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1. 发明申请

US20050254700A1 Apparatus and method for detecting hole area 审中-公开
标题翻译：孔面积检测装置及方法
公开(公告)号：US20050254700A1
公开(公告)日：2005-11-17
申请号：US11102770
申请日：2005-04-11
申请人： Yasushi Nagata , Hiroshi Sano , Atsushi Imamura , Eiji Nishihara
发明人： Yasushi Nagata , Hiroshi Sano , Atsushi Imamura , Eiji Nishihara
IPC分类号： G01B11/00 , G01N21/956 , G06K9/00 , G06T1/00 , G06T7/00
CPC分类号： G06T7/0004 , G06T2207/30141
摘要： A board (9) is placed on a stage part (20) so that the back surface of the board is opposed to the stage part (20). The stage part cuts off light entering a hole penetrating the board (9) from a side of its back surface which is a reverse surface with respect to its pattern formed surface and has a reflection property which is different from that of the pattern formed surface with respect to an illumination light, and the illumination light is emitted from a light source part (31) onto the pattern formed surface (9a). An image pickup part (33) receives light from the pattern formed surface to acquire an inspection image, and a hole-area specifying part implemented by a computer (4) specifies a hole area in the inspection image, which corresponds to a hole of the board (9), by using only the inspection image as image information, in accordance with criteria of pixel values affected by a reflection state of the illumination light entering a hole penetrating the board (9) and being reflected on the stage part (20). Thus, it is possible to detect an area of a hole on the board (9) by using only the inspection image acquired with a reflected light of the illumination light from the light source part (31).
摘要翻译：板（9）放置在平台部分（20）上，使得板的后表面与平台部分（20）相对。舞台部分从其背面的相对于其图案形成表面的反面的一侧切断穿入基板（9）的孔，并具有与图案形成面不同的反射特性，相对于照明光，照明光从光源部（31）发射到图案形成面（9a）上。图像拾取部分（33）从图案形成表面接收光以获取检查图像，并且由计算机（4）实现的孔区域指定部分指定检查图像中的与孔的区域相对应的孔面积（9）中，仅通过仅使用检查图像作为图像信息，根据影响入射穿过基板（9）的孔的照明光的反射状态并被反射在台面部（20）上的像素值的标准，。因此，可以通过仅使用由来自光源部分（31）的照明光的反射光获取的检查图像来检测板（9）上的孔的区域。

2. 发明申请

US20050254699A1 Apparatus and method for detecting defect and apparatus and method for extracting wire area 审中-公开
标题翻译：缺陷检测装置及方法，提取线材面积的方法
公开(公告)号：US20050254699A1
公开(公告)日：2005-11-17
申请号：US11079659
申请日：2005-03-15
申请人： Hiroshi Sano , Eiji Nishihara , Yasushi Nagata , Atsushi Imamura
发明人： Hiroshi Sano , Eiji Nishihara , Yasushi Nagata , Atsushi Imamura
IPC分类号： G01B11/24 , G01N21/88 , G01N21/956 , G06K9/00 , G06T1/00 , G06T5/00 , G06T7/00 , H05K3/00
CPC分类号： G06T7/001 , G06T2207/30141
摘要： In a reference binary image representing a pattern including wires formed on a substrate, an erosion is performed on a specific area having the same pixel value as a pixel value corresponding to a wire area to acquire an eroded image and a dilation is performed on the specific area which remains in the eroded image to almost the same degree as the erosion to acquire an eroded and dilated image. Subsequently, a differential image between the eroded and dilated image and the reference binary image is generated as a wire image representing a wire area. It is thereby possible to easily extract a wire area which is a fine pattern area. By setting respective different defect detection sensitivities for the wire area and the other area on the basis of the wire image and detecting a defect in an inspection image in accordance with the defect detection sensitivities, it is possible to appropriately detect a defect in a pattern on a substrate.
摘要翻译：在表示包括形成在基板上的线的图案的参考二进制图像中，对具有与对应于导线区域的像素值相同的像素值的特定区域进行侵蚀以获取侵蚀的图像，并且对特定的保留在侵蚀图像中的区域几乎与侵蚀相同程度以获得侵蚀和扩张的图像。随后，产生侵蚀和扩张的图像与参考二进制图像之间的差分图像作为表示导线区域的有线图像。从而可以容易地提取作为精细图案区域的导线区域。通过基于有线图像对线区域和其他区域设定不同的缺陷检测灵敏度，根据缺陷检测灵敏度检测检查图像中的缺陷，可以适当地检测图案上的缺陷底物。

3. 发明申请

US20050259874A1 Apparatus, method, and program for assisting in selection of pattern element for pattern matching 有权
标题翻译：用于协助选择用于图案匹配的图案元素的装置，方法和程序
公开(公告)号：US20050259874A1
公开(公告)日：2005-11-24
申请号：US11098388
申请日：2005-04-05
申请人： Hiroshi Sano , Yumi Hayakawa , Atsushi Imamura , Eiji Nishihara
发明人： Hiroshi Sano , Yumi Hayakawa , Atsushi Imamura , Eiji Nishihara
IPC分类号： G01N21/956 , G01B11/03 , G06K9/00 , G06K9/03 , G06K9/68 , G06T1/00 , G06T7/00 , G06T11/80
CPC分类号： G06T7/001 , G06K9/033 , G06T2207/30141
摘要： A pattern-element extractor (51), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display (45). An input part (46) accepts an operator's selection of one out of the plurality of pattern elements as a reference pattern element, and a distinguishability checker (52) checks whether the selected pattern element is distinguishable from the other pattern elements and usable as the reference pattern element for pattern matching. A result of the check is notified to the operator, and an appropriate one out of the pattern elements in the reference image can be selected as the reference pattern element, by referring to the result of the check made by the distinguishability checker (52). Thus, misrecognition of the reference pattern element used for detecting a position of a target image relative to the reference image in pattern matching is prevented.
摘要翻译：由计算机实现的功能之一的图形元素提取器（51）从参考图像中提取多个图案元素，参考图像的区域显示在显示器（45）上。输入部分（46）接受操作员对多个图案元素中的一个的选择作为参考图案元素，并且可区分性检查器（52）检查所选择的图案元素是否与其他图案元素区分开并可用作参考图案元素用于模式匹配。检查结果被通知给操作者，并且可以通过参考可区分性检查器（52）进行的检查的结果，将参考图像中的图案元素中的适当的一个选择为参考图案元素。因此，防止在模式匹配中用于检测目标图像相对于参考图像的位置的参考图案元素的误识别。

4. 发明授权

US07480407B2 Surface region identification by image area segmentation 有权
标题翻译：通过图像区域分割的表面区域识别
公开(公告)号：US07480407B2
公开(公告)日：2009-01-20
申请号：US11152506
申请日：2005-06-15
申请人： Atsushi Imamura , Hiroshi Sano , Eiji Nishihara , Junichi Shiomi
发明人： Atsushi Imamura , Hiroshi Sano , Eiji Nishihara , Junichi Shiomi
IPC分类号： G06K9/34
CPC分类号： G06K9/2036 , G06T7/0006 , G06T7/90 , G06T2207/10152 , G06T2207/30141
摘要： The present invention provides a technique to identify layout of surface regions of an object by image area segmentation. A plurality of images is acquired by imaging an object under a plurality of mutually different illumination conditions. By performing area segmentation on this plurality of images, the layouts of the plurality of image areas which is different from the layout of the object surface regions is obtained. Then, the layout of the surface regions on the object is identified based on the layouts of the plurality of image areas.
摘要翻译：本发明提供一种通过图像区域分割来识别对象的表面区域的布局的技术。通过在多个相互不同的照明条件下成像物体来获取多个图像。通过对该多个图像执行区域分割，获得与对象表面区域的布局不同的多个图像区域的布局。然后，基于多个图像区域的布局来识别对象上的表面区域的布局。

5. 发明授权

US07463763B2 Apparatus, method, and program for assisting in selection of pattern element for pattern matching 有权
标题翻译：用于协助选择用于图案匹配的图案元素的装置，方法和程序
公开(公告)号：US07463763B2
公开(公告)日：2008-12-09
申请号：US11098388
申请日：2005-04-05
申请人： Hiroshi Sano , Yumi Hayakawa , Atsushi Imamura , Eiji Nishihara
发明人： Hiroshi Sano , Yumi Hayakawa , Atsushi Imamura , Eiji Nishihara
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06K9/033 , G06T2207/30141
摘要： A pattern-element extractor (51), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display (45). An input part (46) accepts an operator's selection of one out of the plurality of pattern elements as a reference pattern element, and a distinguishability checker (52) checks whether the selected pattern element is distinguishable from the other pattern elements and usable as the reference pattern element for pattern matching. A result of the check is notified to the operator, and an appropriate one out of the pattern elements in the reference image can be selected as the reference pattern element, by referring to the result of the check made by the distinguishability checker (52). Thus, misrecognition of the reference pattern element used for detecting a position of a target image relative to the reference image in pattern matching is prevented.
摘要翻译：由计算机实现的功能之一的图形元素提取器（51）从参考图像中提取多个图案元素，参考图像的区域显示在显示器（45）上。输入部分（46）接受操作员对多个图案元素中的一个的选择作为参考图案元素，并且可区分性检查器（52）检查所选择的图案元素是否与其他图案元素区分开并可用作参考图案元素用于模式匹配。检查结果被通知给操作者，并且可以通过参考可区分性检查器（52）进行的检查的结果，将参考图像中的图案元素中的适当的一个选择为参考图案元素。因此，防止在模式匹配中用于检测目标图像相对于参考图像的位置的参考图案元素的误识别。

6. 发明申请

US20060018540A1 Surface region identification by image area segmentation 有权
公开(公告)号：US20060018540A1
公开(公告)日：2006-01-26
申请号：US11152506
申请日：2005-06-15
申请人： Atsushi Imamura , Hiroshi Sano , Eiji Nishihara , Junichi Shiomi
发明人： Atsushi Imamura , Hiroshi Sano , Eiji Nishihara , Junichi Shiomi
IPC分类号： G06K9/34
CPC分类号： G06K9/2036 , G06T7/0006 , G06T7/90 , G06T2207/10152 , G06T2207/30141
摘要： The present invention provides a technique to identify layout of surface regions of an object by image area segmentation. A plurality of images is acquired by imaging an object under a plurality of mutually different illumination conditions. By performing area segmentation on this plurality of images, the layouts of the plurality of image areas which is different from the layout of the object surface regions is obtained. Then, the layout of the surface regions on the object is identified based on the layouts of the plurality of image areas.

7. 发明申请

US20060018534A1 Technique for detecting a defect of an object by area segmentation of a color image of the object 审中-公开
标题翻译：用于通过对象的彩色图像的区域分割来检测对象的缺陷的技术
公开(公告)号：US20060018534A1
公开(公告)日：2006-01-26
申请号：US11152115
申请日：2005-06-15
申请人： Yasushi Nagata , Atsushi Imamura , Hiroshi Sano
发明人： Yasushi Nagata , Atsushi Imamura , Hiroshi Sano
IPC分类号： G06K9/34
CPC分类号： G06T7/001
摘要： The present invention provides a technique to prevent increase in defect detection processing volume due to the shape of an object subject to the defect detection. An image of an object under inspection with a plurality of color regions is divided into areas by area segmentation according to colors. From the result of the segmentation, an inspection image representing a shape of a specific region among the plurality of color regions is obtained. The inspection image and a comparison image which is comparable at least in part with the inspection image are then compared to detect defects relating to the specific region.
摘要翻译：本发明提供一种防止由于缺陷检测对象的形状引起的缺陷检测处理量增加的技术。用多个颜色区域检查的物体的图像根据颜色被划分为区域分割。从分割结果可以得到表示多个颜色区域中特定区域的形状的检查图像。然后将检查图像和至少部分与检查图像相当的比较图像进行比较，以检测与特定区域相关的缺陷。

8. 发明授权

US07003148B2 Detection of an end point of polishing a substrate 失效
标题翻译：检测抛光衬底的终点
公开(公告)号：US07003148B2
公开(公告)日：2006-02-21
申请号：US10086877
申请日：2002-03-04
申请人： Junichi Shiomi , Hiroki Fujimoto , Eiji Nishihara , Atsushi Imamura
发明人： Junichi Shiomi , Hiroki Fujimoto , Eiji Nishihara , Atsushi Imamura
IPC分类号： G06K9/00
CPC分类号： G06T7/40 , G06T7/0002 , G06T7/0004 , G06T7/41 , G06T2207/30148 , Y10S438/959
摘要： A two-dimensional image of a substrate surface targeted for polishing is periodically picked up, and the image is analyzed to obtain an entropy H1, H2 of the two-dimensional image. An end point of polishing is then determined according to the entropy H1, H2. Alternatively, other image characteristic value such as a difference statistic of the image may be employed instead of the entropy H1, H2.
摘要翻译：周期性地拾取用于抛光的基板表面的二维图像，并分析图像以获得二维图像的熵H 1，H 2。然后根据熵H 1，H 2确定抛光的终点。或者，可以使用诸如图像的差异统计量的其他图像特征值来代替熵H 1，H 2。

9. 发明申请

US20060008140A1 Segmentation technique of a color image according to colors 审中-公开
标题翻译：根据颜色的彩色图像的分割技术
公开(公告)号：US20060008140A1
公开(公告)日：2006-01-12
申请号：US11124119
申请日：2005-05-09
申请人： Atsushi Imamura , Yasushi Nagata
发明人： Atsushi Imamura , Yasushi Nagata
IPC分类号： G06K9/00
CPC分类号： G06K9/4652 , G06K9/34 , G06T7/11 , G06T7/90 , G06T2207/30141
摘要： The present invention provides a technique to improve reliability of a segmentation result for a subject image, which is obtained a colored object with the possibility of change in color for each individual items. In a specified color space, existing color areas indicating ranges of colors containable in the subject image when the colored object has an allowable range of color, and non-existent color areas for outside the existing color areas are set. Then, subject image segmentation is performed by classifying colors of pixels of the subject image into the existing color areas and the non-existent color area.
摘要翻译：本发明提供了一种提高被摄体图像的分割结果的可靠性的技术，其获得了具有每个单独项目的颜色变化可能性的彩色对象。在指定的颜色空间中，设置当着色对象具有允许的颜色范围时指示被摄体图像中可容纳颜色的范围的现有颜色区域，以及现有颜色区域外的不存在的颜色区域。然后，通过将被摄体图像的像素的颜色分类为现有的颜色区域和不存在的颜色区域来执行被摄体图像分割。

10. 发明授权

US07031510B2 Region segmentation of color image 有权
公开(公告)号：US07031510B2
公开(公告)日：2006-04-18
申请号：US10077962
申请日：2002-02-20
申请人： Atsushi Imamura , Hiroshi Sano , Junichi Shiomi
发明人： Atsushi Imamura , Hiroshi Sano , Junichi Shiomi
IPC分类号： G06K9/00
CPC分类号： G06K9/4652 , G06T7/11 , G06T7/90 , G06T2207/30141
摘要： A color image of a circuit board is divided into respective color regions. Plural representative colors are set, and angle indices and distance indices are calculated for each pixel color in the color image in a predetermined color space. The angle indices for a particular pixel color represent angles between an individual color vector representing the particular pixel color and plural representative color vectors of the plural representative colors. The distance indices for a particular pixel color represent distances between the particular pixel color and the plural representative colors. Composite distance indices are then calculated for each pixel color in the color image, based on the distance indices and the angle indices. Each pixel in the color image is classified into plural representative color regions associated with the plural representative colors according to the composite distance indices, thereby dividing the image region of the color image into the plural representative color regions.

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