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1. 发明授权

US07494286B2 Laser module and method for manufacturing the same 失效
标题翻译：激光模块及其制造方法
公开(公告)号：US07494286B2
公开(公告)日：2009-02-24
申请号：US10534438
申请日：2003-11-12
申请人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
发明人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
IPC分类号： G02B6/36 , G02B6/12
CPC分类号： G02B6/42 , G02B6/4239 , G02F1/3775 , H01S5/0092 , H01S5/02208 , H01S5/02252
摘要： Efficient coupling structures are important for the realization of reliable and economical integrated optical circuit applications. This paper presents a new approach for the simulation of an anisotropic plasma etching process in silicon based on a string point model as well as the realization and the results of etching processes in silicon, silicon dioxide, silicon oxinitride and silicon nitride which are fundamental for the fabrication of coupling structures. The connections to active and passive components were fabricated using plasma etching and deposition processes which are compatible with C-MOS or BIC-MOS technology. The realized waveguide-detector structures with vertical and horizontal silicon PIN-diodes exhibit efficiencies close to 90% for wavelength below 1.1 micrometers. The diodes can detect signals of modulation frequencies of more than 400 MHz due to horizontal light injection and capacitances less than 1 pF. Fiber-detector coupling structures with U-grooves for the fiber alignment containing such detectors show similar results. The necessary accuracy of the etched depth of the U-grooves for fiber-detector coupling is +/−2 micrometers in contrast to a fiber-waveguide coupling which requires a reproducible accuracy of the process better than 0.5 micrometers. A reduction of coupling losses due to the necessary close tolerances is accomplished by waveguide tapers. The simulation, realization and results for such structures are presented in the paper. Also laser diode—fiber connections require extremely close tolerances. The design of a micro-optical bench realized by plasma etching and a selfaligning soldering process is presented, which allows such tolerances.
摘要翻译：高效的耦合结构对于实现可靠且经济的集成光电路应用很重要。本文提出了一种基于串点模型模拟硅中各向异性等离子体蚀刻工艺的新方法，以及硅，二氧化硅，氮氧化硅和氮化硅中蚀刻过程的实现和结果，这些都是基于耦合结构的制造。使用与C-MOS或BIC-MOS技术兼容的等离子体蚀刻和沉积工艺制造与主动和无源部件的连接。实现的具有垂直和水平硅PIN二极管的波导检测器结构对于低于1.1微米的波长表现出接近90％的效率。由于水平光注入和小于1 pF的电容，二极管可以检测超过400 MHz的调制频率信号。具有用于包含这种检测器的光纤对准的U形槽的光纤检测器耦合结构显示相似的结果。与光纤 - 波导耦合相比，用于光纤 - 检测器耦合的U形槽的蚀刻深度所需的精度为+/- 2微米，这需要该工艺的可重复精度优于0.5微米。由于必要的紧公差导致的耦合损耗的减小是通过波导锥度实现的。本文提出了这种结构的仿真，实现和结果。激光二极管 - 光纤连接也需要极其公差。提出了通过等离子体蚀刻和自对准焊接工艺实现的微光学台架的设计，其允许这种公差。

2. 发明申请

US20060034570A1 Laser module and its fabrication method 失效
标题翻译：激光模组及其制作方法
公开(公告)号：US20060034570A1
公开(公告)日：2006-02-16
申请号：US10534438
申请日：2003-11-12
申请人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
发明人： Akihiro Morikawa , Toshifumi Yokoyama , Yasuo Kitaoka , Kazuhisa Yamamoto
IPC分类号： G02B6/36
CPC分类号： G02B6/42 , G02B6/4239 , G02F1/3775 , H01S5/0092 , H01S5/02208 , H01S5/02252
摘要： A laser module includes: a sub-mount; a semiconductor laser secured to a surface of the sub-mount; and an optical waveguide device joined to the surface of the sub-mount by an adhesive layer so that the optical waveguide device is coupled optically with the semiconductor laser. A first groove is formed at the surface of the sub-mount at a region corresponding to an incident end side of the optical waveguide device, the first groove being formed parallel to an outgoing end face of the semiconductor laser with a predetermined space therefrom. The adhesive layer is formed so that an end of the adhesive layer on the incident end side of the optical waveguide device is positioned within a range from a position abutting with a distal edge of the first groove distant from the semiconductor laser to an inside of the first groove and does not contact with the outgoing end face of the semiconductor laser. Since the adhesive layer can be positioned within a preferable range, coupling misalignment resulting from distortion due to a temperature change can be suppressed.
摘要翻译：激光模块包括：子安装座; 半导体激光器，其固定到所述副安装座的表面; 以及通过粘合层与子座的表面接合的光波导器件，使得光波导器件与半导体激光器光耦合。在与所述光波导装置的入射端侧对应的区域的所述副安装座的表面形成有第一槽，所述第一槽与所述半导体激光器的出射端面平行地形成有预定的间隔。粘合剂层形成为使得光波导装置的入射端侧的粘合剂层的端部位于与远离半导体激光器的第一凹槽的远端边缘邻接的位置的范围内并且不与半导体激光器的出射端面接触。由于粘合剂层可以位于优选范围内，所以可以抑制由于温度变化引起的变形引起的耦合失准。

3. 发明授权

US06614966B2 Optical waveguide device integrated module and method of manufacturing the same 有权
公开(公告)号：US06614966B2
公开(公告)日：2003-09-02
申请号：US09801223
申请日：2001-03-07
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： G02B626
CPC分类号： G02B6/42 , G02B6/4219 , G02B6/4231 , G02F1/37 , H01L24/29 , H01L24/32 , H01L2224/83192 , H01S5/0092 , H01S5/02252 , H01S5/02272 , H01S5/0612 , H01S5/125
摘要： A semiconductor laser and an optical waveguide device with an optical waveguide formed at a surface of its substrate are provided on a submount. The semiconductor laser and the optical waveguide device are mounted with an active layer and a surface at which the optical waveguide is formed facing the submount, respectively. The submount is combined with the semiconductor laser or the optical waveguide device to form one body using an adhesive with a spacer, which maintains a substantially uniform distance therebetween, being interposed therebetween, so that position adjustment in the height direction can be made automatically and mounting can be carried out with high-precision optical coupling. Thus, an optical waveguide device integrated module and a method of manufacturing the same are provided, in which a semiconductor laser and a planar optical waveguide device are mounted with their positions in the height direction controlled with high precision.

4. 发明授权

US06519077B1 OPTICAL WAVEGUIDE, OPTICAL WAVELENGTH CONVERSION DEVICE, METHOD FOR PRODUCING THE SAME, SHORT WAVELENGTH LIGHT GENERATION APPARATUS USING THE SAME, OPTICAL INFORMATION PROCESSING APPARATUS USING THE SAME, COHERENT LIGHT GENERATION APPARATUS USING THE SAME, AND OPTICAL SYSTEM USING THE SAME 有权
标题翻译：光波导，光波长转换装置，其生产方法，使用该光学波长的光生成装置，使用该光学信息处理装置的光信号处理装置，使用该光学信号处理装置的相干光生成装置和使用该光学系统的光学系统
公开(公告)号：US06519077B1
公开(公告)日：2003-02-11
申请号：US09534134
申请日：2000-03-23
申请人： Kiminori Mizuuchi , Kazuhisa Yamamoto , Yasuo Kitaoka , Toshifumi Yokoyama
发明人： Kiminori Mizuuchi , Kazuhisa Yamamoto , Yasuo Kitaoka , Toshifumi Yokoyama
IPC分类号： G02F1365
CPC分类号： G02F1/365 , G02B6/1345 , G02B6/14 , G02B6/32 , G02B6/4204 , G02B6/4246 , G02B2006/121 , G02B2006/12169 , G02F1/3775 , G02F2001/3548
摘要： An optical waveguide of the present invention includes: a nonlinear optical crystal; a first ion exchange region provided in the vicinity of a portion of a surface of the nonlinear optical crystal; and a second ion exchange region provided in the surface of the nonlinear optical crystal. The second ion exchange region covers a greater area of the surface than an area covered by the first ion exchange region. The second ion exchange region includes a region having an extent of 0.02 &mgr;m to 0.2 &mgr;m along a depth direction in which an ion exchange ratio varies along the depth direction.
摘要翻译：本发明的光波导包括：非线性光学晶体; 设置在所述非线性光学晶体的表面的一部分附近的第一离子交换区域; 以及设置在所述非线性光学晶体的表面中的第二离子交换区域。第二离子交换区域覆盖比由第一离子交换区域覆盖的区域更大的表面积。第二离子交换区域沿离子交换比沿深度方向变化的深度方向具有0.02μm〜0.2μm的范围的区域。

5. 发明授权

US07082146B2 Device and method for inspecting wavelength-variable semiconductor laser, and method for inspecting coherent source 失效
标题翻译：用于检测波长可变半导体激光器的装置和方法以及检查相干光源的方法
公开(公告)号：US07082146B2
公开(公告)日：2006-07-25
申请号：US11197624
申请日：2005-08-04
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： H01S3/10
CPC分类号： G01J1/4257 , H01S5/0014 , H01S5/005 , H01S5/0092 , H01S5/06256
摘要： A method for easily and quickly evaluating the wavelength variability properties of a wavelength-variable semiconductor laser is provided. An inspection device includes a power source for supplying current to a wavelength-variable DBR semiconductor laser having an active region, a phase control region, and a DBR region, a photo-detector for detecting an output intensity of laser beam emitted from the wavelength-variable DBR semiconductor laser, and a transmission type wavelength-selection element that can be inserted into a light path from the wavelength-variable DBR semiconductor laser to the photo-detector. In a state where the transmission type wavelength-selection element is inserted into the light path from the wavelength-variable DBR semiconductor laser to the photo-detector, at least one of a phase current that is supplied to the phase control region and a DBR current that is supplied to the DBR region is changed with respect to a predetermined active current that is supplied to the active region, and the output intensity of the laser beam after the laser beam has passed through the transmission type wavelength-selection element is detected by the photo-detector.
摘要翻译：提供了一种容易且快速地评估波长可变半导体激光器的波长变异性的方法。检查装置包括用于向具有有源区域的波长可变DBR半导体激光器提供电流的电源，相位控制区域和DBR区域，用于检测从波长范围发射的激光束的输出强度的光电检测器，可变DBR半导体激光器和可以插入到从波长可变DBR半导体激光器到光检测器的光路中的透射型波长选择元件。在将透射型波长选择元件从波长可变DBR半导体激光器插入到光检测器的光路中的状态下，提供给相位控制区域的相电流和DBR电流中的至少一个提供给DBR区域的电压相对于提供给有源区域的预定有功电流而改变，并且激光束已经通过透射型波长选择元件之后的激光束的输出强度由光电探测器。

6. 发明申请

US20050276288A1 Device and method for inspecting wavelength-variable semiconductor laser, and method for inspecting coherent source 失效
标题翻译：用于检测波长可变半导体激光器的装置和方法以及检查相干光源的方法
公开(公告)号：US20050276288A1
公开(公告)日：2005-12-15
申请号：US11197624
申请日：2005-08-04
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： G01J1/42 , H01S3/10 , H01S5/00 , H01S5/06 , H01S5/0625
CPC分类号： G01J1/4257 , H01S5/0014 , H01S5/005 , H01S5/0092 , H01S5/06256
摘要： A method for easily and quickly evaluating the wavelength variability properties of a wavelength-variable semiconductor laser is provided. An inspection device includes a power source for supplying current to a wavelength-variable DBR semiconductor laser having an active region, a phase control region, and a DBR region, a photo-detector for detecting an output intensity of laser beam emitted from the wavelength-variable DBR semiconductor laser, and a transmission type wavelength-selection element that can be inserted into a light path from the wavelength-variable DBR semiconductor laser to the photo-detector. In a state where the transmission type wavelength-selection element is inserted into the light path from the wavelength-variable DBR semiconductor laser to the photo-detector, at least one of a phase current that is supplied to the phase control region and a DBR current that is supplied to the DBR region is changed with respect to a predetermined active current that is supplied to the active region, and the output intensity of the laser beam after the laser beam has passed through the transmission type wavelength-selection element is detected by the photo-detector.
摘要翻译：提供了一种容易且快速地评估波长可变半导体激光器的波长变异性的方法。检查装置包括用于向具有有源区域的波长可变DBR半导体激光器提供电流的电源，相位控制区域和DBR区域，用于检测从波长范围发射的激光束的输出强度的光电检测器，可变DBR半导体激光器和可以插入到从波长可变DBR半导体激光器到光检测器的光路中的透射型波长选择元件。在透射型波长选择元件从波长可变DBR半导体激光器插入到光检测器的光路中的状态下，提供给相位控制区域的相电流和DBR电流中的至少一个提供给DBR区域的电压相对于提供给有源区域的预定有功电流而改变，并且激光束已经通过透射型波长选择元件之后的激光束的输出强度由光电探测器。

7. 发明授权

US06621962B2 Optical waveguide device integrated module and method of manufacturing the same 有权
标题翻译：光波导器件集成模块及其制造方法
公开(公告)号：US06621962B2
公开(公告)日：2003-09-16
申请号：US10321050
申请日：2002-12-16
申请人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
发明人： Yasuo Kitaoka , Toshifumi Yokoyama , Kazuhisa Yamamoto
IPC分类号： G02B626
CPC分类号： G02B6/42 , G02B6/4219 , G02B6/4231 , G02F1/37 , H01L24/29 , H01L24/32 , H01L2224/83192 , H01S5/0092 , H01S5/02252 , H01S5/02272 , H01S5/0612 , H01S5/125
摘要： A semiconductor laser and an optical waveguide device with an optical waveguide formed at a surface of its substrate are provided on a submount. The semiconductor laser and the optical waveguide device are mounted with an active layer and a surface at which the optical waveguide is formed facing the submount, respectively. The submount is combined with the semiconductor laser or the optical waveguide device to form one body using an adhesive with a spacer, which maintains a substantially uniform distance therebetween, being interposed therebetween, so that position adjustment in the height direction can be made automatically and mounting can be carried out with high-precision optical coupling. Thus, an optical waveguide device integrated module and a method of manufacturing the same are provided, in which a semiconductor laser and a planar optical waveguide device are mounted with their positions in the height direction controlled with high precision.
摘要翻译：半导体激光器和其基板表面上形成有光波导的光波导器件设置在基座上。半导体激光器和光波导器件分别安装有有源层和形成面向子安装座的光波导的表面。底座与半导体激光器或光波导器件组合，以使用具有间隔件的粘合剂形成一体，其间保持基本上均匀的间隔，从而可以自动地进行位置调节和高度方向的安装可以用高精度光耦合进行。因此，提供了一种光波导器件集成模块及其制造方法，其中半导体激光器和平面光波导器件以其精度高度控制的位置安装。

8. 发明申请

US20110292350A1 2-DIMENSIONAL IMAGE DISPLAY DEVICE, ILLUMINATION LIGHT SOURCE AND EXPOSURE ILLUMINATION DEVICE 有权
标题翻译：二维图像显示装置，照明光源和曝光照明装置
公开(公告)号：US20110292350A1
公开(公告)日：2011-12-01
申请号：US13204925
申请日：2011-08-08
申请人： Kenichi KASAZUMI , Yasuo Kitaoka , Kiminori Mizuuchi , Kazuhisa Yamamoto
发明人： Kenichi KASAZUMI , Yasuo Kitaoka , Kiminori Mizuuchi , Kazuhisa Yamamoto
IPC分类号： G03B21/14 , G02B26/10
CPC分类号： G02B27/149 , G02B17/004 , G02B26/0808 , G02B27/0905 , G02B27/0933 , G02B27/0944 , G02B27/102 , G02B27/1046 , G02B27/1093 , G02B27/145 , G03B21/14 , G03B21/2033 , G03B21/208 , G03B33/12 , H04N9/3161
摘要： A 2-dimensional beam scan unit reflects emission beams from a red laser light source, a green laser light source and a blue laser light source and scans in a 2-dimensional direction. Diffusion plates diffuse the respective light beams scanned in the 2-dimensional direction to introduce them to corresponding spatial light modulation elements. The respective spatial light modulation elements modulate the respective lights in accordance with video signals of the respective colors. A dichroic prism multiplexes the lights of the three colors after the modulation and introduces the multiplexed lights to a projection lens so that a color image is displayed on a screen. Since the 2-dimensional light emitted from the beam scan unit is diffused to illuminate the spatial light modulation element, it is possible to change the optical axis of the beam emerging from the light diffusion member for irradiating the spatial light modulation element moment by moment, thereby effectively suppressing speckle noise.
摘要翻译：二维光束扫描单元反射来自红色激光光源，绿色激光光源和蓝色激光光源的发射光束，并在二维方向上进行扫描。扩散板将在二维方向上扫描的各个光束扩散，将它们引入相应的空间光调制元件。各个空间光调制元件根据各种颜色的视频信号调制各个光。二向色棱镜在调制之后复用三种颜色的光，并将多路复用的光引入投影透镜，使得彩色图像显示在屏幕上。由于从射束扫描单元发射的二维光被散射以照射空间光调制元件，所以可以改变从光漫射构件出射的用于照射空间光调制元件的光束的光轴，从而有效抑制斑点噪声。

9. 发明授权

US07830357B2 Image display device and image display system 有权
标题翻译：图像显示装置和图像显示系统
公开(公告)号：US07830357B2
公开(公告)日：2010-11-09
申请号：US11658318
申请日：2005-07-27
申请人： Yasuo Kitaoka , Kazuhisa Yamamoto , Hiromu Kitaura , Ken ichi Kasazumi
发明人： Yasuo Kitaoka , Kazuhisa Yamamoto , Hiromu Kitaura , Ken ichi Kasazumi
IPC分类号： G09G3/36
CPC分类号： H04B10/116 , G09G3/003 , G09G3/02 , G09G3/32 , G09G3/3406 , G09G2310/0237 , G09G2320/028 , G09G2320/0633 , G09G2320/0646 , G09G2354/00 , G09G2360/14 , H04B10/1141 , H04N13/305 , H04N13/376
摘要： An image display device and an image display system which can establish visible light communication without interfering with an image displayed at a predetermined frame rate are provided. A controller 12 controls a spatial light modulator in accordance with an image signal to display the image, and also modulates an intensity of a visible light output from a backlight 13 with a frequency higher than the frame rate of the image signal to have the visible light output from the backlight 13 carry additional information. A light receiver 15 receives the visible light and demodulates to extract the additional information. An additional information generator 16 outputs the additional information.
摘要翻译：提供了能够建立可见光通信而不干扰以预定帧率显示的图像的图像显示装置和图像显示系统。控制器12根据图像信号控制空间光调制器以显示图像，并且还以高于图像信号的帧速率的频率调制从背光源13输出的可见光的强度，以具有可见光来自背光13的输出携带附加信息。光接收器15接收可见光并进行解调以提取附加信息。附加信息发生器16输出附加信息。

10. 发明授权

US07295583B2 Optical device, laser beam source, laser apparatus and method of producing optical device 有权
标题翻译：光学装置，激光束源，激光装置及其制造方法
公开(公告)号：US07295583B2
公开(公告)日：2007-11-13
申请号：US10712126
申请日：2003-11-13
申请人： Kazuhisa Yamamoto , Kiminori Mizuuchi , Yasuo Kitaoka , Makoto Kato
发明人： Kazuhisa Yamamoto , Kiminori Mizuuchi , Yasuo Kitaoka , Makoto Kato
IPC分类号： H01S3/10
CPC分类号： G02F1/37 , G02F1/3558 , G02F1/3775 , G02F2203/60 , H01S3/09415 , H01S3/109 , H01S3/23 , H01S5/0092 , H01S5/02 , H01S5/40 , H01S5/4087
摘要： After forming domain inverted layers 3 in an LiTaO3 substrate 1, an optical waveguide is formed. By performing low-temperature annealing for the optical wavelength conversion element thus formed, a stable proton exchange layer 8 is formed, where an increase in refractive index generated during high-temperature annealing is lowered, thereby providing a stable optical wavelength conversion element. Thus, the phase-matched wavelength becomes constant, and variation in harmonic wave output is eliminated. Consequently, with respect to an optical wavelength conversion element utilizing a nonlinear optical effect, a highly reliable element is provided.
摘要翻译：在LiTaO 3衬底1中形成畴反转层3之后，形成光波导。通过对由此形成的光波长转换元件进行低温退火，形成稳定的质子交换层8，在高温退火时产生的折射率的升高降低，从而提供稳定的光波长转换元件。因此，相位匹配波长变得恒定，并且消除了谐波输出的变化。因此，对于利用非线性光学效应的光波长转换元件，提供了高度可靠的元件。

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