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1. 发明申请

US20080006888A1 Nanomachined mechanical components using nanoplates, methods of fabricating the same and methods of manufacturing nanomachines 失效
标题翻译：使用纳米板的纳米机械部件，其制造方法和制造纳米机械的方法
公开(公告)号：US20080006888A1
公开(公告)日：2008-01-10
申请号：US11263476
申请日：2005-10-31
申请人： Yong Yun , Chil Ah , Dong Ha , Hyung Park , Wan Yun , Kwang-Cheol Lee , Gwang Park
发明人： Yong Yun , Chil Ah , Dong Ha , Hyung Park , Wan Yun , Kwang-Cheol Lee , Gwang Park
IPC分类号： H01L21/00
CPC分类号： B81C99/0095 , B81B2201/035 , B81C2201/0143 , Y10S977/883 , Y10S977/888
摘要： Disclosed herein is a method of fabricating nano-components using nanoplates, including the steps of: printing a grid on a substrate using photolithography and Electron Beam Lithography; spraying an aqueous solution dispersed with nanoplates onto the grid portion to position the nanoplates on the substrate; depositing a protective film of a predetermined thickness on the substrate and the nanoplates positioned on the substrate; ion-etching the nanoplates deposited with the protective film by using a Focused Ion Beam (FIB) or Electron Beam Lithography; and eliminating the protective film remaining on the substrate using a protective film remover after the ion-etching of the nanoplates, and a method of manufacturing nanomachines or nanostructures by transporting such nano-components using a nano probe and assembling with other nano-components. The present invention makes it possible to fabricate the high-quality nano-components in a more simple and easier manner at a lower cost, as compared to other conventional methods. Further, the present invention provides a method of implementing nanomachines through combination of such nano-components and biomolecules, etc.
摘要翻译：本文公开了使用纳米板制造纳米组分的方法，包括以下步骤：使用光刻和电子束光刻在衬底上印刷栅格; 将分散有纳米板的水溶液喷射到栅格部分上以将纳米板定位在基底上; 在衬底和位于衬底上的纳米板上沉积预定厚度的保护膜; 通过使用聚焦离子束（FIB）或电子束光刻法离子蚀刻沉积有保护膜的纳米板; 并且在纳米板的离子蚀刻之后使用保护膜去除剂去除残留在基板上的保护膜，以及通过使用纳米探针传输这种纳米成分并与其他纳米成分组装来制造纳米机械或纳米结构的方法。与其它常规方法相比，本发明可以以更简单和更容易的方式以更低的成本制造高质量的纳米组分。此外，本发明提供了通过这些纳米组分和生物分子等的组合来实现纳米机器的方法。

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