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    • 9. 发明授权
    • Delivery device for deposition
    • 用于沉积的输送装置
    • US08420168B2
    • 2013-04-16
    • US13466507
    • 2012-05-08
    • Roger S. KerrDavid H. LevyJames T. Murray
    • Roger S. KerrDavid H. LevyJames T. Murray
    • C23C16/455C23F1/00H01L21/306C23C16/06C23C16/22
    • B05B1/005C23C16/45551C23C16/45574Y10T29/494Y10T29/49432Y10T29/49826Y10T137/0318Y10T137/87249
    • A delivery device for thin-film material deposition has at least first, second, and third inlet ports for receiving a common supply for a first, a second and a third gaseous material, respectively. Each of the first, second, and third elongated emissive channels allow gaseous fluid communication with one of corresponding first, second, and third inlet ports. The delivery device can be formed from apertured plates, superposed to define a network of interconnecting supply chambers and directing channels for routing each of the gaseous materials from its corresponding inlet port to a corresponding plurality of elongated emissive channels. The delivery device comprises a diffusing channel formed by a relief pattern between facing plates. Also disclosed is a process for thin film deposition. Finally, more generally, a flow diffuser and a corresponding method of diffusing flow is disclosed.
    • 用于薄膜材料沉积的递送装置具有至少第一,第二和第三入口端口,用于分别接收用于第一,第二和第三气态材料的共同供应。 第一,第二和第三细长发射通道中的每一个允许与对应的第一,第二和第三入口端口之一的气态流体连通。 输送装置可以由孔板形成,叠加以形成互连供应室的网络,并且引导通道用于将每个气态材料从其相应的入口端口路由到相应的多个细长的发射通道。 输送装置包括由相对板之间的浮雕图案形成的扩散通道。 还公开了一种用于薄膜沉积的方法。 最后,更一般地,公开了一种流扩散器和相应的扩散流的方法。