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    • 3. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07176491B2
    • 2007-02-13
    • US11091570
    • 2005-03-29
    • Yoshihiko ToyodaTakao SakamotoKazuyuki Sugahara
    • Yoshihiko ToyodaTakao SakamotoKazuyuki Sugahara
    • H01L29/04
    • H01L27/1222H01L27/1214H01L27/127H01L29/66757H01L29/78624H01L2029/7863
    • A silicon nitride film and a silicon oxide film are formed on a glass substrate. On the silicon oxide film is formed a thin film transistor T including a source region, a drain region, a channel region having a predetermined channel length, a first GOLD region having an impurity concentration lower than the impurity concentration of the source region, a second GOLD region having an impurity concentration lower than the impurity concentration of the drain region, a gate insulation film, and a gate electrode. The length of an overlapping portion in plane between the gate electrode and the second GOLD region in the direction of the channel length is set longer than the length in the direction of the channel region of an overlapping portion in plane between the gate electrode and the first GOLD region.
    • 在玻璃基板上形成氮化硅膜和氧化硅膜。 在氧化硅膜上形成薄膜晶体管T,该薄膜晶体管T包括源极区,漏极区,具有预定沟道长度的沟道区,具有低于源区杂质浓度的杂质浓度的第一GOLD区, GOLD区域的杂质浓度低于漏极区域的杂质浓度,栅极绝缘膜和栅电极。 在沟道长度方向上的栅电极和第二GOLD区之间的平面重叠部分的长度被设定为长于栅电极和第一栅极之间的平面重叠部分的沟道区域的方向上的长度 金地区。
    • 4. 发明授权
    • Fabrication method of a semiconductor device
    • 半导体器件的制造方法
    • US07396707B2
    • 2008-07-08
    • US11565429
    • 2006-11-30
    • Yoshihiko ToyodaTakao SakamotoKazuyuki Sugahara
    • Yoshihiko ToyodaTakao SakamotoKazuyuki Sugahara
    • H01L29/47
    • H01L27/1222H01L27/1214H01L27/127H01L29/66757H01L29/78624H01L2029/7863
    • A silicon nitride film and a silicon oxide film are formed on a glass substrate. On the silicon oxide film is formed a thin film transistor T including a source region, a drain region, a channel region having a predetermined channel length, a first GOLD region having an impurity concentration lower than the impurity concentration of the source region, a second GOLD region having an impurity concentration lower than the impurity concentration of the drain region, a gate insulation film, and a gate electrode. The length of an overlapping portion in plane between the gate electrode and the second GOLD region in the direction of the channel length is set longer than the length in the direction of the channel region of an overlapping portion in plane between the gate electrode and the first GOLD region.
    • 在玻璃基板上形成氮化硅膜和氧化硅膜。 在氧化硅膜上形成薄膜晶体管T,该薄膜晶体管T包括源极区,漏极区,具有预定沟道长度的沟道区,具有低于源区杂质浓度的杂质浓度的第一GOLD区, GOLD区域的杂质浓度低于漏极区域的杂质浓度,栅极绝缘膜和栅电极。 在沟道长度方向上的栅电极和第二GOLD区之间的平面重叠部分的长度被设定为长于栅电极和第一栅极之间的平面重叠部分的沟道区域的方向上的长度 金地区。