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    • 10. 发明授权
    • Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device
    • 金刚石电子发射阴极,电子发射源,电子显微镜和电子束曝光装置
    • US07863805B2
    • 2011-01-04
    • US11665472
    • 2006-06-19
    • Yoshiyuki YamamotoAkihiko UedaYoshiki NishibayashiTakahiro Imai
    • Yoshiyuki YamamotoAkihiko UedaYoshiki NishibayashiTakahiro Imai
    • H01J1/02H01J9/02H01J1/62H01J63/04
    • H01J1/15H01J1/14H01J37/06H01J2237/06308H01J2237/06316
    • It is possible to provide an electron emission cathode, an electron emission source having a high-luminance and narrow energy width by using diamond and an electronic device using them. The diamond electron discharge cathode has a monocrystal diamond at least at a part of it. The diamond electron emission cathode has a columnar shape including a sharpened section and a heating section. The sharpened section has an electron emission section. The electron emission section and the heating section are formed by diamond semiconductor, which is formed by a p-type semiconductor containing 2×1015 cm−3 of p-type impurities or above. The electron emission section has the semiconductor. A metal layer is formed on the surface of the electron emission cathode. The metal layer exists at least at a part of the heating section. The distance from the electron emission section to the position nearest to the end of the metal layer is 500 μm. A pair of current introduction terminals supplies current to the heating section to heat the heating section. A part of the introduced electrons is emitted from the electron emission section.
    • 可以通过使用金刚石和使用它们的电子装置来提供电子发射阴极,具有高亮度和窄能量宽度的电子发射源。 金刚石电子放电阴极至少在其一部分具有单晶金刚石。 金刚石电子发射阴极具有包括锐化部分和加热部分的柱状。 锐化部分具有电子发射部分。 电子发射部分和加热部分由金刚石半导体形成,其由含有2×10 15 cm -3的p型杂质或以上的p型半导体形成。 电子发射部分具有半导体。 在电子发射阴极的表面上形成金属层。 金属层至少存在于加热部的一部分。 从电子发射部到最接近金属层末端的位置的距离为500μm。 一对电流引入端子向加热部分供电以加热加热部分。 引入的电子的一部分从电子发射部分发射。