calculates a first flow rate value Q1 of the gas to be measured in the first temperature state and a second flow rate value Q2 of the gas to be measured in the second temperature state, and calculates a flow rate correction value ΔQ based on a ratio (Q1/Q2) between the first flow rate value and second flow rate value or a fourth-power value (Q1/Q2)4 of the ratio to correct a flow rate of the gas to be measured.
    • 热流量计校正由待测气体中包含的液相成分汽化产生的流量检测误差。 热流量计包括校正电路500,该校正电路500分别对设置在待测气体中的传感器元件的第一加热电阻器Rh1和第二加热电阻器Rh2组成的加热电阻器施加不同的预定电压,以设定第一温度状态和第二温度 状态,在第二温度状态下,计算第一温度状态下的被测量气体的第一流量值Q1和待测气体的第二流量值Q2,并计算流量校正值&Dgr; Q 在第一流量值和第二流量值之间的比率(Q1 / Q2)或校正被测量气体的流量的比率的第四功率值(Q1 / Q2)4。