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    • 1. 发明授权
    • Gravity safety door for an apparatus for manufacturing or inspecting semiconductors
    • 用于制造或检查半导体的设备的重力安全门
    • US07162835B1
    • 2007-01-16
    • US09438100
    • 1999-11-10
    • Yasuhiro ManpukuKazunori HiranumaMamoru Takashina
    • Yasuhiro ManpukuKazunori HiranumaMamoru Takashina
    • E05F15/08
    • E05F15/00E05F15/57
    • An apparatus for manufacturing or inspecting semiconductors comprising a main body, an opening arranged in the main body, and a safety door. The safety door includes a first door element for covering a first portion of the opening and a second door element for covering a second portion of the opening, the first door element having a movement direction along which the first door element is driven by a driving device, the second door element being urged toward the first door element along the movement direction of the first door element by an external force. If a part of a person's body should be caught between the first and second door elements, the second door element is urged against the external force by the force generated by the part of the person's body to protect the part of the person's body.
    • 一种用于制造或检查半导体的装置,包括主体,布置在主体中的开口和安全门。 安全门包括用于覆盖开口的第一部分的第一门元件和用于覆盖开口的第二部分的第二门元件,第一门元件具有移动方向,第一门元件沿着该移动方向由驱动装置 第二门元件通过外力沿着第一门元件的移动方向被推向第一门元件。 如果人体的一部分被夹在第一和第二门元件之间,则第二门元件被人的身体部分产生的力抵抗外力,以保护身体的一部分。