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    • 3. 发明授权
    • Fabry-Perot tunable filter using a bonded pair of transparent substrates
    • 法布里 - 珀罗可调滤波器,使用一对粘合的透明基板
    • US07734131B2
    • 2010-06-08
    • US11405774
    • 2006-04-18
    • Pinyen LinPeter M. GulvinYao Rong WangLalit K Mestha
    • Pinyen LinPeter M. GulvinYao Rong WangLalit K Mestha
    • G02B6/42
    • G01J3/26G02B6/29358G02B6/29395G02B26/001
    • A tunable Fabry-Perot filter (8, 118, 218, 318, 418) includes substrates (10, 12) with parallel generally planar facing principal surfaces (14, 16) including spaced apart facing reflective surface regions (20, 22) that are at least partially reflective over a wavelength range and define an optical gap (Gopt) therebetween. At least one substrate of the pair of substrates is light transmissive over the selected wavelength range to enable optical coupling with the optical gap. Electrodes (24, 26) are disposed on the facing principal surfaces of the substrates. The electrodes on the facing principal surfaces of the substrates are define an electrode gap therebetween such that electrical biasing of the electrodes simultaneously modifies the optical and electrode gaps.
    • 可调谐的法布里 - 珀罗滤光器(8,118,218,318,418)包括具有平行大致平面的主要表面(14,16)的衬底(10,12),该主表面包括间隔开的面对的反射表面区域(20,22) 在波长范围内至少部分反射并且在其间限定光学间隙(Gopt)。 一对基板中的至少一个基板在所选择的波长范围内是透光的,以使得能够与光学间隙进行光耦合。 电极(24,26)设置在基板的相对的主表面上。 衬底的相对主表面上的电极在其间限定电极间隙,使得电极的电偏置同时改变光学和电极间隙。