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1. 发明申请

US20060182541A1 Semiconductor container opening/closing apparatus and semiconductor device manufacturing method 有权
标题翻译：半导体容器开闭装置及半导体装置的制造方法
公开(公告)号：US20060182541A1
公开(公告)日：2006-08-17
申请号：US11391640
申请日：2006-03-29
申请人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
发明人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
IPC分类号： H01L21/677
CPC分类号： H01L21/67775 , H01L21/6735 , H01L21/67772
摘要： When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the container and a wall surface of the container opening/closing apparatus and adhere to a wafer in the container. An apparatus is provided to reduce the number of foreign particles adhering to the wafer by preventing foreign particles from entering into the container at the time of opening the container by the opening/closing apparatus. To achieve this, a velocity-differential pressure ratio obtained by dividing the maximum velocity at the time of opening the lid of the container in a vertical direction to an opening of the container, by the differential pressure between the inside pressure and the outside pressure of said semiconductor manufacturing apparatus, is set to be 0.06 ((m/s) Pa) or less.
摘要翻译：当传统的半导体容器打开/关闭装置打开半导体容器的盖子时，异物通过容器和容器打开/关闭装置的壁表面之间的间隙从外部进入容器，并且粘附到容器中的晶片。提供了一种装置，用于通过打开/关闭装置打开容器时防止异物进入容器，从而减少附着在晶片上的异物的数量。为了实现这一点，通过将容器的盖子在垂直方向上打开时的最大速度除以容器的开口之间的内压和外部压力之间的压差来获得的速度差压比所述半导体制造装置设定为0.06（（m / s）Pa）以下。

2. 发明授权

US07048493B2 Method of manufacturing a semiconductor integrated circuit device which prevents foreign particles from being drawn into a semiconductor container containing semiconductor wafers 有权
标题翻译：制造半导体集成电路装置的方法，该装置防止外来颗粒被吸入含有半导体晶片的半导体容器中
公开(公告)号：US07048493B2
公开(公告)日：2006-05-23
申请号：US10974819
申请日：2004-10-28
申请人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
发明人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
IPC分类号： H01L21/69
CPC分类号： H01L21/67775 , H01L21/6735 , H01L21/67772
摘要： When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the container and a wall surface of the container opening/closing apparatus and adhere to a wafer in the container. A method is provided to reduce the number of foreign particles adhering to the wafer by preventing foreign particles from entering into the container at the time of opening the container by the opening/closing apparatus. To achieve this, a velocity-differential pressure ratio obtained by dividing the maximum velocity at the time of opening the lid of the container in a vertical direction to an opening of the container, by the differential pressure between the inside pressure and the outside pressure of said semiconductor manufacturing apparatus, is set to be 0.06 ((m/s) Pa) or less.
摘要翻译：当传统的半导体容器打开/关闭装置打开半导体容器的盖子时，异物通过容器和容器打开/关闭装置的壁表面之间的间隙从外部进入容器，并且粘附到容器中的晶片。提供了一种方法，用于通过打开/关闭装置打开容器时防止异物进入容器，从而减少附着在晶片上的异物的数量。为了实现这一点，通过将容器的盖子在垂直方向上打开容器的最大速度与容器的开口之间的内压和外部压力之间的压差相除来获得的速度差压比所述半导体制造装置设定为0.06（（m / s）Pa）以下。

3. 发明申请

US20100086392A1 SEMICONDUCTOR CONTAINER OPENING/CLOSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：半导体容器开关/闭合装置和半导体器件制造方法
公开(公告)号：US20100086392A1
公开(公告)日：2010-04-08
申请号：US12569328
申请日：2009-09-29
申请人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
发明人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
IPC分类号： H01L21/677
CPC分类号： H01L21/67775 , H01L21/6735 , H01L21/67772
摘要： A method is provided of manufacturing semiconductor devices formed on a semiconductor wafer, including placing the wafer in a semiconductor container and conveying the container to a semiconductor manufacturing apparatus. An opening of the container is opposed to an opening of the apparatus such that an opener of the apparatus holds a lid of the opening the container. A key of the opener is inserted to a latch groove of the lid, and the key is rotated to contact a latch of the lid. The openings are connected such that a velocity differential pressure ratio obtained by dividing the maximum velocity when the opener holding the lid horizontally moves away from the opening of the container, by the differential pressure between the inside pressure and the outside pressure of the apparatus, is set to be 0.06 ((m/s)/Pa) or less, and then the wafer is processed.
摘要翻译：提供一种制造形成在半导体晶片上的半导体器件的方法，包括将晶片放置在半导体容器中并将容器输送到半导体制造装置。容器的开口与装置的开口相对，使得装置的开启器保持容器的开口盖。开启器的钥匙被插入到盖的闩锁槽中，并且钥匙被旋转以接触盖的闩锁。这些开口被连接成使得通过将保持盖的开启器水平地移动离开容器的开口的最大速度获得的速度差压比通过内部压力和设备的外部压力之间的压差来实现，设定为0.06（（m / s）/ Pa）以下，然后处理晶片。

4. 发明授权

US07314345B2 Semiconductor container opening/closing apparatus and semiconductor device manufacturing method 有权
标题翻译：半导体容器开闭装置及半导体装置的制造方法
公开(公告)号：US07314345B2
公开(公告)日：2008-01-01
申请号：US11391640
申请日：2006-03-29
申请人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
发明人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
IPC分类号： H01L21/677
CPC分类号： H01L21/67775 , H01L21/6735 , H01L21/67772
摘要： When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the container and a wall surface of the container opening/closing apparatus and adhere to a wafer in the container. An apparatus is provided to reduce the number of foreign particles adhering to the wafer by preventing foreign particles from entering into the container at the time of opening the container by the opening/closing apparatus. To achieve this, a velocity-differential pressure ratio obtained by dividing the maximum velocity at the time of opening the lid of the container in a vertical direction to an opening of the container, by the differential pressure between the inside pressure and the outside pressure of said semiconductor manufacturing apparatus, is set to be 0.06 ((m/s) Pa) or less.
摘要翻译：当传统的半导体容器打开/关闭装置打开半导体容器的盖子时，异物通过容器和容器打开/关闭装置的壁表面之间的间隙从外部进入容器，并且粘附到容器中的晶片。提供了一种装置，用于通过打开/关闭装置打开容器时防止异物进入容器，从而减少附着在晶片上的异物的数量。为了实现这一点，通过将容器的盖子在垂直方向上打开时的最大速度除以容器的开口之间的内压和外部压力之间的压差来获得的速度差压比所述半导体制造装置设定为0.06（（m / s）Pa）以下。

5. 发明申请

US20050111937A1 Method of manufacturing a semiconductor integrated circuit device which prevents foreign particles from being drawn into a semiconductor container containing semiconductor wafers 有权
标题翻译：制造半导体集成电路装置的方法，该装置防止外来颗粒被吸入含有半导体晶片的半导体容器中
公开(公告)号：US20050111937A1
公开(公告)日：2005-05-26
申请号：US10974819
申请日：2004-10-28
申请人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
发明人： Yoshiaki Kobayashi , Shigeru Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
IPC分类号： B65G1/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/6735 , H01L21/67772
摘要： When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the container and a wall surface of the container opening/closing apparatus and adhere to a wafer in the container. A method is provided to reduce the number of foreign particles adhering to the wafer by preventing foreign particles from entering into the container at the time of opening the container by the opening/closing apparatus. To achieve this, a velocity-differential pressure ratio obtained by dividing the maximum velocity at the time of opening the lid of the container in a vertical direction to an opening of the container, by the differential pressure between the inside pressure and the outside pressure of said semiconductor manufacturing apparatus, is set to be 0.06 ((m/s) Pa) or less.
摘要翻译：当传统的半导体容器打开/关闭装置打开半导体容器的盖子时，异物通过容器和容器打开/关闭装置的壁表面之间的间隙从外部进入容器，并且粘附到容器中的晶片。提供了一种方法，用于通过打开/关闭装置打开容器时防止异物进入容器，从而减少附着在晶片上的异物的数量。为了实现这一点，通过将容器的盖子在垂直方向上打开容器的最大速度与容器的开口之间的内压和外部压力之间的压差相除来获得的速度差压比所述半导体制造装置设定为0.06（（m / s）Pa）以下。

6. 发明申请

US20080107517A1 SEMICONDUCTOR CONTAINER OPENING/CLOSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：半导体容器开关/闭合装置和半导体器件制造方法
公开(公告)号：US20080107517A1
公开(公告)日：2008-05-08
申请号：US11960804
申请日：2007-12-20
申请人： Yoshiaki KOYAYASHI , Shigen Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
发明人： Yoshiaki KOYAYASHI , Shigen Kobayashi , Kenji Tokunaga , Koji Kato , Teruo Minami
IPC分类号： B65H1/00
CPC分类号： H01L21/67775 , H01L21/6735 , H01L21/67772
摘要： A method is provided of manufacturing semiconductor devices formed on a semiconductor wafer, including placing the wafer in a semiconductor container and conveying the container to a semiconductor manufacturing apparatus. An opening of the container is opposed to an opening of the apparatus such that an opener of the apparatus holds a lid of the opening the container. A key of the opener is inserted to a latch groove of the lid, and the key is rotated to contact a latch of the lid. The openings are connected such that a velocity differential pressure ratio obtained by dividing the maximum velocity when the opener holding the lid horizontally moves away from the opening of the container, by the differential pressure between the inside pressure and the outside pressure of the apparatus, is set to be 0.06 ((m/s)/Pa) or less, and then the wafer is processed.
摘要翻译：提供一种制造形成在半导体晶片上的半导体器件的方法，包括将晶片放置在半导体容器中并将容器输送到半导体制造装置。容器的开口与装置的开口相对，使得装置的开启器保持容器的开口盖。开启器的钥匙被插入到盖的闩锁槽中，并且钥匙被旋转以接触盖的闩锁。这些开口被连接成使得通过将保持盖的开启器水平地移动离开容器的开口的最大速度获得的速度差压比通过内部压力和设备的外部压力之间的压差来实现，设定为0.06（（m / s）/ Pa）以下，然后处理晶片。

7. 发明授权

US4027554A Electronic control apparatus of an automatic speed changing apparatus 失效
标题翻译：自动变速装置的电子控制装置
公开(公告)号：US4027554A
公开(公告)日：1977-06-07
申请号：US491359
申请日：1974-07-24
申请人： Terukazu Ito , Kiyoharu Nakao , Teruo Minami , Masaru Uenoyama
发明人： Terukazu Ito , Kiyoharu Nakao , Teruo Minami , Masaru Uenoyama
IPC分类号： F16H47/06 , F16H61/14 , F16H61/18 , F16H63/44 , B60K41/18
CPC分类号： F16H61/143 , Y10T477/63525 , Y10T477/6935
摘要： In an electronic control apparatus of an automatic speed changing apparatus for use in an internal combustion engine of the type wherein the engine is connected with a load through a fluid type torque converter and a multiple stage gear changer, there are provided means for locking-up the torque converter when the speed of the output shaft thereof exceeds a first predetermined speed, means for shifting-up the gear changer to a higher stage when the speed of the output shaft exceeds a second predetermined speed which is higher than the first predetermined speed, and means for shifting-down the gear changer to a lower stage when the speed of the output shaft decreases below a third predetermined speed which is lower than the first predetermined speed whereby effecting automatic speed change control while the torque converter is maintained in the locked-up condition.
摘要翻译：在用于内燃机的自动变速装置的电子控制装置中，其中发动机通过流体式变矩器和多级变速器与负载连接，提供了用于锁定的装置所述变矩器当其输出轴的速度超过第一预定速度时，用于当所述输出轴的速度超过比所述第一预定速度高的第二预定速度时将所述变速器向上移动的装置，以及当所述输出轴的速度降低到低于所述第一预定速度的第三预定速度以下时，将所述变速器向下移动到下级的装置，由此在所述变矩器保持在所述锁定状态下进行自动变速控制， up状态。

8. 发明授权

US4745997A Offset detecting device for trolley-assisted vehicles 失效
标题翻译：小车辅助车辆偏移检测装置
公开(公告)号：US4745997A
公开(公告)日：1988-05-24
申请号：US76336
申请日：1987-07-22
申请人： Hidetoshi Takei , Takumi Nozaka , Teruo Minami
发明人： Hidetoshi Takei , Takumi Nozaka , Teruo Minami
IPC分类号： B60L5/18 , B60L5/14 , B60L5/04 , B60L9/00
CPC分类号： B60L5/14 , B60L2200/26
摘要： Offset condition detecting device for detecting offset condition of pantographs from overhead contact wires by means of electric current detected by a contact element mounted on the pantograph and insulated therefrom. The detection is made electrically and in case of emergency the pantographs are lowered down at high speed to prevent damage of pantographs of trolley-assisted vehicles.
摘要翻译：偏移条件检测装置，用于通过由安装在受电弓上的接触元件检测到的电流并与其隔绝的电流来检测受电弓从架空接触导线的偏移状态。检测是电气的，并且在紧急情况下，受电弓以高速降低，以防止小车辅助车辆的受电弓的损坏。

9. 发明授权

US5320654A Air cleaner for cooling device in driving system mounted on large size dump truck 失效
标题翻译：安装在大型自卸车上的驾驶系统中的冷却装置的空气净化器
公开(公告)号：US5320654A
公开(公告)日：1994-06-14
申请号：US958120
申请日：1992-12-23
申请人： Teruo Minami
发明人： Teruo Minami
IPC分类号： B60K11/06 , B01D45/04 , B01D45/12 , B01D50/00 , B60K11/08 , B60K13/02
CPC分类号： B60K11/08 , B01D45/04 , B01D45/12 , B01D50/002
摘要： An air cleaner for a cooling device in a driving system mounted on a large-size dump truck capable of separating and removing dust and rain water contained the air flow flowing in through an air intake portion from the air with a high efficiency. This air cleaner for cooling comprises a plurality of strata tubes (12) horizontally spanning between front and rear walls (1a, 1b) of a rectangular parallelepiped shape intake portion (1), a net pasted over the entire surface of the front of the intake portion, and a cover disposed in front of the net.
摘要翻译： PCT No.PCT / JP91 / 00904 Sec。 371日期1992年12月23日 102（e）日期1992年12月23日PCT提交1991年7月4日PCT公布。出版物WO92 / 00860 日期：1992年1月23日。一种用于安装在能够分离和除去灰尘和雨水的大型自卸车上的驾驶系统中的冷却装置的空气净化器，其包含通过空气进入部分从空气流入的空气流，效率高。这种用于冷却的空气净化器包括水平跨过长方体形状的进气部分（1）的前壁和后壁（1a，1b）之间的多个层状管（12），粘贴在进气口前部的整个表面上的网部分和布置在网的前面的盖。

10. 发明授权

US4471231A Alternating current feeder system for trolley-assisted dump trucks 失效
标题翻译：手推车自卸车的交流供电系统
公开(公告)号：US4471231A
公开(公告)日：1984-09-11
申请号：US498288
申请日：1983-05-26
申请人： Teruo Minami
发明人： Teruo Minami
IPC分类号： B61C7/02 , B60M1/18 , B60M3/00 , B60M3/04 , B60M7/00 , H02J3/00
CPC分类号： B60M1/18 , B60M3/00 , Y10T307/297 , Y10T307/713
摘要： An alternating current feeder system for use in trolley assisted dump trucks has a feeder circuit of a.c. system including a Scott connection transformer used as a main substation, main- and T-winding sections having a phase difference of 90 degrees on the secondary side of the transformer and serving to transform three-phase a.c. power into single phase one supplied to feeder substations, single phase transformers respectively installed in the feeder substations, each being adapted to drop the voltage applied on trolley wires to the level required for the latter, and a different phase section provided in a boundary defined between the single phase transformers.
摘要翻译：用于手推车辅助自卸车的交流馈电系统具有交流电源。系统包括用作主变电站的斯科特连接变压器，主变压器和三相绕组部分在变压器次级侧具有90度的相位差，用于变换三相交流电。供电给供电站的单相电源，分别安装在供电变电站中的单相变压器，每个变压器适于将施加在电车线上的电压降低到后者所需的电平，以及设置在单相变压器。

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