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    • 3. 发明申请
    • Reactor, a microchip, and a micro reactor system as well as a method for manufacturing the reactor
    • 反应器,微芯片和微反应器系统以及制造反应器的方法
    • US20060169045A1
    • 2006-08-03
    • US11338293
    • 2006-01-24
    • Yoko ShinoharaMinao YamamotoMasataka ShinogiHaruki Kato
    • Yoko ShinoharaMinao YamamotoMasataka ShinogiHaruki Kato
    • B01J19/00
    • G01N29/036G01N2291/0256
    • In order to provide a reactor, a micro reactor chip, and a micro reactor system which can maintain high sensitivity without residual stresses on a crystal oscillator and unwanted oscillation modes, both surfaces of an AT-cut crystal plate 100 is deposited or sputtered with gold to prepare a detection electrode 601, an opposite electrode 602, and wiring to both electrodes. A resist is then formed on a cleaned silicon wafer. Polydimethylsiloxane (PDMS) is then poured onto the silicon wafer and allowed to cure. The PDMS is then peeled from the silicon wafer to form a groove 500 in the PDMS. The PDMS is then laid on the crystal plate. When the crystal substrate side is then irradiate with ultraviolet light the silicon-carbon bond between the crystal and the PDMS is cut, thus causing the crystal and the PDMS to bond to each other by means of a siloxane bond. The liquid introduction port and the liquid discharge port are then cut to form the reactor. A micro reactor chip and a micro reactor system are configured through the application of the construction of the reactor.
    • 为了提供一种反应堆,微反应堆芯片和微反应器系统,其可以在晶体振荡器和不期望的振荡模式下保持高灵敏度而没有残余应力,AT切割晶体板100的两个表面被沉积或溅射金 以准备检测电极601,相对电极602和与两电极的布线。 然后在清洁的硅晶片上形成抗蚀剂。 然后将聚二甲基硅氧烷(PDMS)倒入硅晶片上并使其固化。 然后PDMS从硅晶片剥离,以在PDMS中形成凹槽500。 然后将PDMS放置在晶体板上。 当晶体衬底侧用紫外光照射时,晶体和PDMS之间的硅 - 碳键被切割,从而通过硅氧烷键使晶体和PDMS彼此结合。 然后将液体导入口和液体排出口切割成反应器。 微反应器芯片和微反应器系统通过应用反应器的结构来构造。