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1. 发明授权

US06801408B1 Data storage and retrieval apparatus with thin film read head having a planar sensor element and an extra gap and method of fabrication thereof 失效
标题翻译：具有薄膜读取头的数据存储和检索装置具有平面传感器元件和额外的间隙及其制造方法
公开(公告)号：US06801408B1
公开(公告)日：2004-10-05
申请号：US09705420
申请日：2000-11-02
申请人： Yingjian Chen , Ronald A. Barr , Hau-Ching Tong
发明人： Yingjian Chen , Ronald A. Barr , Hau-Ching Tong
IPC分类号： G11B539
CPC分类号： G11B5/3916
摘要： In at least one embodiment, the apparatus of the invention is a read sensor which includes a shield, a sensor element, a read gap positioned between the shield and the sensor element, and an extra gap positioned between the shield and the sensor element and adjacent the read gap. The sensor element is positioned in a sensor layer. With the sensor element and the shield separated by only the relatively thin gap layer, high sensitivity of the sensor element is obtained. Further, by placing the relatively thick extra gap between the shield and the sensor layer and about the sensor element, the potential for shorting is minimized. The shield can be planarized to keep the read gap and the sensor layer at, and about, the sensor element substantially planar. This, in turn, results in improved control of sensor track widths and greatly reduces the potential for pooling of photoresist. In at least one embodiment, the method of the invention is for fabricating a read sensor and includes depositing a read gap onto a planarized shield, depositing an extra gap adjacent an exposed portion of the read gap, and depositing a sensor element onto the exposed portion of the first gap and adjacent to the extra gap.
摘要翻译：在至少一个实施例中，本发明的装置是读取传感器，其包括屏蔽件，传感器元件，位于屏蔽件和传感器元件之间的读取间隙，以及位于屏蔽件和传感器元件之间的相邻的间隙读差距。传感器元件位于传感器层中。传感器元件和屏蔽仅由相对薄的间隙层隔开，可以获得传感器元件的高灵敏度。此外，通过在屏蔽和传感器层之间以及传感器元件周围放置相对较厚的额外间隙，使短路的可能性最小化。可以将屏蔽层平坦化，以将读取的间隙和传感器层保持在传感器元件的基本平面上并且围绕其传播。这反过来导致传感器轨道宽度的改进的控制，并且大大降低了光致抗蚀剂的集合的潜力。在至少一个实施例中，本发明的方法用于制造读取传感器，并且包括将读取间隙沉积在平坦化屏蔽上，在读取间隙的暴露部分附近沉积额外的间隙，以及将传感器元件沉积到暴露部分上的第一个间隙并且与额外的间隙相邻。

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