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    • 3. 发明申请
    • OVERSPEED PROTECTION DEVICE FOR ESCALATOR OR MOVING WALKWAY
    • 用于自动扶梯或移动WALKWAY的过载保护装置
    • US20090294247A1
    • 2009-12-03
    • US12299188
    • 2007-05-08
    • Feng XuJie HuMingping Jiang
    • Feng XuJie HuMingping Jiang
    • B66B29/00F16D59/00
    • B66B29/00
    • An overspeed protective device connected to the rotary shaft (3) of a drive machine in an escalator or a moving walkway is disclosed. The escalator or moving walkway includes a safety switch (9) for controlling electric current to be fed to the machine. The overspeed protective device comprises a rotation unit connected to the rotary shaft (3) so that it rotates with the rotary shaft, said rotation unit including a rotating bottom plate (2), at least one centrifugal weight (14), one end of which is pivotally connected to the rotating bottom plate (2); spring (11), one end of which is connected to the weight (14); and limiting screws (13) provided on each of the two sides of the weight. The overspeed protective device also comprises a control arm unit consisting of a drive rod (16), a slide rod (17) and a bent rod (7), the bent rod (7) comprising a first surface (7-1), a second surface (7-2) and a third surface (7-3), wherein the first surface allows power to be fed to the drive machine when it engages with the safety switch, the second surface prevents power from being fed to the drive machine when it engages with the safety switch, and the third surface is used to prevent the automatic resetting of the safety switch (9).
    • 公开了一种连接到自动扶梯或移动人行道中的驱动机的旋转轴(3)的超速保护装置。 自动扶梯或自动人行道包括用于控制供给机器的电流的安全开关(9)。 超速保护装置包括连接到旋转轴(3)的旋转单元,使得其与旋转轴一起旋转,所述旋转单元包括旋转底板(2),至少一个离心重物(14),其一端 枢转地连接到旋转底板(2); 弹簧(11),其一端连接到重物(14)上; 以及设置在所述重物的两侧的每一侧上的限制螺钉(13)。 超速保护装置还包括由驱动杆(16),滑杆(17)和弯杆(7)组成的控制臂单元,所述弯杆(7)包括第一表面(7-1), 第二表面(7-2)和第三表面(7-3),其中当第一表面与安全开关接合时,第一表面允许动力被供给到驱动机器,第二表面防止动力被馈送到驱动机器 当其与安全开关接合时,并且第三表面用于防止安全开关(9)的自动复位。
    • 7. 发明授权
    • Focus detection apparatus for projection lithography system
    • 投影光刻系统的焦点检测装置
    • US08760626B2
    • 2014-06-24
    • US13464321
    • 2012-05-04
    • Jinlong LiSong HuLixin ZhaoFeng XuLanlan LiZhuang Sheng
    • Jinlong LiSong HuLixin ZhaoFeng XuLanlan LiZhuang Sheng
    • G03B27/52G03B27/70G03F9/00
    • G03F9/7026G03F9/7061
    • Disclosed is a focus detection apparatus for a projection lithography system. The apparatus includes: a laser; a focus optical unit configured to focusing the emitted laser beam; a force detection unit configured to reflect the focused laser beam at the backside; a position detection unit configured to detect variations in position of a light spot formed by the reflected laser beam, and output a strength signal indicating the strength of the interaction force between the force detection unit and the object; a differential amplifier configured to output a Z-direction differential signal based on the strength signal and a reference signal; a Z-direction feedback control unit configured to perform feedback control; and a scan signal generator configured to output a signal for controlling the movement of the stage in the XY plane. The focus detection apparatus has high precision, efficiency and process applicability.
    • 公开了一种用于投影光刻系统的焦点检测装置。 该装置包括:激光器; 被配置为聚焦所发射的激光束的聚焦光学单元; 力检测单元,被配置为将聚焦的激光束反射到背面; 位置检测单元,被配置为检测由所述反射的激光束形成的光点的位置的变化,并且输出表示所述力检测单元与所述物体之间的相互作用力的强度的强度信号; 差分放大器,被配置为基于强度信号和参考信号输出Z​​方向差分信号; 配置为执行反馈控制的Z方向反馈控制单元; 以及扫描信号发生器,被配置为输出用于控制所述载物台在XY平面中的运动的信号。 焦点检测装置具有高精度,高效率和工艺适用性。