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    • 4. 发明申请
    • NUCLEIC ACID ANALYZING DEVICE AND NUCLEIC ACID ANALYZER
    • 核酸分析装置和核酸分析仪
    • US20110081655A1
    • 2011-04-07
    • US12997469
    • 2009-05-13
    • Masatoshi NaraharaToshiro SaitoNaoshi ItabashiJiro YamamotoHiroyuki Uchiyama
    • Masatoshi NaraharaToshiro SaitoNaoshi ItabashiJiro YamamotoHiroyuki Uchiyama
    • C12Q1/68C12M1/34
    • G01N21/648
    • An object of the present invention relates to distinguishing, from a fluorophore of an unreacted substrate, a single fluorophore attached to a nucleotide that is incorporated into a probe by a nucleic acid synthesis. The present invention relates to a nucleic acid analyzing device that analyzes a nucleic acid in sample by fluorescence, wherein a localized surface plasmon is generated by illumination, and a probe for analyzing the nucleic acid in the sample is on the site where the surface plasmon is generated. According to the present invention, since it is possible to efficiently produce fluorescence intensifying effects due to the surface plasmon and to immobilize the probe to a region within the reach of the fluorescence intensifying effects, it becomes possible to measure a nucleic acid synthesis without removing unreacted nucleotide to which fluorophores are attached.
    • 本发明的目的在于从未反应的底物的荧光团区分与通过核酸合成并入探针中的核苷酸连接的单个荧光团。 本发明涉及通过荧光分析样品中的核酸的核酸分析装置,其中通过照射产生局部表面等离子体激元,并且用于分析样品中的核酸的探针位于表面等离子体为 生成。 根据本发明,由于可以有效地产生由于表面等离子体激元引起的荧光增强作用并且将探针固定在荧光增强作用范围内的区域,因此可以测量核酸合成而不去除未反应的 附着有荧光团的核苷酸。
    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07816702B2
    • 2010-10-19
    • US12245077
    • 2008-10-03
    • Shinichi SaitoMasahiro AokiHiroyuki UchiyamaHideo ArimotoNoriyuki SakumaJiro Yamamoto
    • Shinichi SaitoMasahiro AokiHiroyuki UchiyamaHideo ArimotoNoriyuki SakumaJiro Yamamoto
    • H01L33/00
    • H01S5/12B82Y20/00H01S5/0424H01S5/0425H01S5/1237H01S5/125H01S5/18341H01S5/3004H01S5/3427H01S2301/176H01S2302/00
    • There are a silicon laser device having a IV-group semiconductor such as silicon or germanium equivalent to the silicon as a basic constituent element on a substrate made of the silicon, and the like by a method capable of easily forming the silicon laser device by using a general silicon process, and a manufacturing method thereof. The silicon laser device is an ultrathin silicon laser that includes a first electrode unit injecting electrons, a second electrode unit injecting holes, a light emitting unit electrically connected to the first electrode unit and the second electrode unit, wherein the light emitting unit is made of single-crystal silicon and has a first surface (top surface) and a second surface (bottom surface) opposed to the first surface, a waveguide made of a first dielectric, which is disposed in the vicinity of the light emitting unit, by setting surface directions of the first and second surfaces as a surface (100) and thinning a thickness of the light emitting unit in a direction perpendicular to the first and second surfaces, and a mirror formed by alternately adjoining the first dielectric and a second dielectric.
    • 存在具有诸如硅等离子体的硅组合半导体的硅激光器装置,其等同于由硅制成的衬底上作为基本构成元件的硅等,通过使用能够容易地形成硅激光器件的方法, 通用硅工艺及其制造方法。 硅激光器件是一种超薄硅激光器,其包括注入电子的第一电极单元,注入空穴的第二电极单元,与第一电极单元和第二电极单元电连接的发光单元,其中发光单元由 单晶硅,并且具有与第一表面相对的第一表面(顶表面)和第二表面(底表面),通过设置在发光单元附近的由第一电介质制成的波导 第一表面和第二表面的方向作为表面(100),并且在垂直于第一和第二表面的方向上减薄发光单元的厚度,以及通过交替地邻接第一电介质和第二电介质而形成的反射镜。
    • 6. 发明申请
    • Semiconductor memory device and manufacturing method thereof
    • 半导体存储器件及其制造方法
    • US20100237397A1
    • 2010-09-23
    • US12659563
    • 2010-03-12
    • Hiroyuki Uchiyama
    • Hiroyuki Uchiyama
    • H01L27/108
    • H01L27/10876H01L29/66666H01L29/7827
    • To provide an active region having first and second diffusion layers positioned at both sides of a gate trench and a third diffusion layer formed on a bottom surface of the gate trench, first and second memory elements connected to the first and second diffusion layers, respectively, a bit line connected to the third diffusion layer, a first gate electrode that covers a first side surface of the gate trench via a gate dielectric film and forms a channel between the first diffusion layer and the third diffusion layer, and a second gate electrode that covers a second side surface of the gate trench via a gate dielectric film and forms a channel between the second diffusion layer and the third diffusion layer. According to the present invention, because separate transistors are formed on both side surfaces of a gate trench, two times of conventional integration can be achieved.
    • 为了提供具有位于栅极沟槽的两侧的第一和第二扩散层和形成在栅极沟槽的底表面上的第三扩散层的有源区,分别连接到第一和第二扩散层的第一和第二存储元件, 连接到所述第三扩散层的位线,经由栅极电介质膜覆盖所述栅极沟槽的第一侧表面并在所述第一扩散层和所述第三扩散层之间形成沟道的第一栅电极,以及第二栅电极, 经由栅极电介质膜覆盖栅极沟槽的第二侧表面,并在第二扩散层和第三扩散层之间形成通道。 根据本发明,由于在栅极沟槽的两个侧表面上形成分离的晶体管,所以可以实现两次常规集成。
    • 8. 发明授权
    • Semiconductor device manufacturing method and semiconductor device
    • 半导体器件制造方法和半导体器件
    • US07732273B2
    • 2010-06-08
    • US12213624
    • 2008-06-23
    • Hiroyuki Uchiyama
    • Hiroyuki Uchiyama
    • H01L21/8242H01L21/20
    • H01L28/40H01L27/10852
    • A manufacturing method of a semiconductor device having a highly reliable capacitor, and the semiconductor device are provided. The semiconductor device manufacturing method according to the present invention includes: a first step of forming a first electrode of a capacitor on a semiconductor substrate; a second step of forming a capacitor insulating film on the whole surface including a side surface and an upper surface of the first electrode; a third step of forming a protection insulating film made of a material different from that of the capacitor insulating film, on the capacitor insulating film; a fourth step of removing the protection insulating film and the capacitor insulating film from the upper surface of the first electrode, by anisotropically etching the protection insulating film and the capacitor insulating film; a fifth step of removing the protection insulating film that remains on the side surface of the first electrode; and a sixth step of forming a second electrode of the capacitor on the capacitor insulating film, after removing the protection insulating film.
    • 提供具有高可靠性电容器的半导体器件的制造方法和半导体器件。 根据本发明的半导体器件制造方法包括:在半导体衬底上形成电容器的第一电极的第一步骤; 在包括第一电极的侧表面和上表面的整个表面上形成电容器绝缘膜的第二步骤; 在电容器绝缘膜上形成由不同于电容器绝缘膜的材料制成的保护绝缘膜的第三步骤; 通过各向异性蚀刻保护绝缘膜和电容器绝缘膜,从第一电极的上表面去除保护绝缘膜和电容器绝缘膜的第四步骤; 去除保留在第一电极的侧表面上的保护绝缘膜的第五步骤; 以及在除去保护绝缘膜之后,在电容器绝缘膜上形成电容器的第二电极的第六步骤。
    • 10. 发明申请
    • Semiconductor device and fabrication method of the same
    • 半导体器件及其制造方法
    • US20090121283A1
    • 2009-05-14
    • US12289372
    • 2008-10-27
    • Hiroyuki Uchiyama
    • Hiroyuki Uchiyama
    • H01L21/336H01L29/78
    • H01L29/78642H01L27/12
    • A semiconductor device includes a substrate; a first insulating layer provided on the substrate; a conductive layer buried in the first insulating layer; a semiconductor pillar including a lower diffusion layer provided immediately above the conductive layer, the lower diffusion layer being electrically connected to the conductive layer, a semiconductor layer on the lower diffusion layer, and an upper diffusion layer on the semiconductor layer; a gate insulating film provided on a peripheral side surface of the semiconductor layer; a gate electrode provided on the gate insulating film; and a second insulating layer provided such that the gate electrode and a circumference of the semiconductor pillar are buried in the second insulating layer.
    • 半导体器件包括衬底; 设置在所述基板上的第一绝缘层; 埋入第一绝缘层中的导电层; 半导体柱,包括紧邻导电层上方的下扩散层,下扩散层与导电层电连接,下扩散层上的半导体层和半导体层上的上扩散层; 设置在所述半导体层的周边侧面上的栅极绝缘膜; 设置在所述栅极绝缘膜上的栅电极; 以及设置成使得栅电极和半导体柱的周边被埋在第二绝缘层中的第二绝缘层。