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    • 9. 发明申请
    • FABRICATING MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE
    • 制造包括合成膜的MEMS复合传感器
    • US20120270352A1
    • 2012-10-25
    • US13089532
    • 2011-04-19
    • James D. HuffmanMaria J. Lehmann
    • James D. HuffmanMaria J. Lehmann
    • H01L21/02
    • B81C1/00182B81B2201/038B81B2203/053G01H11/06H02N1/002H04R1/222H04R17/02H04R31/00H04R2201/003
    • A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.
    • 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合,第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交,使得转换材料的第一部分锚定到基板的第一表面,并且换能材料的第二部分延伸 在空腔的至少一部分上方。
    • 10. 发明授权
    • Fabricating MEMS composite transducer including compliant membrane
    • 制造MEMS复合传感器,包括合适的膜
    • US08409900B2
    • 2013-04-02
    • US13089532
    • 2011-04-19
    • James D. HuffmanMaria J. Lehmann
    • James D. HuffmanMaria J. Lehmann
    • H01L21/02
    • B81C1/00182B81B2201/038B81B2203/053G01H11/06H02N1/002H04R1/222H04R17/02H04R31/00H04R2201/003
    • A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.
    • 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合,第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交,使得转换材料的第一部分锚定到基板的第一表面,并且换能材料的第二部分延伸 在空腔的至少一部分上方。