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    • 4. 发明授权
    • MEMS implanted acoustic sensor
    • MEMS植入声传感器
    • US08634924B1
    • 2014-01-21
    • US12782552
    • 2010-05-18
    • Wen H. KoDarrin J. YoungRui ZhangPing HuangJun GuoXuesong YeCliff A. Megerian
    • Wen H. KoDarrin J. YoungRui ZhangPing HuangJun GuoXuesong YeCliff A. Megerian
    • A61N1/08
    • H04R25/606A61N1/36036H04R3/06H04R19/005H04R19/04
    • A system and method for a Micro Electro-Mechanical System acoustic sensor, or MEMS acoustic sensor, to be used as an implanted microphone for totally implantable cochlear implants or middle ear implants is presented. The MEMS acoustic sensor comprises a coupler that attaches the sensor to an inner part of the ear, a MEMS acoustic sensor that converts acoustic vibrations into a change in capacitance, and a low-noise interface electronics circuit chip that detects the change in capacitance in the MEMS acoustic sensor, creates an signal representing a portion of the acoustic vibrations, and transmits the signal to one or more other devices, such as a cochlear implant. A method of fabrication enables the MEMS acoustic sensor to be fabricated as a small, less than 1 mm3, light weight, less than 30 mg, device suitable for implantation on a structure of the middle ear.
    • 提出了一种用于微机电系统声学传感器或MEMS声学传感器的系统和方法,其用作用于完全植入式耳蜗植入物或中耳植入物的植入式麦克风。 MEMS声学传感器包括将传感器附接到耳部的内部的耦合器,将声音振动转换成电容变化的MEMS声学传感器,以及低噪声接口电子电路芯片,其检测电容的变化 MEMS声学传感器产生表示声振动的一部分的信号,并将该信号发送到诸如耳蜗植入物之类的一个或多个其它装置。 一种制造方法使得MEMS声学传感器能够被制造成适于植入在中耳结构上的小的,小于1mm 3的重量小于30mg的小型装置。