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    • 5. 发明授权
    • Film forming apparatus
    • 成膜装置
    • US09127358B2
    • 2015-09-08
    • US13347110
    • 2012-01-10
    • Mitsuya InoueYasunori KumagaiKippei Sugita
    • Mitsuya InoueYasunori KumagaiKippei Sugita
    • H01L21/306C23F1/00C23C16/448C23C14/54C23C16/455C23C16/52H01L21/02B05D1/00
    • C23C16/4481B05D1/60C23C14/542C23C14/543C23C16/45561C23C16/52H01L21/02118H01L21/02263
    • A film forming apparatus for forming a polyimide film on a substrate installed within a film forming container. The apparatus includes: a first vaporizer configured to vaporize a first raw material in a solid state, and supply the vaporized first raw material gas to the substrate; a second vaporizer configured to vaporize a second raw material in a liquid state, and supply the vaporized second raw material gas to the substrate; a first pressure measurement unit configured to measure the internal pressure of the first vaporizer; a second pressure measurement unit configured to measure the internal pressure of the second vaporizer; and a controller configured to calculate a supply amount of the first and second raw material gases by the first and second pressure measurement units, respectively, and control the first and second vaporizers to supply the first and second raw material gases in a uniform amount.
    • 一种用于在安装在成膜容器内的基板上形成聚酰亚胺膜的成膜装置。 该装置包括:第一蒸发器,被配置为以固态汽化第一原料,并将蒸发的第一原料气体供应到基板; 第二蒸发器,被配置为以液态汽化第二原料,并将蒸发的第二原料气体供给到所述基板; 第一压力测量单元,被配置为测量第一蒸发器的内部压力; 第二压力测量单元,被配置为测量第二蒸发器的内部压力; 以及控制器,被配置为分别计算第一和第二压力测量单元的第一和第二原料气体的供应量,并且控制第一和第二蒸发器以均匀的量供应第一和第二原料气体。
    • 6. 发明申请
    • Inspection method, inspection apparatus and computer-readable storage medium storing program
    • 检查方法,检查装置和计算机可读存储介质存储程序
    • US20080150562A1
    • 2008-06-26
    • US12003214
    • 2007-12-20
    • Yasunori KumagaiKa Toh
    • Yasunori KumagaiKa Toh
    • G01R31/02
    • G01R31/2886G01R3/00
    • The present invention includes a fritting circuit applying a voltage between a probe pair composed of probes in pairs in contact with a substrate to cause a fritting phenomenon to establish an electrical conduction between at least one of the probe pair and the substrate; and a switching circuit electrically connecting the probe pair and the fritting circuit and capable of freely switching between polarities of a voltage applied between the probe pair. Voltage is applied twice between the probe pair in contact with the substrate to thereby perform fritting twice. In the two times of fritting, the polarities of the voltage applied between the probe pair are changed. According to the present invention, electrical conduction between the probes and the substrate can be obtained more stably.
    • 本发明包括熔接电路,其在由与基板接触成对的探针构成的探针对之间施加电压,以引起烧结现象,以在至少一个探针对和基底之间建立导电; 以及切换电路,电连接探针对和熔接电路,并且能够自由地切换在探针对之间施加的电压的极性。 在与基板接触的探针对之间施加电压两次,从而进行两次烧结。 在两次烧结中,探针对之间施加的电压的极性发生变化。 根据本发明,可以更稳定地获得探针与基板之间的导电性。