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    • 7. 发明授权
    • Apparatus for inspecting internal circuit of semiconductor device
    • 用于检查半导体器件内部电路的装置
    • US5218292A
    • 1993-06-08
    • US804779
    • 1991-12-09
    • Kaoru Goto
    • Kaoru Goto
    • G01R31/28
    • G01R31/2851
    • An apparatus for inspecting an internal circuit of a semiconductor device is provided, wherein an inspection table having an inspection equipment such as a microscope, a positioner or the like mounted thereon is constructed into a vibration-proof structure. On a frame surrounding a tester is horizontally supported an inspection table through air spring structures arranged on four corners of the frame, so that vibration or shock produced from a floor or the tester may be effectively absorbed by the air spring structures, to thereby be prevented from adversely affecting a semiconductor device to be inspected. Also, the semiconductor device is set on a socket of a socket-equipped board arranged above the tester in a manner to be close proximity to the tester, so that a substantially true signal may be obtained.
    • 提供了一种用于检查半导体器件的内部电路的装置,其中安装有诸如显微镜,定位器等的检查设备的检查台被构造成防振结构。 在测试仪周围的框架上,通过布置在框架的四个角上的空气弹簧结构水平支撑检查台,从而可以有效地吸收由地板或测试仪产生的振动或震动,从而可以防止 从不利地影响待检查的半导体器件。 此外,将半导体器件设置在以与接近测试器的方式布置在测试器上方的插座配置板的插座上,从而可以获得基本上真实的信号。