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    • 5. 发明申请
    • DUAL-AXIS RESONATOR GYROSCOPE
    • 双轴共振器陀螺仪
    • WO2007105211A2
    • 2007-09-20
    • PCT/IL2007/000320
    • 2007-03-13
    • YISHAY SENSORS LTD.NETZER, Yishay
    • NETZER, Yishay
    • B25F3/00
    • G01C19/5719
    • The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequency from the wafer thickness. The use of separate plates for the force-balance and for the electric spring enables decoupling of the two functions. The invention also provides resonant frequency servo-loop for locking of the sense-mode resonant frequency to the drive-mode frequency, an online self-test, a split force balance loop for self cancellation of the quadrature signal, decoupling of the force-balance and resonant frequency servo-loops and stabilization of the inertial rate-sensing sensitivity - when operated in an open loop mode, all without interfering with the normal operation of the gyroscope. An optional sensing of the Z-axis acceleration perpendicular to the sensor plane is also provided which can be used for compensating acceleration-induced errors.
    • 本发明公开了一种具有相邻振动元件机械耦合的改进的平面双轴谐振陀螺仪。 主模式柔性铰链包括切向扭转元件,其大大地将平面外谐振频率与晶片厚度分离。 使用单独的平衡板用于力平衡和电动弹簧可以实现两个功能的解耦。 本发明还提供用于将感测模式谐振频率锁定到驱动模式频率的共振频率伺服回路,在线自检,用于自消除正交信号的分力平衡环,力平衡的去耦 和谐振频率伺服回路以及惯性速率感测灵敏度的稳定 - 当在开环模式下操作时,都不会影响陀螺仪的正常运行。 还提供了与传感器平面垂直的Z轴加速度的可选感测,可用于补偿加速度引起的误差。