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    • 5. 发明申请
    • Rotary-type comb-drive actuator and variable optical attenuator using the same
    • 旋转式梳驱动执行机构及可变光衰减器
    • US20050264131A1
    • 2005-12-01
    • US10921194
    • 2004-08-19
    • Yoon Hong
    • Yoon Hong
    • G02B26/02B81B3/00G02B26/06H02N1/00H02N11/00
    • H02N1/008
    • The present invention relates to an actuator and optical attenuator using the actuator. The rotary-type comb-drive actuator includes a substrate, a movable electrode, a drive electrode, one or more vertical springs, one or more vertical spring anchors, a horizontal spring and a horizontal spring anchor. The movable electrode is arranged on a plane of the substrate to be movable in parallel to the substrate plane, and formed to have a predetermined length so as to have a comb-shaped electrode comprised of a plurality of fingers. The drive electrode is formed to have a length corresponding to that of the movable electrode, and formed to have a comb-shaped electrode that is comprised of a plurality of fingers and arranged to be interdigitated with the comb-shaped electrode of the movable electrode. The vertical springs are arranged in parallel to the substrate, and connected to be perpendicular to the movable electrode on both sides of a first end of the movable electrode. The vertical spring anchors are connected to the vertical springs to support the vertical springs. The horizontal spring has a main part connected in parallel to a longitudinal direction of the movable electrode. The horizontal spring anchor is connected to the horizontal spring to support the horizontal spring, and fixed on the substrate.
    • 本发明涉及使用致动器的致动器和光衰减器。 旋转式梳齿驱动致动器包括基板,可动电极,驱动电极,一个或多个垂直弹簧,一个或多个垂直弹簧锚固件,水平弹簧和水平弹簧锚固件。 可移动电极布置在基板的平面上以可平行于基板平面移动,并形成为具有预定长度,以具有由多个指状物组成的梳形电极。 驱动电极形成为具有与可动电极的长度相对应的长度,并且形成为具有由多个指状物构成的梳状电极,并配置成与可动电极的梳状电极交叉配置。 垂直弹簧平行于基板布置,并且在可动电极的第一端的两侧垂直于可动电极连接。 垂直弹簧锚连接到垂直弹簧以支撑垂直弹簧。 水平弹簧具有与可动电极的纵向平行地连接的主要部分。 水平弹簧锚杆连接到水平弹簧以支撑水平弹簧,并固定在基板上。
    • 6. 发明申请
    • Multi-channel variable optical attenuator and fabrication method thereof
    • 多通道可变光衰减器及其制造方法
    • US20050078931A1
    • 2005-04-14
    • US10735647
    • 2003-12-16
    • Hyun LeeYoon HongSung Lee
    • Hyun LeeYoon HongSung Lee
    • G02B26/02B81B3/00G02B6/26G02B6/35
    • G02B6/353G02B6/266G02B6/3552G02B6/357G02B6/3584G02B6/3594
    • The present invention relates to a multi-channel variable optical attenuator, more particularly, which comprises a multilayer structure of a fiber optic module and an attenuating module in order to enhance the integrity of the multi-channel variable optical attenuator. The multi-channel variable optical attenuator comprises at least two optical signal transmission lines which are arranged parallel with each other, and have associated separating spaces formed between input and output terminals to adjust the power of an optical signal. A screen is placed in one of the separating spaces of the optical signal transmission lines, and movable in a direction crossing the optical signal transmission lines. A Micro Electro Mechanical System (MEMS) actuator is placed above one of the optical signal transmission lines, and connected with the screen to shift the same. The MEMS actuator is placed above a first optical signal transmission line which is placed adjacent to a second optical signal transmission line for placing the screen therein.
    • 多通道可变光衰减器技术领域本发明涉及一种多通道可变光衰减器,更具体地说涉及一种光纤模块和衰减模块的多层结构,以增强多通道可变光衰减器的完整性。 多通道可变光衰减器包括彼此并联布置的至少两个光信号传输线,并且具有形成在输入端和输出端之间的相关分离空间,以调整光信号的功率。 屏幕放置在光信号传输线的分离空间之一中,并可沿与光信号传输线交叉的方向移动。 微电子机械系统(MEMS)致动器位于光信号传输线之上,并与屏幕连接以移动。 MEMS致动器被放置在与第二光信号传输线相邻放置屏幕的第一光信号传输线的上方。
    • 7. 发明申请
    • Cantilever-type PLC optical attenuator and manufacturing method thereof
    • 悬臂型PLC光衰减器及其制造方法
    • US20050207720A1
    • 2005-09-22
    • US10911492
    • 2004-08-05
    • Sung Jun LeeYoon HongRo LeeJong Kim
    • Sung Jun LeeYoon HongRo LeeJong Kim
    • G02B6/00G02B6/26
    • G02B6/266G02B6/3502G02B6/3552G02B6/3572G02B6/3594
    • Disclosed herein is a cantilever-type PLC optical attenuator. The optical attenuator includes a base substrate made of silicon, an input waveguide, and output waveguide. Front portions of the upper and lower silicon substrates around the output waveguide are thinner than rear portions of the upper and lower silicon substrates around the output waveguide to provide a cantilever part having upper and lower cantilever substrate parts. A first electrode is provided on a bottom of the lower cantilever substrate part, and a second electrode is provided on the base substrate to electromagnetically correspond to the first electrode. When a voltage is applied between the first and second electrodes, the cantilever part moves up and down by an electromagnetic force, thus controlling the output light.
    • 这里公开了一种悬臂型PLC光衰减器。 光衰减器包括由硅制成的基底,输入波导和输出波导。 输出波导周围的上硅衬底和下硅衬底的前部比输出波导周围的上硅衬底和下硅衬底的后部更薄,以提供具有上和下悬臂衬底部件的悬臂部件。 第一电极设置在下悬臂基板部分的底部,并且第二电极设置在基底基板上以与第一电极电磁对应。 当在第一和第二电极之间施加电压时,悬臂部分通过电磁力上下移动,从而控制输出光。
    • 9. 发明申请
    • Optical attenuator
    • 光衰减器
    • US20050094960A1
    • 2005-05-05
    • US10790022
    • 2004-03-02
    • Jung LeeYoon HongJong Kim
    • Jung LeeYoon HongJong Kim
    • G02B6/00G02B6/26G02B6/35
    • G02B6/3572G02B6/266G02B6/3508G02B6/357G02B6/3576G02B6/3578G02B6/3582G02B6/3586G02B6/3594
    • An optical attenuator includes an attenuating section arranged between a receiving waveguide coaxial with a receiving optical fiber and a transmitting waveguide coaxial with a transmitting optical fiber to attenuate the intensity of light emitted from the receiving waveguide. In the optical attenuator, an actuator drives a movable section across the propagation of light. An inner housing has a cover mounted with the receiving and transmitting waveguides in an underside and a body arranged and bonded under the cover. The receiving and transmitting waveguides can be arranged in a cavity of the body without interference. An outer housing contains the inner housing to protect the same. A calibrating section generates attractive force from above the cover to pull the movable section against the latitudinal deformation thereof so that optical axes of the attenuating section and the receiving and transmitting sections are coaxially aligned, compensating the vertical deformation of the movable section, in order to minimize the initial insertion loss of light as well as improve optical properties of a final product.
    • 光衰减器包括布置在与接收光纤同轴的接收波导之间的衰减部分和与发射光纤同轴的发射波导,以衰减从接收波导发射的光的强度。 在光衰减器中,致动器驱动可移动部分跨越光的传播。 内壳体具有安装有下侧的接收和传输波导的盖,以及布置并结合在盖下面的主体。 接收和发射波导可以被布置在身体的空腔中而没有干扰。 外壳包含内壳以保护内壳。 校准部分从盖上方产生吸引力以将可移动部分拉向其纬向变形,使得衰减部分和接收和传递部分的光轴同轴对准,以补偿可动部分的垂直变形,以便 最小化光的初始插入损耗以及改善最终产品的光学性能。