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    • 9. 发明申请
    • THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME
    • 薄膜晶体管阵列及其制造方法
    • US20110095300A1
    • 2011-04-28
    • US12904281
    • 2010-10-14
    • Dae-Cheol KIMWoong-Kwon KIMSang-Youn HAN
    • Dae-Cheol KIMWoong-Kwon KIMSang-Youn HAN
    • H01L25/075H01L21/336
    • H01L27/1288H01L27/124
    • A manufacturing method of a thin film transistor array panel includes forming a gate line on a substrate and a gate insulating layer on the gate line, forming a semiconductor on the gate insulating layer, forming a first data line and a first drain electrode on the semiconductor, forming a lower passivation layer on the first data line and the first drain electrode, forming an upper passivation layer on the lower passivation layer and a metal layer on the upper passivation layer, etching the metal layer by using a photosensitive film as a mask to form a reflecting electrode and to expose the lower passivation layer, etching the exposed lower passivation layer to form a first contact hole exposing the first drain electrode, and forming a connection assistance member connecting the first drain electrode and the reflecting electrode through the first contact hole after removing the photosensitive film.
    • 一种薄膜晶体管阵列面板的制造方法,包括在栅极线上形成栅极线和栅极绝缘层,在栅极绝缘层上形成半导体,在半导体上形成第一数据线和第一漏极 在所述第一数据线和所述第一漏电极上形成下钝化层,在所述下钝化层上形成上钝化层,在所述上钝化层上形成金属层,通过使用感光膜作为掩模蚀刻所述金属层 形成反射电极并暴露下钝化层,蚀刻暴露的下钝化层以形成暴露第一漏极的第一接触孔,以及形成通过第一接触孔连接第一漏电极和反射电极的连接辅助构件 去除感光膜后。