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1. 发明授权

US06529792B1 Process equipment selecting system and method for selecting process equipment 失效
标题翻译：过程设备选择系统和选择过程设备的方法
公开(公告)号：US06529792B1
公开(公告)日：2003-03-04
申请号：US09576228
申请日：2000-05-22
申请人： Yasuhiro Sato , Masaki Otani , Takamasa Inobe , Katsuya Ota , Yasuhiro Marume , Ryuji Takechi , Kenji Sakaguchi , Toshiyuki Watanabe
发明人： Yasuhiro Sato , Masaki Otani , Takamasa Inobe , Katsuya Ota , Yasuhiro Marume , Ryuji Takechi , Kenji Sakaguchi , Toshiyuki Watanabe
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/32258 , G05B2219/32315 , Y02P90/10 , Y02P90/20 , Y02P90/86
摘要： A process selection system and method enable the automatic control of the specification to equipment most suitable for each lot. Processing using this specific equipment can be performed by further selecting the most suitable equipment from equipment used for the product type. Since a plurality of equipment can be specified for each lot, the equipment can be specified from an equipment group having these plurality of equipment. The adequate number of products in process for each equipment-specific process equipment id can be calculated based on the distribution percentage ri. The equipment-specific process equipment having the maximum value of the differential Gi between the adequate number of products in process ni and the collected actual number of products in process can be determined as the equipment-specific process equipment for the lot.
摘要翻译：过程选择系统和方法能够将规范自动控制到最适合每批的设备。使用该特定设备的处理可以通过从用于产品类型的设备中进一步选择最合适的设备来执行。由于可以为每个批次指定多个设备，所以可以从具有这些多个设备的设备组指定设备。对于每个设备特定的过程设备ID，正在处理的足够数量的产品可以基于分配百分比ri来计算。具有过程ni中的足够数量的产品之间的差分Gi的最大值的设备特定的过程设备可以被确定为该批次的设备特定的处理设备。

2. 发明授权

US06593154B2 Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers 失效
标题翻译：利用再生晶片控制半导体制造系统的装置和方法
公开(公告)号：US06593154B2
公开(公告)日：2003-07-15
申请号：US10095040
申请日：2002-03-12
申请人： Yasuhiro Marume , Toshiyuki Watanabe , Masaki Otani , Takamasa Inobe , Yasuhiro Sato
发明人： Yasuhiro Marume , Toshiyuki Watanabe , Masaki Otani , Takamasa Inobe , Yasuhiro Sato
IPC分类号： H01L2166
CPC分类号： H01L22/20
摘要： A method of process control includes the steps of preparing recycling procedure data for each type of film formed on a wafer by diffusion processing, setting a recycle control number for controlling recycling processing based on the recycling procedure data, and outputting a recycling instruction to the recycling apparatus when the prescribed number of non-product wafers are accumulated and when an accept request is received from the recycling apparatus.
摘要翻译：一种过程控制方法包括以下步骤：通过扩散处理制备在晶片上形成的每种类型的膜的再循环过程数据，根据再循环过程数据设置用于控制再循环处理的再循环控制数，并将回收指令输出到回收当存储规定数量的非产品晶片时以及从再循环设备接收到接受请求时的装置。

3. 发明授权

US06823229B2 Substrate carrier management system and program 失效
标题翻译：基板载体管理系统和程序
公开(公告)号：US06823229B2
公开(公告)日：2004-11-23
申请号：US10131252
申请日：2002-04-25
申请人： Masaki Ootani , Yasuhiro Sato , Takamasa Inobe , Yasuhiro Marume , Toshiyuki Watanabe
发明人： Masaki Ootani , Yasuhiro Sato , Takamasa Inobe , Yasuhiro Marume , Toshiyuki Watanabe
IPC分类号： G06F1900
CPC分类号： H01L21/67276
摘要： The substrate carrier management system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier in which the substrate is stored, performs predetermined processing on the substrate, and transfers the processed substrate stored in a carrier to be used after processing. The carrier cleaner cleans a carrier emptied as a result of taking a substrate out of the carrier. The carrier conveyer conveys a carrier between the pre-diffusion processing apparatus and the carrier cleaner. The empty carrier unloaded from the pre-diffusion processing apparatus is cleaned by the carrier cleaner, and the processed substrate is stored in the empty carrier. With this arrangement, it is possible to automatically change carriers and thereby continuously use a cleaned carrier in the subsequent step without using a dedicated carrier.
摘要翻译：衬底载体管理系统包括预扩散处理装置，载体清洁器和载体输送器。预扩散处理装置从其中存储有基板的供应载体卸载基板，对基板执行预定处理，并且将处理后的待使用的载体进行转印。载体清洁剂清洁由于将基板从载体中取出而导致的载体排空。载体输送机在预扩散处理装置和载体清洁器之间传送载体。从预扩散处理装置卸载的空载体被载体清洁器清洁，并且处理的基板被存储在空载体中。利用这种布置，可以自动地改变载体，从而在不使用专用载体的情况下，在后续步骤中连续地使用清洁的载体。

4. 发明授权

US06397119B1 Semiconductor manufacturing system for simultaneous processing of prescribed number of lots 失效
标题翻译：半导体制造系统同时处理订单数量
公开(公告)号：US06397119B1
公开(公告)日：2002-05-28
申请号：US09354094
申请日：1999-07-15
申请人： Yasuhiro Marume , Ryuji Takechi , Masaki Ootani , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
发明人： Yasuhiro Marume , Ryuji Takechi , Masaki Ootani , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/31428 , G05B2219/45031 , Y02P90/04 , Y02P90/14 , Y02P90/20
摘要： A semiconductor manufacturing system having a high processing efficiency and a high product output includes a processing device for simultaneously processing a prescribed number of lots for which it is reserved, and a semiconductor manufacturing system control device connected to the processing device for managing the manufacturing steps. The semiconductor manufacturing system control device includes a lot processing step managing portion for managing the processing steps of the lots and determining whether the lots have arrived at the step of being processed by the processing device; a lot securing portion, connected to the lot processing step managing portion, for selecting, when the lots have arrived at the step of being processed by the processing device, a prescribed number of lots to be processed by the processing device under the same processing condition as the lots, instructing an operator to secure the prescribed number of lots selected, and determining whether the prescribed number of lots are secured; and a lot reservation portion connected to the lot securing portion and the processing device for reserving the processing device for the processing of the prescribed number of lots secured when the prescribed number of lots are secured. The processing device includes a portion connected to the semiconductor manufacturing system control device for processing the prescribed number of lots for which it is reserved.
摘要翻译：具有高处理效率和高产品输出的半导体制造系统包括用于同时处理预定数量的批次的处理装置和连接到处理装置的用于管理制造步骤的半导体制造系统控制装置。半导体制造系统控制装置包括批处理步骤管理部分，用于管理批次的处理步骤，并且确定批次是否到达处理装置处理的步骤; 连接到批处理步骤管理部分的许多固定部分，用于当批次到达处理装置处理的步骤时，选择在相同处理条件下由处理装置处理的规定数量的批次作为批次，指示操作者确保所选择的规定数量的批次，并且确定规定的批次数量是否被保证; 以及连接到批次固定部分的许多预留部分和用于在确保规定的批次数时确保的预定数量的批次的处理的预留处理装置。处理装置包括连接到半导体制造系统控制装置的部分，用于处理预定数量的批号。

5. 发明授权

US06480755B1 Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues 失效
标题翻译：过程控制装置和过程控制方法允许在制造过程继续时改变处理顺序和处理条件
公开(公告)号：US06480755B1
公开(公告)日：2002-11-12
申请号：US09357917
申请日：1999-07-21
申请人： Masaki Ootani , Ryuji Takechi , Yasuhiro Marume , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
发明人： Masaki Ootani , Ryuji Takechi , Yasuhiro Marume , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/31456 , G05B2219/32297 , Y02P90/20 , Y02P90/28
摘要： A process control device includes: a change table detection unit to determine existence of a change table corresponding to a progress file; a progress file adjustment unit to change, when the change table detection unit determines that there exists a change table, the content of the progress file based on the change table; a unit to control a transport device of an item in process based on the progress file changed by the progress file adjustment unit; and a unit to control a manufacturing device of the item based on the progress file changed by the progress file adjustment unit. The manufacturing device control unit controls the manufacturing device based on the progress file that has been changed by the progress file adjustment unit, and thus, it is possible to change the processing orders, processing conditions and the like even when individual items are in respective manufacturing steps.
摘要翻译：一种过程控制装置，包括：变更表检测单元，用于确定与进度文件相对应的变更表的存在; 进度文件调整单元，当所述更改表检测单元确定存在改变表时，基于所述改变表来改变所述进度文件的内容; 基于由进度文件调整单元改变的进度文件来控制正在处理的物品的运送装置的单元; 以及基于由进度文件调整单元改变的进度文件来控制物品的制造装置的单元。制造装置控制单元基于由进度文件调整单元改变的进度文件来控制制造装置，因此即使各个制品在各个制造中也可以改变处理顺序，处理条件等脚步。

6. 发明授权

US06463348B1 Process control device and process control method enabling restoration of lot control 失效
标题翻译：过程控制装置和过程控制方法能够恢复批次控制
公开(公告)号：US06463348B1
公开(公告)日：2002-10-08
申请号：US09354576
申请日：1999-07-16
申请人： Ryuji Takechi , Yasuhiro Marume , Masaki Ootani , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
发明人： Ryuji Takechi , Yasuhiro Marume , Masaki Ootani , Takamasa Inobe , Katuya Oota , Yasuhiro Satou
IPC分类号： G06F1900
CPC分类号： G06Q10/06 , Y02P90/28
摘要： A process control device for controlling a processing device and a transport apparatus while updating process information of a lot includes: a control information update unit to update control information for controlling the processing device and the transport apparatus; a work-in-process information update unit to update the work-in-process information indicating a location of a lot; a processing device control unit to control the processing device according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information updated unit; and a transport apparatus control unit to control the transport apparatus according to the control information updated by the control information update unit and the work-in-process information updated by the work-in-process information update unit. The control information update unit deletes, when trouble occurs, the control information of a lot that is in process at a location where the trouble occurred. Thus, it is possible to release the lot from control of the process control device, and to prevent control of other lots from being restricted.
摘要翻译：一种用于在更新批次的处理信息的同时控制处理装置和传送装置的处理控制装置包括：控制信息更新单元，用于更新用于控制处理装置和传送装置的控制信息; 一个在制品信息更新单元，用于更新指示批次的位置的在制品信息; 处理装置控制单元，用于根据由控制信息更新单元更新的控制信息和由在制品信息更新单元更新的在制品信息来控制处理装置; 以及传送装置控制单元，用于根据由控制信息更新单元更新的控制信息和由在制品信息更新单元更新的在制品信息来控制传送装置。当发生故障时，控制信息更新单元删除在发生故障的位置处的批次的控制信息。因此，可以从处理控制装置的控制中释放批次，并且防止对其他批次的控制受到限制。

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