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    • 1. 发明授权
    • Fluorescent X-ray analysis apparatus
    • 荧光X射线分析仪
    • US06885726B2
    • 2005-04-26
    • US10419964
    • 2003-04-22
    • Yasushi UeharaTeruo Shibano
    • Yasushi UeharaTeruo Shibano
    • G01N23/223G21K1/06
    • G01N23/223G01N2223/076G21K1/06
    • A fluorescent X-ray analysis apparatus includes: an X-ray generation source for radiating a beam of primary X-rays; spectroscopic elements circularly arranged so that their inner surfaces describe a circle centered on an optical axis of the beam of primary X-rays for monochromatizing the beam of primary X-rays and condensing the beam on a surface of an irradiation object; a spectroscopic element position adjuster for adjusting the positions of the spectroscopic elements; secondary X-rays detector for detecting secondary X-rays radiated from the surface of the irradiation object irradiated with the monochromatized beam of primary X-rays; a secondary X-ray detector position adjuster adjusting the position of the secondary X-ray detector; an irradiation object surface position detector detecting the position of the surface of the irradiation object; and a controller adjusting the positions of the spectroscopic elements through the spectroscopic element position adjuster to condense the monochromatized beam of primary X-rays on the surface of the irradiation object, on the basis of the position of the surface of the irradiation object detected by the irradiation object surface position detector.
    • 荧光X射线分析装置包括:用于照射初级X射线束的X射线产生源; 分光元件循环布置,使得它们的内表面描述以主X射线束的光轴为中心的圆,用于单色初级X射线束并将束聚焦在照射物体的表面上; 分光元件位置调节器,用于调节光谱元件的位置; 二次X射线检测器,用于检测从被照射的原始X射线的单色光束照射的照射物体的表面辐射的次级X射线; 辅助X射线检测器位置调节器,调节次X射线检测器的位置; 照射物体表面位置检测器,检测被照射物体的表面的位置; 以及控制器,其通过分光元件位置调整器调整分光元件的位置,以基于被照射物体的表面检测的照射物体的表面的位置,将照射物体的表面上的一次X射线的单色化光束聚集 照射物体表面位置检测器。