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    • 1. 发明申请
    • Method for inspection and maintenance of an inside of a nuclear power reactor
    • 检查和维护核动力堆内部的方法
    • US20070140403A1
    • 2007-06-21
    • US11504691
    • 2006-08-16
    • Yasuhiro YuguchiHiroyuki AdachiTetsuro NakagawaSatoshi YamamotoHidefumi AmanaiKen Okuda
    • Yasuhiro YuguchiHiroyuki AdachiTetsuro NakagawaSatoshi YamamotoHidefumi AmanaiKen Okuda
    • G21C17/00
    • G21C17/01G21C19/02G21C19/207
    • A method for inspection and maintenance of an inside of a nuclear power reactor is provided, which can perform positioning of a remote operated vehicle relative to an inspection target surface in a nuclear power reactor in a short period of time with high accuracy, and enhance the positioning repeatability for the remote operated vehicle, thereby enabling performance of the inspection and maintenance for the inspection target surface securely and satisfactorily. For the inspection or maintenance for the inspection target surface 1a in a nuclear power reactor by using the remote operated vehicle 30, a detection mark 3 is formed in advance by providing a notching, marking, punching or engraving process to the inspection target surface 1a before performing inspection or maintenance of the inside of the nuclear power reactor by using the remote operated vehicle 30. Then, the remote operated vehicle 30 is driven to move in the nuclear power reactor filled with water. During the movement, the detection mark 3 formed in the inspection target surface 1a is detected by using the remote operated vehicle 30 so as to determine the position of the remote operated vehicle 30.
    • 提供了一种用于核电反应堆内部的检查和维护的方法,其能够在短时间内高精度地执行远程操作车辆相对于核动力反应堆中的检查目标表面的定位,并且增强 对远程操作车辆的定位可重复性,从而能够可靠且令人满意地执行检查目标表面的检查和维护。 为了通过使用遥控车辆30对核动力堆的检查对象面1a进行检查或维护,通过向检查对象面1设置切口,标记,冲压或雕刻处理,预先形成检测标记3 在通过使用远程操作车辆30进行核动力反应堆内部的检查或维护之前,驱动远程操作车辆30在充满水的核动力反应堆中移动。 在移动期间,通过使用遥控车辆30来检测形成在检查目标表面1a中的检测标记3,以便确定远程操作车辆30的位置。
    • 9. 发明授权
    • Resist composition and method for producing resist pattern
    • 抗蚀剂组合物和抗蚀剂图案的制造方法
    • US09291893B2
    • 2016-03-22
    • US13281145
    • 2011-10-25
    • Tatsuro MasuyamaSatoshi YamamotoKoji Ichikawa
    • Tatsuro MasuyamaSatoshi YamamotoKoji Ichikawa
    • G03F7/004G03F7/039G03F7/20
    • G03F7/0046G03F7/0045G03F7/0397G03F7/2041
    • A resist composition contains; a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C24 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.
    • 抗蚀剂组合物含有 具有由式(aa)表示的结构单元的树脂和由式(ab)表示的结构单元; 和酸产生剂,其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键,任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C24脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。
    • 10. 发明授权
    • Resist composition and method for producing resist pattern
    • 抗蚀剂组合物和抗蚀剂图案的制造方法
    • US09229320B2
    • 2016-01-05
    • US13196446
    • 2011-08-02
    • Koji IchikawaSatoshi Yamamoto
    • Koji IchikawaSatoshi Yamamoto
    • G03F7/004G03F7/039G03F7/20
    • G03F7/0045G03F7/0046G03F7/0397G03F7/2041G03F7/2059
    • A resist composition contains; a resin having a structural unit derived from a compound represented by the formula (a); and an acid generator represented by the formula (B1). wherein R1 represents a hydrogen atom or a methyl group; A10 represents a single bond, an optionally substituted C1 to C6 alkanediyl group or a group represented by formula (a-1) defined in the specification; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; A20 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; R2 in each occurrence independently represents a C1 to C12 perfluoroalkyl group; n represents 1 or 2; Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; Lb1 represents an optionally substituted C1 to C17 divalent aliphatic hydrocarbon group; Y represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; and Z+ represents an organic cation.
    • 抗蚀剂组合物含有 具有衍生自由式(a)表示的化合物的结构单元的树脂; 和由式(B1)表示的酸发生剂。 其中R1表示氢原子或甲基; A10表示单键,可以具有取代基的C1〜C6烷二基或由说明书中定义的式(a-1)表示的基团; W1表示任选取代的C4至C36脂环族烃基; A20每次独立地表示任选取代的C 1至C 6脂族烃基; R2各自独立地表示C1〜C12全氟烷基; n表示1或2; Q1和Q2独立地表示氟原子或C1〜C6全氟烷基; Lb1表示任选取代的C 1至C 17二价脂族烃基; Y表示任选取代的C 1至C 18脂族烃基; Z +表示有机阳离子。