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1. 发明申请

US20080302974A1 OPTICAL AUTO FOCUSING SYSTEM AND METHOD FOR ELECTRON BEAM INSPECTION TOOL 有权
标题翻译：光电自动聚焦系统和电子束检测工具的方法
公开(公告)号：US20080302974A1
公开(公告)日：2008-12-11
申请号：US11759138
申请日：2007-06-06
申请人： Yi Xiang Wang , Van-Duc Nguyen , Jian Zhang
发明人： Yi Xiang Wang , Van-Duc Nguyen , Jian Zhang
IPC分类号： G21K5/10 , G01B11/00
CPC分类号： G03B13/36 , G02B7/32 , G06T7/001 , G06T2207/30148 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2482 , H01J2237/2817
摘要： A method and system for inspecting a semiconductor wafer. The method includes providing an illumination flux through a pattern plate and a lens to a surface of a specimen to project a pattern onto the surface of the specimen. The pattern is associated with the pattern plate. Additionally, the method includes detecting the illumination flux reflected from the surface of the specimen with a detector, processing information associated with the detected illumination flux, and generating a first image based on at least information associated with the detected illumination flux. The first image includes a first image part for the pattern and a second image part for the specimen. Moreover, the method includes adjusting the lens to a state in order to achieve a first predetermined quality for the first image part, and moving the specimen to a first position.
摘要翻译：一种用于检查半导体晶片的方法和系统。该方法包括将图案板和透镜的照射通量提供到样品的表面以将图案投影到样品的表面上。图案与图案板相关联。此外，该方法包括利用检测器检测从样本表面反射的照射通量，处理与检测到的照射通量相关联的信息，以及至少基于与检测到的照射通量相关联的信息产生第一图像。第一图像包括用于图案的第一图像部分和用于样本的第二图像部分。此外，该方法包括将透镜调整到状态以便实现第一图像部分的第一预定质量，并将样本移动到第一位置。

2. 发明授权

US07767982B2 Optical auto focusing system and method for electron beam inspection tool 有权
标题翻译：光电自动对焦系统及电子束检测工具
公开(公告)号：US07767982B2
公开(公告)日：2010-08-03
申请号：US11759138
申请日：2007-06-06
申请人： Yi Xiang Wang , Van-Duc Nguyen , Jian Zhang
发明人： Yi Xiang Wang , Van-Duc Nguyen , Jian Zhang
IPC分类号： H01J49/00 , B01D59/44
CPC分类号： G03B13/36 , G02B7/32 , G06T7/001 , G06T2207/30148 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2482 , H01J2237/2817
摘要： A method and system for inspecting a semiconductor wafer. The method includes providing an illumination flux through a pattern plate and a lens to a surface of a specimen to project a pattern onto the surface of the specimen. The pattern is associated with the pattern plate. Additionally, the method includes detecting the illumination flux reflected from the surface of the specimen with a detector, processing information associated with the detected illumination flux, and generating a first image based on at least information associated with the detected illumination flux. The first image includes a first image part for the pattern and a second image part for the specimen. Moreover, the method includes adjusting the lens to a state in order to achieve a first predetermined quality for the first image part, and moving the specimen to a first position.
摘要翻译：一种用于检查半导体晶片的方法和系统。该方法包括将图案板和透镜的照射通量提供到样品的表面以将图案投影到样品的表面上。图案与图案板相关联。此外，该方法包括利用检测器检测从样本表面反射的照射通量，处理与检测到的照射通量相关联的信息，以及至少基于与检测到的照射通量相关联的信息产生第一图像。第一图像包括用于图案的第一图像部分和用于样本的第二图像部分。此外，该方法包括将透镜调整到状态以便实现第一图像部分的第一预定质量，并将样本移动到第一位置。

3. 发明授权

US08791414B2 Dynamic focus adjustment with optical height detection apparatus in electron beam system 有权
标题翻译：电子束系统中光学高度检测装置的动态聚焦调整
公开(公告)号：US08791414B2
公开(公告)日：2014-07-29
申请号：US12764902
申请日：2010-04-21
申请人： Joe Wang , Van-Duc Nguyen , Yi-Xiang Wang , Jack Jau , Zhongwei Chen
发明人： Joe Wang , Van-Duc Nguyen , Yi-Xiang Wang , Jack Jau , Zhongwei Chen
IPC分类号： G01N23/00
CPC分类号： G01B11/22 , G01N23/04 , G01N23/20058 , G01N2223/32 , G01N2223/3301 , G01N2223/3302 , G01N2223/646 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2482 , H01J2237/2487
摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.
摘要翻译：本发明一般涉及图像系统的动态聚焦调整。本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法应用于样品表面。仅作为示例，本发明已经应用于扫描电子检查系统。但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。

4. 发明申请

US20050201611A1 Non-contact measurement method and apparatus 失效
标题翻译：非接触测量方法和装置
公开(公告)号：US20050201611A1
公开(公告)日：2005-09-15
申请号：US10797329
申请日：2004-03-09
申请人： Thomas Watkins Lloyd , Joseph Benjamin Ross , Glen William Brooksby , Van-Duc Nguyen , John Lewis Schneiter , Steven Jeffrey Gordon , Faycal Benayad-Cherif , Victor Nzomigni , Donald Hamilton
发明人： Thomas Watkins Lloyd , Joseph Benjamin Ross , Glen William Brooksby , Van-Duc Nguyen , John Lewis Schneiter , Steven Jeffrey Gordon , Faycal Benayad-Cherif , Victor Nzomigni , Donald Hamilton
IPC分类号： G01B11/00 , F01D5/14 , F01D21/00 , G01B11/24 , G01B11/25 , G06T1/00 , G06T5/00 , G06K9/00
CPC分类号： F01D5/141 , F01D21/003 , G01B11/2522 , Y02T50/673
摘要： A non-contact imaging apparatus for examining an object having complex surfaces or shape deformations. The imaging apparatus includes at least one imaging device for obtaining a scanned image of the exterior surfaces of the object being examined. A predetermined reference image) of an ideal model for the object is stored in a memory. An image register is coupled to the imaging device and to the memory containing the reference image of the ideal model for the object. A transformation estimator compares the scanned image to the reference image and provides a transform which maps the scanned image to the reference image and provides a set of registered object data points. One or more filter modules process the registered object data points with a priori information to reduce noise and to further enhance the accuracy and precision of the registration. A gauge estimator is coupled to the filter module. The gauge estimator utilizes the processed and registered object data to determine deformation parameters of the object, which are then displayed to an operator as gauging information.
摘要翻译：一种用于检查具有复杂表面或形状变形的物体的非接触式成像装置。成像装置包括至少一个成像装置，用于获得被检查物体的外表面的扫描图像。用于对象的理想模型的预定参考图像被存储在存储器中。图像寄存器耦合到成像装置和包含用于对象的理想模型的参考图像的存储器。变换估计器将扫描图像与参考图像进行比较，并提供将扫描图像映射到参考图像并提供一组注册对象数据点的变换。一个或多个过滤器模块利用先验信息处理注册对象数据点以减少噪声并进一步提高注册的准确性和精度。量规估计器耦合到滤波器模块。量规估计器利用经处理和注册的对象数据来确定对象的变形参数，然后将其显示给操作者作为测量信息。

5. 发明授权

US06411915B1 Method and apparatus for calibrating a non-contact range sensor 失效
标题翻译：用于校准非接触式范围传感器的方法和装置
公开(公告)号：US06411915B1
公开(公告)日：2002-06-25
申请号：US09360032
申请日：1999-07-23
申请人： Van-Duc Nguyen , Victor Nzomigni , Charles Vernon Stewart , Kishore Bubna , Lila Abdessemed , Nathalie Claire Poirier
发明人： Van-Duc Nguyen , Victor Nzomigni , Charles Vernon Stewart , Kishore Bubna , Lila Abdessemed , Nathalie Claire Poirier
IPC分类号： G06F1900
CPC分类号： F01D21/003 , G06T7/35 , G06T7/80
摘要： A method for calibrating a non-contact range sensor comprises the steps of employing the range sensor to obtain a range image of an object to be inspected. The range image is registered with a reference image of the object thereby providing registered data. The reference image may be derived through computer assisted drawing (CAD) data. Normal deviations between the registered data and the reference image are computed. Noise is filtered from the normal deviations. A plurality of bias vectors and a covariance matrix are estimated based on the normal deviations, stored in memory as a lookup table comprising geometric correction factors for the sensor. Images of the object subsequently obtained by the sensor are compensated in accordance with the lookup table.
摘要翻译：用于校准非接触式距离传感器的方法包括以下步骤：采用距离传感器来获得被检查物体的范围图像。范围图像与对象的参考图像一起登记，从而提供注册数据。参考图像可以通过计算机辅助绘图（CAD）数据导出。计算注册数据和参考图像之间的正常偏差。噪声从正常偏差过滤。基于存储在存储器中的正常偏差来估计多个偏置向量和协方差矩阵，作为包括用于传感器的几何校正因子的查找表。随后由传感器获得的物体的图像根据查找表进行补偿。

6. 发明授权

US06748112B1 Method and apparatus for finding shape deformations in objects having smooth surfaces 有权
标题翻译：用于在具有光滑表面的物体中发现形状变形的方法和装置
公开(公告)号：US06748112B1
公开(公告)日：2004-06-08
申请号：US09353986
申请日：1999-07-15
申请人： Van-Duc Nguyen , Roderic Greene Collins , Victor Nzomigni , Donald Wagner Hamilton, Jr. , Charles Vernon Stewart , Joseph Legrand Mundy
发明人： Van-Duc Nguyen , Roderic Greene Collins , Victor Nzomigni , Donald Wagner Hamilton, Jr. , Charles Vernon Stewart , Joseph Legrand Mundy
IPC分类号： G06K900
CPC分类号： G06K9/6857 , F01D21/003 , G06T3/0043 , G06T7/30 , G06T7/80
摘要： The present invention is directed to an imaging apparatus for examining an object having smooth surfaces to determine shape deformations in the surface of object. The imaging apparatus includes an imaging device for obtaining a scanned image of the object to be examined. A reference image of the object is stored in a memory. An image register is coupled to the imaging device and to the memory containing the reference image of the object. The image register stores patch information corresponding to both the reference image and the scanned image. A transformation estimator is coupled to the image register, and provides a transform for registering the scanned image to the reference image. A deformation estimator is coupled to the transformation estimator and to the image register. The deformation estimator is configured to utilize the transform and the patch information to determine shape deformations of the object.
摘要翻译：本发明涉及一种用于检查具有平滑表面的物体以确定物体表面中的形状变形的成像装置。成像装置包括用于获得待检查对象的扫描图像的成像装置。对象的参考图像存储在存储器中。图像寄存器耦合到成像设备和耦合到包含对象的参考图像的存储器。图像寄存器存储与参考图像和扫描图像对应的补丁信息。变换估计器耦合到图像寄存器，并提供用于将扫描图像注册到参考图像的变换。变形估计器耦合到变换估计器和图像寄存器。变形估计器被配置为利用变换和补丁信息来确定对象的形状变形。

7. 发明授权

US07327857B2 Non-contact measurement method and apparatus 失效
标题翻译：非接触测量方法和装置
公开(公告)号：US07327857B2
公开(公告)日：2008-02-05
申请号：US10797329
申请日：2004-03-09
申请人： Thomas Watkins Lloyd, Jr. , Joseph Benjamin Ross , Glen William Brooksby , Van-Duc Nguyen , John Lewis Schneiter , Steven Jeffrey Gordon , Faycal Benayad-Cherif , Victor Nzomigni , Donald Hamilton
发明人： Thomas Watkins Lloyd, Jr. , Joseph Benjamin Ross , Glen William Brooksby , Van-Duc Nguyen , John Lewis Schneiter , Steven Jeffrey Gordon , Faycal Benayad-Cherif , Victor Nzomigni , Donald Hamilton
IPC分类号： G06K9/00
CPC分类号： F01D5/141 , F01D21/003 , G01B11/2522 , Y02T50/673
摘要： A non-contact imaging apparatus for examining an object having complex surfaces or shape deformations. The imaging apparatus includes at least one imaging device for obtaining a scanned image of the exterior surfaces of the object being examined. A predetermined reference image) of an ideal model for the object is stored in a memory. An image register is coupled to the imaging device and to the memory containing the reference image of the ideal model for the object. A transformation estimator compares the scanned image to the reference image and provides a transform which maps the scanned image to the reference image and provides a set of registered object data points. One or more filter modules process the registered object data points with a priori information to reduce noise and to further enhance the accuracy and precision of the registration. A gauge estimator is coupled to the filter module. The gauge estimator utilizes the processed and registered object data to determine deformation parameters of the object, which are then displayed to an operator as gauging information.
摘要翻译：一种用于检查具有复杂表面或形状变形的物体的非接触式成像装置。成像装置包括至少一个成像装置，用于获得被检查物体的外表面的扫描图像。用于对象的理想模型的预定参考图像被存储在存储器中。图像寄存器耦合到成像装置和包含用于对象的理想模型的参考图像的存储器。变换估计器将扫描图像与参考图像进行比较，并提供将扫描图像映射到参考图像并提供一组注册对象数据点的变换。一个或多个过滤器模块利用先验信息处理注册对象数据点以减少噪声并进一步提高注册的准确性和精度。量规估计器耦合到滤波器模块。量规估计器利用经处理和注册的对象数据来确定对象的变形参数，然后将其显示给操作者作为测量信息。

8. 发明授权

US4888711A Image interpretation method and apparatus using faces for constraint satisfaction 失效
标题翻译：使用面部约束满足的图像解释方法和装置
公开(公告)号：US4888711A
公开(公告)日：1989-12-19
申请号：US121301
申请日：1987-11-16
申请人： Van-Duc Nguyen
发明人： Van-Duc Nguyen
IPC分类号： G06K9/68 , G06T17/10
CPC分类号： G06K9/469 , G06T17/10
摘要： A method, for practice on a computer, for interpreting two-dimensional images of three-dimensional scenes is disclosed. Descriptive labels are assigned to the vertex, edge and face elements of the image. A process of constraint satisfaction and propagation is carried out between image elements that are linked together with the effect of pruning away locally inconsistent labels at each element. The remaining labels assigned to the image elements are both locally and globally consistent.
摘要翻译：公开了一种用于在计算机上练习用于解释三维场景的二维图像的方法。描述性标签被分配给图像的顶点，边和面元素。在链接在一起的图像元素之间进行约束满足和传播的过程，并且在每个元素处删除局部不一致的标签的效果。分配给图像元素的剩余标签在本地和全局一致。

9. 发明授权

US06690841B2 Method and apparatus for image registration 有权
标题翻译：图像配准方法和装置
公开(公告)号：US06690841B2
公开(公告)日：2004-02-10
申请号：US10085159
申请日：2002-02-27
申请人： Van-Duc Nguyen , Victor Nzomigni , Charles Vernon Stewart
发明人： Van-Duc Nguyen , Victor Nzomigni , Charles Vernon Stewart
IPC分类号： G06K932
CPC分类号： G06T3/0043 , G01N21/9515 , G01N2021/8887 , G06K9/00201 , G06K9/6203 , Y10S345/953
摘要： A machine vision system includes an apparatus for registering an input image of an object, such as an aircraft engine blade, to a reference image comprising ideal specifications for the object in order to detect flaws in the object. The system includes one or more imaging devices for obtaining the input image representing the object. The system further includes a processor for registering the input image to the reference image. The processor includes a patch determining device for identifying low curvature portions of the reference image off-line. A transformation estimator matches the low curvature portions of the reference image to corresponding low curvature portions of the object, and provides a transformation matrix which maps points on the reference image 11 to corresponding points on the input image for precise and fast registration.
摘要翻译：机器视觉系统包括用于将诸如飞机发动机叶片的物体的输入图像登记到包括对象的理想规格的参考图像以检测物体中的缺陷的装置。该系统包括用于获得表示对象的输入图像的一个或多个成像装置。该系统还包括用于将输入图像登记到参考图像的处理器。处理器包括用于从离线识别参考图像的低曲率部分的补片确定装置。变换估计器将参考图像的低曲率部分与对象的相应低曲率部分相匹配，并且提供将参考图像11上的点与输入图像上的对应点进行映射以进行精确和快速配准的变换矩阵。

10. 发明授权

US06504957B2 Method and apparatus for image registration 有权
公开(公告)号：US06504957B2
公开(公告)日：2003-01-07
申请号：US10085158
申请日：2002-02-27
申请人： Van-Duc Nguyen , Victor Nzomigni , Charles Vernon Stewart
发明人： Van-Duc Nguyen , Victor Nzomigni , Charles Vernon Stewart
IPC分类号： G06K962
CPC分类号： G06T3/0043 , G01N21/9515 , G01N2021/8887 , G06K9/00201 , G06K9/6203 , Y10S345/953
摘要： A machine vision system includes an apparatus for registering an input image of an object, such as an aircraft engine blade, to a reference image comprising ideal specifications for the object in order to detect flaws in the object. The system includes one or more imaging devices for obtaining the input image representing the object. The system further includes a processor for registering the input image to the reference image. The processor includes a patch determining device for identifying low curvature portions of the reference image off-line. A transformation estimator matches the low curvature portions of the reference image to corresponding low curvature portions of the object, and provides a transformation matrix which maps points on the reference image 11 to corresponding points on the input image for precise and fast registration.

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