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1. 发明申请

US20060104753A1 Stage assembly with lightweight fine stage and low transmissibility 有权
标题翻译：舞台装配轻巧细腻，传送率低
公开(公告)号：US20060104753A1
公开(公告)日：2006-05-18
申请号：US11048405
申请日：2005-01-31
申请人： Yoichi Arai , Andrew Hazelton , Michael Binnard , W. Novak , Douglas Watson , Kirk Lok
发明人： Yoichi Arai , Andrew Hazelton , Michael Binnard , W. Novak , Douglas Watson , Kirk Lok
IPC分类号： B65H43/08
CPC分类号： G03F7/70716
摘要： A stage assembly (220) that moves a work piece (200) along a first axis, along a second axis and along a third axis includes a first stage (238), a first mover assembly (242) that moves the first stage (238) along the first axis, a second stage (240) that retains the work piece (200), a second mover assembly (244), and a non-contact bearing (257). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) along the first axis, along the second axis, and along the third axis. The non-contact bearing (257) supports the mass of the second stage (240). Further, the non-contact bearing (257) allows the second stage (240) to move relative to the first stage (238) along the first axis and along the second axis. The second mover assembly (244) can move the second stage (240) with at least four degrees of movement.
摘要翻译：沿着第二轴线沿着第三轴线沿着第一轴线移动工件（200）的台架组件（220）包括第一阶段（238），第一移动器组件（242），其使第一阶段（238）移动），保持所述工件（200）的第二级（240），第二移动器组件（244）和非接触式轴承（257）。第二移动器组件（244）沿着第一轴线沿着第二轴线和第三轴线相对于第一阶段（238）移动第二阶段（240）。非接触轴承（257）支撑第二级（240）的质量。此外，非接触式轴承（257）允许第二级（240）相对于第一级（238）沿着第一轴线并沿着第二轴线移动。第二移动器组件（244）可以以至少四个移动程度移动第二平台（240）。

2. 发明授权

US07869000B2 Stage assembly with lightweight fine stage and low transmissibility 有权
标题翻译：舞台装配轻巧细腻，传送率低
公开(公告)号：US07869000B2
公开(公告)日：2011-01-11
申请号：US11048405
申请日：2005-01-31
申请人： Yoichi Arai , Andrew J. Hazelton , Michael Binnard , W. Thomas Novak , Douglas C. Watson , Kirk Lok
发明人： Yoichi Arai , Andrew J. Hazelton , Michael Binnard , W. Thomas Novak , Douglas C. Watson , Kirk Lok
IPC分类号： G03B27/58 , G03B27/42
CPC分类号： G03F7/70716
摘要： A stage assembly (220) that moves a work piece (200) along a first axis, along a second axis and along a third axis includes a first stage (238), a first mover assembly (242) that moves the first stage (238) along the first axis, a second stage (240) that retains the work piece (200), a second mover assembly (244), and a non-contact bearing (257). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) along the first axis, along the second axis, and along the third axis. The non-contact bearing (257) supports the mass of the second stage (240). Further, the non-contact bearing (257) allows the second stage (240) to move relative to the first stage (238) along the first axis and along the second axis. The second mover assembly (244) can move the second stage (240) with at least four degrees of movement.
摘要翻译：沿着第二轴线沿着第三轴线沿着第一轴线移动工件（200）的台架组件（220）包括第一阶段（238），第一移动器组件（242），其使第一阶段（238）移动），保持所述工件（200）的第二级（240），第二移动器组件（244）和非接触式轴承（257）。第二移动器组件（244）沿着第一轴线沿着第二轴线和第三轴线相对于第一阶段（238）移动第二阶段（240）。非接触轴承（257）支撑第二级（240）的质量。此外，非接触式轴承（257）允许第二级（240）相对于第一级（238）沿着第一轴线并沿着第二轴线移动。第二移动器组件（244）可以以至少四个移动程度移动第二平台（240）。

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