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1. 发明申请

WO2005015189A2 X-RAY FLUORESCENCE SYSTEM WITH APERTURED MASK FOR ANALYZING PATTERNED SURFACES 审中-公开
标题翻译：用于分析图形表面的带有掩模的X射线荧光体系
公开(公告)号：WO2005015189A2
公开(公告)日：2005-02-17
申请号：PCT/US2004/026073
申请日：2004-08-12
申请人： X-RAY OPTICAL SYSTEMS, INC. , TECHNOS CO., LTD , CHEN, Zewu , TERADA, Shinichi
发明人： CHEN, Zewu , TERADA, Shinichi
IPC分类号： G01N23/00
CPC分类号： G01N23/223 , G01N2223/076
摘要： Measurement technique and apparatus for examining a region of a patterned surface such as an integrated circuit (IC). Excitation x-ray, neutron, particle-beam or gamma ray radiation is directed toward a two-dimensional sample area of the IC. Emissions (e.g., x-ray fluorescence - XRF) from the sample area are detected. A mask is placed in a planar radiation path formed by the source, detector and the sample area, and in one embodiment moveable relative to the sample area. The mask includes an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area. The invention allows predictive measurement of feature characteristics in active circuit regions of the IC, using sample areas outside of these regions.
摘要翻译：用于检查诸如集成电路（IC）的图案化表面的区域的测量技术和装置。激发X射线，中子，粒子束或伽马射线辐射指向IC的二维样本区域。检测来自样品区域的排放（例如x射线荧光XRF）。掩模被放置在由源，检测器和样品区域形成的平面辐射路径中，并且在一个实施例中可相对于样品区域移动。当平行于二维样本区域的第一轴线布置时，掩模包括细长孔，以基本上限制被引导到样品区域的激发辐射，以及从样品区域到平面辐射路径的发射。本发明允许使用这些区域之外的采样区域来预测测量IC的有源电路区域中的特征特征。

2. 发明申请

WO2006060347A1 PORTABLE AND ON-LINE X-RAY ANALYZER 审中-公开
标题翻译：便携式和在线X射线分析仪
公开(公告)号：WO2006060347A1
公开(公告)日：2006-06-08
申请号：PCT/US2005/043013
申请日：2005-11-29
申请人： X-RAY OPTICAL SYSTEMS, INC. , CHEN, Zewu , GIBSON, Walter
发明人： CHEN, Zewu , GIBSON, Walter
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N33/18 , G01N33/1813 , G01N2223/076 , G21K2201/064
摘要： An x-ray fluorescence technique for detecting, e.g., the level of arsenic in a sample of water or body fluid. Arsenic and lead are expected to fluoresce in a first energy band and lead is expected to also fluoresce separately in a second energy band. An excitation path directs x-rays toward the sample; a first detection path detects x-ray fluorescence of the first energy band from the sample; and a second detection path detects x-ray fluorescence of the second energy band from the sample. The level of arsenic can be obtained by analyzing the x-ray fluorescence from both detection paths, and using a constant, e. g., the intensity ratio of PbL α1, to PbL β1 , which relates the level of lead in the second energy band to the level of lead in the first energy band. The excitation path and each detection path may each include a monochromating optic to transmit the desired x-ray energy band, e.g., a doubly curved optic.
摘要翻译：用于检测例如水或体液样品中的砷水平的x射线荧光技术。预计砷和铅将在第一个能带中发出荧光，预计在第二个能带中铅也将分别发荧光。激发路径将X射线引向样品; 第一检测路径检测来自样品的第一能带的X射线荧光; 并且第二检测路径检测来自样品的第二能带的x射线荧光。通过分析来自两个检测路径的X射线荧光，并使用常数e，可获得砷的含量。例如，PbLa1a1与PbL1β1的强度比，其将第二能带中的铅的水平与第一能带中的铅的水平相关联。激发路径和每个检测路径可以各自包括单色光学器件，以传输期望的x射线能带，例如双曲面光学元件。

3. 发明申请

WO2003049138A2 METHOD AND DEVICE FOR COOLING AND ELECTRICALLY INSULATING A HIGH-VOLTAGE, HEAT-GENERATING COMPONENT SUCH AS AN X-RAY TUBE FOR ANALYZING FLUID STREAMS 审中-公开
标题翻译：用于冷却和电绝缘的高压，热生成组件如用于分析流体流的X射线管的方法和装置
公开(公告)号：WO2003049138A2
公开(公告)日：2003-06-12
申请号：PCT/US2002/038803
申请日：2002-12-04
申请人： X-RAY OPTICAL SYSTEMS, INC. , RADLEY, Ian , BIEVENUE, Thomas, J. , BURDETT, Jr., John, H. , GALLAGHER, Brian, W. , SHAKSHOBER, Stuart, M. , CHEN, Zewu
发明人： RADLEY, Ian , BIEVENUE, Thomas, J. , BURDETT, Jr., John, H. , GALLAGHER, Brian, W. , SHAKSHOBER, Stuart, M. , CHEN, Zewu
IPC分类号： H01J35/00
CPC分类号： H01J35/12 , G01N23/12 , G01N23/223 , G01N2223/076 , H01J2235/1295
摘要： A method and device for cooling and electrically-insulating a high-voltage, heat-generating component, for example, an x-ray tube (1105) for analyzing fluids by means of x-ray fluorescence. The device includes an x-ray source (1100) including an x-ray tube (1105) having improved heat-dissipating properties due to the thermal coupling of the x-ray tube with a thermally-conductive, dielectric material (1150). The device may include a base assembly (1135) mounted to the component for conducting heat away from the component while electrically isolating the component. In one aspect of the invention, the base assembly includes two copper plates (1140, 1145) separated by a dielectric plate (1150). The dielectric plate minimizes or prevents the leakage of current through the base assembly (1135). One aspect of the disclosed invention is most amenable to the analysis of sulfur in petroleum-based fuels.
摘要翻译：一种用于冷却和电绝缘高压发热部件的方法和装置，例如用于通过x射线荧光分析流体的X射线管（1105）。该装置包括由X射线管与导热介电材料（1150）的热耦合而具有改善的散热特性的x射线管（1105）的x射线源（1100）。该装置可以包括安装到部件上的基部组件（1135），用于在将组件电绝缘的同时将部件散热。在本发明的一个方面，基座组件包括由电介质板（1150）分开的两个铜板（1140,1145）。电介质板最小化或防止电流通过基座组件（1135）的泄漏。所公开的发明的一个方面最适于分析石油基燃料中的硫。

4. 发明申请

WO2008061221A3 X-RAY FOCUSING OPTIC HAVING MULTIPLE LAYERS WITH RESPECTIVE CRYSTAL ORIENTATIONS 审中-公开
公开(公告)号：WO2008061221A3
公开(公告)日：2008-05-22
申请号：PCT/US2007/084938
申请日：2007-11-16
申请人： X-RAY OPTICAL SYSTEMS, INC. , CHEN, Zewu
发明人： CHEN, Zewu
IPC分类号： G21K1/06
摘要： A diffracting x-ray optic for accepting and redirecting x-rays. The optic includes at least two layers, the layers having a similar or differing material composition and similar or differing crystalline orientation. Each of the layers exhibits a diffractive effect, and their collective effect provides a diffractive effect on the received x-rays. In one embodiment, the layers are silicon, and are bonded together using a silicon-on-insulator bonding technique. In another embodiment, an adhesive bonding technique may be used. The optic may be a curved, monochromating optic.

5. 发明申请

WO2003049510A2 X-RAY SOURCE ASSEMBLY HAVING ENHANCED OUTPUT STABILITY, AND FLUID STREAM ANALYSIS APPLICATIONS THEREOF 审中-公开
标题翻译：具有增强输出稳定性的X射线源组件及其流体流动分析应用
公开(公告)号：WO2003049510A2
公开(公告)日：2003-06-12
申请号：PCT/US2002/038493
申请日：2002-12-04
申请人： X-RAY OPTICAL SYSTEMS, INC. , RADLEY, Ian , BIEVENUE, Thomas, J. , BURDETT, John, H., Jr. , GALLAGHER, Brian, W. , SHAKSHOBER, Stuart, M. , CHEN, Zewu , MOORE, Michael, D.
发明人： RADLEY, Ian , BIEVENUE, Thomas, J. , BURDETT, John, H., Jr. , GALLAGHER, Brian, W. , SHAKSHOBER, Stuart, M. , CHEN, Zewu , MOORE, Michael, D.
IPC分类号： H05G1/00
CPC分类号： H01J35/12 , G01N23/12 , G01N23/223 , G01N2223/076 , H01J2235/1295
摘要： An x-ray source assembly (2700) and method of operation are provided having enhanced output stability. The assembly includes an anode (2125) having source spot upon which electrons (2120) impinge and a control system (2715/2720) for controlling position of the anode source spot relative to an output structure. The control system can maintain the anode source spot location relative to the output structure (2710) notwithstanding a change in one or more operating conditions of the x-ray source assembly. One aspect of the disclosed invention is most amenable to the analysis of sulfur in petroleum-based fuels.
摘要翻译：提供了具有增强的输出稳定性的x射线源组件（2700）和操作方法。该组件包括具有电子（2120）撞击的源点的阳极（2125）和用于控制阳极源点相对于输出结构的位置的控制系统（2715/2720）。即使X射线源组件的一个或多个操作条件发生变化，控制系统也可以相对于输出结构（2710）维持阳极源点位置。所公开的发明的一个方面最适于分析石油基燃料中的硫。

6. 发明申请

WO2003048745A3 X-RAY FLUORESCENCE ANALYSER FOR ANALYSING FLUID STREAMS USING A SEMICONDUCTOR-TYPE DETECTOR AND FOCUSING MEANS 审中-公开
公开(公告)号：WO2003048745A3
公开(公告)日：2003-06-12
申请号：PCT/US2002/038792
申请日：2002-12-04
申请人： X-RAY OPTICAL SYSTEMS, INC. , RADLEY, Ian , BIEVENUE, Thomas J. , BURDETT Jr., John H. , GALLAGHER, Brian W. , SHAKSHOBER, Stuart M. , CHEN, Zewu , MOORE, Michael D.
发明人： RADLEY, Ian , BIEVENUE, Thomas J. , BURDETT Jr., John H. , GALLAGHER, Brian W. , SHAKSHOBER, Stuart M. , CHEN, Zewu , MOORE, Michael D.
IPC分类号： G01N23/223
摘要： A method and apparatus for analyzing fluids by means of x-ray fluorescence. The method and apparatus includes a semiconductor-type detector, preferably one having a small-area, for example, a PIN-diode type semiconductor x-ray detector (120), that can provide effective x-ray detection at room temperature. Focusing means, such as a focusing monochromator, are provided for focusing fluorescent radiation on the detector. The apparatus may also include a x-ray tube (64) having improved heat dissipating properties due to the thermal coupling of the x-ray tube with a thermally-conductive, dielectric material (70, 1150). The x-ray tube may further include means for aligning (100, 2150, 2715) the x-ray tube with the x-ray source housing whereby the orientation of the x-ray beam produced by the x-ray source can be optimized, and stabilized various over operating conditions. One aspect of the disclosed invention is most amenable to the analysis of sulfur in petroleum-based fuels.

7. 发明申请

WO2011100222A2 SAMPLE MODULE WITH SAMPLE STREAM SUPPORTED AND SPACED FROM WINDOW, FOR X-RAY ANALYSIS SYSTEM 审中-公开
标题翻译：采样窗口支持和隔开示例流模块，用于X射线分析系统
公开(公告)号：WO2011100222A2
公开(公告)日：2011-08-18
申请号：PCT/US2011/024004
申请日：2011-02-08
申请人： X-RAY OPTICAL SYSTEMS, INC. , CHEN, Zewu , CHERIYAN, Sony , XIN, Kai , BURDETT, Jay
发明人： CHEN, Zewu , CHERIYAN, Sony , XIN, Kai , BURDETT, Jay
IPC分类号： G01N23/207 , G01N1/28
CPC分类号： G01N23/223 , G01N23/12 , G01N2223/076
摘要： An x-ray analysis system with an x-ray source for producing an x-ray excitation beam directed toward an x-ray analysis focal area; and a sample chamber for presenting a fluid sample to the x-ray analysis focal area. The x-ray excitation beam is generated by an x-ray engine and passes through an x-ray transparent barrier on a wall of the chamber, to define an analysis focal area within space defined by the chamber. The fluid sample is presented as a stream supported in the space and streaming through the focal area, using a support structure to guide the sample stream. The chamber's barrier is therefore separated from both the focal area and the sample, resulting in lower corruption of the barrier.
摘要翻译：具有用于产生指向x射线分析聚焦区域的x射线激励束的x射线源的x射线分析系统; 以及用于向X射线分析聚焦区域提供流体样本的样本室。 X射线激发束由X射线引擎产生并穿过腔室壁上的X射线透明屏障，以在由腔室限定的空间内限定分析聚焦区域。流体样本呈现为在空间中支持的流并通过焦点区域流动，使用支撑结构来引导样本流。室的屏障因此与焦点区域和样品分开，从而导致屏障腐蚀降低。

8. 发明申请

WO2009108628A3 SAMPLE MODULE WITH SAMPLE STREAM SPACED FROM WINDOW, FOR X-RAY ANALYSIS SYSTEM 审中-公开
公开(公告)号：WO2009108628A3
公开(公告)日：2009-09-03
申请号：PCT/US2009/034982
申请日：2009-02-24
申请人： X-RAY OPTICAL SYSTEMS, INC. , CHEN, Zewu , DELANEY, Rory , XIN, Kai
发明人： CHEN, Zewu , DELANEY, Rory , XIN, Kai
IPC分类号： G01N23/20 , G01N23/12 , G01N21/85 , G01N1/28
摘要： An x-ray analysis system with an x-ray source for producing an x-ray excitation beam directed toward an x-ray analysis focal area; and a sample chamber for presenting a fluid sample to the x-ray analysis focal area. The x- ray excitation beam is generated by an x-ray engine and passes through an x- ray transparent barrier on a wall of the chamber, to define an analysis focal area within space defined by the chamber. The fluid sample is presented as a stream suspended in the space and streaming through the focal area, using a laminar air flow and/or pressure to define the stream. The chamber's barrier is therefore separated from both the focal area and the sample, resulting in lower corruption of the barrier.

9. 发明申请

WO2008112950A1 SMALL SPOT AND HIGH ENERGY RESOLUTION XRF SYSTEM FOR VALENCE STATE DETERMINATION 审中-公开
标题翻译：小点和高能量分辨率XRF系统进行有效状态确定
公开(公告)号：WO2008112950A1
公开(公告)日：2008-09-18
申请号：PCT/US2008/056944
申请日：2008-03-14
申请人： X-RAY OPTICAL SYSTEMS, INC. , CHEN, Zewu , DANHONG, Li
发明人： CHEN, Zewu , DANHONG, Li
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： An x-ray fluorescence technique for determining a valence state of a sample. An x-ray excitation path is provided for exciting a sample with x-rays; and an x-ray detection path is provided for detecting fluorescence emitted from the sample, and focusing the emitted fluorescence to a focal spot. The detection path may include a monochromating detection optic for focusing the fluorescence; and also may include a detector on which the focal spot is focused. The precise positions of the focal spot are sensed, from which valence states of the sample can be determined; and/or the detection optic can be rocked across certain angles of incidence, to change the Bragg conditions, thereby sensing different valence states within the sample.
摘要翻译：用于确定样品的价态的x射线荧光技术。提供x射线激发路径用于激发具有X射线的样品; 并且提供用于检测从样品发出的荧光并将发射的荧光聚焦到焦点的X射线检测路径。检测路径可以包括用于聚焦荧光的单色检测光学器件; 并且还可以包括其上聚焦点的检测器。感测焦点的精确位置，从中可以确定样品的价态; 和/或检测光学元件可以在某些入射角度上摇摆，以改变布拉格条件，从而检测样品内的不同价态。

10. 发明申请

WO2007019053A1 MONOCHROMATIC X-RAY MICRO BEAM FOR TRACE ELEMENT MAPPING 审中-公开
标题翻译：单色X射线微光束跟踪元素映射
公开(公告)号：WO2007019053A1
公开(公告)日：2007-02-15
申请号：PCT/US2006/028890
申请日：2006-07-26
申请人： X-RAY OPTICAL SYSTEMS, INC. , CHEN, Zewu , GAO, Ning , GIBSON, Walter
发明人： CHEN, Zewu , GAO, Ning , GIBSON, Walter
IPC分类号： G21K1/06 , G01N23/223
CPC分类号： G01N23/223 , B82Y10/00 , G01N2223/076 , G21K1/06 , G21K2201/061 , G21K2201/062 , G21K2201/064
摘要： An x-ray system or method for exciting a sample under x-ray analysis, using a curved monochromating optic for directing a monochromatic x-ray beam from an x-ray source towards a first focal area. A second optic is positioned within, and receives, the monochromatic x-ray beam, and directs a focused x-ray beam towards a second focal area on the sample. A detector is positioned near the sample to collect radiation from the sample as a result of the focused x-ray beam. The curved monochromating optic produces a beam spot size at the first focal area larger than a beam spot size produced by the second optic at the second focal area, therefore, a beam spot size on the sample is thereby reduced using the second optic. Doubly-curved monochromating optics, and polycapillary optics, are disclosed as possible implementations of the optics.
摘要翻译：一种用于在x射线分析下激发样本的X射线系统或方法，使用弯曲单色光学器件将来自x射线源的单色x射线束引导到第一焦点区域。第二光学器件位于单色X射线束内并接收单色X射线束，并将聚焦的X射线束引导到样品上的第二焦点区域。检测器位于样品附近以由于聚焦的X射线束而从样品收集辐射。弯曲单色光学器件在第一焦点区域处产生大于由第二焦点区域处的第二光学器件产生的光束尺寸的光束尺寸，因此，使用第二光学元件，样品上的光束尺寸因此减小。公开了双折射单色光学器件和多毛细管光学器件作为光学器件的可能实现。

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