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1. 发明授权

US06164448A Magazine for the fixation of small components 有权
标题翻译：杂志固定小部件
公开(公告)号：US06164448A
公开(公告)日：2000-12-26
申请号：US043857
申请日：1999-03-12
申请人： Wolfgang Schmutz , Guenter Ernst , Udo Berg , Klaus-Peter Kaemper , Klaus Renner , Ulrich Rothmaier , Juergen Rudischhauser , Ralf Grimme , Dirk Schlenker , Achim Stock , Wolfgang Schaefer , Klaus Irion
发明人： Wolfgang Schmutz , Guenter Ernst , Udo Berg , Klaus-Peter Kaemper , Klaus Renner , Ulrich Rothmaier , Juergen Rudischhauser , Ralf Grimme , Dirk Schlenker , Achim Stock , Wolfgang Schaefer , Klaus Irion
IPC分类号： H05K13/00 , B65D73/00 , A47F7/00 , B65D1/36
CPC分类号： H05K13/0084 , Y10S206/818
摘要： A magazine for the fixation of small components such as those used in micro system technology and light engineering. The magazine includes a magazine base carrier with holders for the small components. The magazine has recipients to form the holders, each recipient being situated at defined and known locations and containing releasable fixing units, each of which is provided with securing structure for securing a small component.
摘要翻译： PCT No.PCT / DE96 / 01850 Sec。 371 1999年3月12日 102（e）1999年3月12日PCT PCT 1996年9月27日PCT公布。公开号WO97 / 11888 日期1997年4月3日“微系统技术和轻工程”等小部件的固定杂志。该杂志包括一个杂志基架，带有小部件的支架。杂志具有接收者以形成保持器，每个收件人位于限定和已知的位置并且包含可释放的固定单元，每个固定单元设置有用于固定小部件的固定结构。

2. 发明授权

US06494952B1 Device for applying a thin coat on the surface of a screen of a cathode-ray tube 失效
标题翻译：用于在阴极射线管的屏幕的表面上施加薄涂层的装置
公开(公告)号：US06494952B1
公开(公告)日：2002-12-17
申请号：US09529413
申请日：2000-08-01
申请人： Roland Mann , Wolfgang Schmutz , Josef Gentischer
发明人： Roland Mann , Wolfgang Schmutz , Josef Gentischer
IPC分类号： B05C1102
CPC分类号： B05C11/08
摘要： An apparatus for applying a thin film of a liquid coating medium onto a curved surface of an article includes a receptacle for the article, a rotatably drivable turntable on which the receptacle is held and a nonrotatable process pot surrounding the receptacle and the turntable. A spray ring surrounds the surface to be coated and is retained at the open end of the process pot. It defines a central inflow opening. Several annular gaps are defined and the receptacle is provided with a suction cone. A laminar flow is aimed at the spray ring at the top of the process pot and the bottom of the process pot is joined to a suction flow.
摘要翻译：用于将液体涂覆介质的薄膜施加到制品的弯曲表面上的装置包括用于制品的容器，可旋转地驱动的转盘，容器被保持在其上，以及围绕容器和转盘的不可转动的处理罐。喷雾环围绕待涂覆的表面并保持在处理罐的开口端。它定义了一个中央流入口。限定几个环形间隙，并且容器设置有吸力锥。层流的目标是在处理罐顶部的喷雾环，并且处理罐的底部连接到吸入流。

3. 发明授权

US5083364A System for manufacturing semiconductor substrates 失效
标题翻译：制造半导体基板的系统
公开(公告)号：US5083364A
公开(公告)日：1992-01-28
申请号：US466374
申请日：1990-03-20
申请人： Herbert Olbrich , Joseph Gentischer , Wolfgang Fruhauf , Johann Dorner , Gunther Breitschwerdt , Horst Kunze-Concewitz , Wolfgang Schmutz , Roland Mann
发明人： Herbert Olbrich , Joseph Gentischer , Wolfgang Fruhauf , Johann Dorner , Gunther Breitschwerdt , Horst Kunze-Concewitz , Wolfgang Schmutz , Roland Mann
IPC分类号： H01L21/677 , B65G49/07 , H01L21/00
CPC分类号： H01L21/67173 , H01L21/67196 , G05B2219/25005 , Y10T29/5136
摘要： A system for manufacturing substrates, in particular wafers, glass masks, and channels, having individual process stations for treating and/or processing the various substrates in a clean environment. A plurality of interchangeable and aligned process modules are provided which are connected and disconnected from a media bus in which inflow and outflow lines are situated. These lines serve to supply the process modules through the noted connection with chemicals, gases, liquids, data and energy as needed.
摘要翻译： PCT No.PCT / EP88 / 00936 Sec。 371 1990年3月20日第 102（e）1990年3月20日PCT PCT日期：1988年10月19日PCT公布。第WO89 / 04053号公报日本1989年5月5日。一种用于制造衬底，特别是晶片，玻璃掩模和通道的系统，具有用于在干净环境中处理和/或处理各种衬底的各个工艺站。提供了多个可互换和对准的处理模块，其与流入和流出管线所在的介质总线连接和断开。这些线路用于通过与化学品，气体，液体，数据和能量的注意连接来提供过程模块。

4. 发明授权

US07232284B1 Device for loading substrates into and unloading them from a clean room 有权
标题翻译：将基板装载到洁净室中并将其卸载的装置
公开(公告)号：US07232284B1
公开(公告)日：2007-06-19
申请号：US09600879
申请日：1999-02-11
申请人： Wolfgang Schmutz , Josef Gentischer
发明人： Wolfgang Schmutz , Josef Gentischer
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , Y10S414/139
摘要： The invention relates to a device for loading substrates into and unloading them from a clean room, comprising a lock device onto which a transport box for receiving the substrates can be placed and which is fitted with a hermetically sealing lock opening, and a process unit adjacent to the lock opening. To allow for a valid adjustment of the lock device in relation to the process unit even when the lock device is exchanged, the invention provides for an adapter device to be positioned between the process unit and the lock device to which the lock device can be removably fixed and which is maintained at the level of the process unit and can be adjustably aligned in relation to same.
摘要翻译：本发明涉及一种用于将基板装载到清洁室中并将其卸载的装置，包括锁定装置，用于接收基板的输送箱可以放置在该锁定装置上，并且装配有气密密封的开口，以及相邻的处理单元到锁开口。为了允许相对于处理单元相对于处理单元的锁定装置的有效调整，即使在更换锁定装置时，本发明提供了一种适配器装置，其位于处理单元和锁定装置之间，锁定装置可以可移除地固定并保持在处理单元的水平并且可以相对于可调节地对齐。

5. 发明授权

US07134825B1 Device for handling substrates inside and outside a clean room 有权
标题翻译：用于处理洁净室内外基材的装置
公开(公告)号：US07134825B1
公开(公告)日：2006-11-14
申请号：US10009218
申请日：2000-04-13
申请人： Wolfgang Schmutz , Joseph Gentischer
发明人： Wolfgang Schmutz , Joseph Gentischer
IPC分类号： B65G65/00
CPC分类号： H01L21/67769 , Y10S414/137 , Y10S414/14
摘要： A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room conditions can be removed from or placed in said box (13); and with a first handling device (51), by which means the substrates (11) can be placed in or removed from the cassette (12). According to the invention, a storage area (20) for a plurality of cassette boxes (13) is positioned on or above the clean room (15) and the locking transfer device (17) is provided between the storage area (20) and the clean room (15), so that various work and production steps can be combined in such a way as to save space.
摘要翻译：用于处理洁净室（15）内部和外部的基板（11）的装置（10）设置有锁定传送装置（17），通过该锁定传送装置（17），容纳在盒（13）中的基板盒（12）清洁室条件可以从所述盒子（13）中移除或放置在所述盒子（13）中。并且具有第一处理装置（51），通过该装置，可以将基板（11）放置在盒子（12）中或从盒子（12）移除。根据本发明，用于多个盒式盒（13）的存储区域（20）位于洁净室（15）上或上方，并且锁定传送装置（17）设置在存储区域（20）和洁净室（15），使各种工作和生产步骤结合起来，节省空间。

6. 发明授权

US4591140A Arrangement for separating and transporting uppermost sheets of a stack of sheets or sheet-like objects 失效
标题翻译：用于分离和传送片材或片状物体的堆叠的最上面的片材的布置
公开(公告)号：US4591140A
公开(公告)日：1986-05-27
申请号：US588131
申请日：1984-03-08
申请人： Egon Illig , Josef Gentischer , Wolfgang Schmutz
发明人： Egon Illig , Josef Gentischer , Wolfgang Schmutz
IPC分类号： B65H3/08 , B65H5/10
CPC分类号： B65H3/0891 , B65H3/0808 , B65H3/0816 , B65H3/0883
摘要： An arrangement for separating and transporting uppermost sheets of a stack of sheets or sheet-like objects has a movable suction mouthpiece in which negative pressure acting for adhering the sheet simultaneously controls the movement of the suction mouthpiece in a longitudinal direction in a guide, the movable suction mouthpiece is connected with a valveless pump which produces in a connecting conduit between the suction mouthpiece and the pump periodically alternating negative pressure and positive pressure phases, and the guide of the movable suction piece is arranged so that a movement direction provided by the guide is inclined relative to the direction of the force of gravity at such an angle that the resultant of a lifting movement of the sheet produced during the lower pressure phase of the movable suction mouthpiece and the falling movement produced during the positive pressure phase has a component acting in a desired transporting direction of the sheet.
摘要翻译：用于分离和输送一叠片材或片状物体的最上面的片材的装置具有可移动的吸嘴，其中用于粘附片材的负压同时控制吸嘴在纵向上在引导件中的移动，吸嘴与无阀泵连接，其在吸气嘴和泵之间的连接管道中周期性地交替负压和正压相，并且可移动吸件的引导件被布置成使得由引导件提供的移动方向为相对于重力方向倾斜的角度，使得在可移动吸嘴的较低压力阶段期间产生的片材的提升运动和在正压相位期间产生的下降运动产生的成分具有作用于片材的期望的输送方向。

7. 发明申请

US20080135186A1 Device for the Separation of Substrates from a Stack 有权
标题翻译：用于从基板分离基板的装置
公开(公告)号：US20080135186A1
公开(公告)日：2008-06-12
申请号：US11920509
申请日：2006-05-18
申请人： Felix Jaeger , Wolfgang Schmutz , Michael Kieninger
发明人： Felix Jaeger , Wolfgang Schmutz , Michael Kieninger
IPC分类号： B32B38/10
CPC分类号： B65G59/068 , B28D5/0082 , H01L21/67092 , H01L31/206 , Y02E10/50 , Y02P70/521 , Y10T156/19
摘要： A device for separation of damp silicon wafers from a wafer stack, whereby the damp wafers may be removed individually from the stack, transferred to a subsequent conveyor device and the damp thin fragile wafers held in the stack can be rapidly separated and isolated even in large format. The device comprises separation rollers on which the wafer stack may be placed. On rotation of the separation rollers, the lowest wafer is displaced under a doctor strip through a wafer-thin gap between the roller plane and doctor strip and withdrawn from the wafer stack by elastic pressure by a pair of superimposed delivery rollers driven at the same speed.
摘要翻译：用于将湿硅片与晶片堆叠分离的装置，由此可以将湿的晶片从堆叠单独地移出，转移到随后的传送装置，并且保持在堆叠中的潮湿的脆弱的薄片即使在大的情况下也可以快速地分离和隔离格式。该装置包括可以放置晶片叠层的分离辊。在分离辊旋转时，最下面的晶片在刮刀条下通过辊平面和刮板之间的晶片薄的间隙移动，并通过弹性压力从相同速度驱动的一对重叠输送辊退出。

8. 发明授权

US5452905A Spinning plate for substrates 失效
标题翻译：基板旋转板
公开(公告)号：US5452905A
公开(公告)日：1995-09-26
申请号：US975536
申请日：1994-02-07
申请人： Gudrun Bohmer , Josef Gentischer , Rolf Lehner , Dieter Modjesch , Wolfgang Schmutz
发明人： Gudrun Bohmer , Josef Gentischer , Rolf Lehner , Dieter Modjesch , Wolfgang Schmutz
IPC分类号： B05C11/08 , B25H1/14 , G03F7/16 , H01L21/027 , H01L21/304 , H01L21/683 , B23Q3/08 , B25B11/00
CPC分类号： H01L21/6838 , Y10T279/11
摘要： A spinning plate for substrates has on the surface of its spinning disk a continuous seal that is pressed from below against the edge of the substrate. The substrate can thus be retained by suction on the spinning disk. In order to center the substrate, a pressing element is moved under suction against the edge of the substrate and presses the same against centering stops of supporting blocks.
摘要翻译： PCT No.PCT / EP91 / 01405 371日期1994年2月7日 102（e）1994年2月7日PCT PCT 1991年7月26日PCT公布。出版物WO92 / 02949 日本1992年2月20日。用于基材的旋转板在其旋转盘的表面上具有连续的密封，其从下方抵靠基材的边缘压制。因此，可以通过在旋转盘上的吸力来保持基板。为了使基板居中，按压元件在吸力下移动到基板的边缘，并将其按压到支撑块的定心止挡件上。

9. 发明授权

US08047761B2 Device for the separation of substrates from a stack 有权
标题翻译：用于从堆叠中分离衬底的装置
公开(公告)号：US08047761B2
公开(公告)日：2011-11-01
申请号：US11920509
申请日：2006-05-18
申请人： Felix Jaeger , Wolfgang Schmutz , Michael Kieninger
发明人： Felix Jaeger , Wolfgang Schmutz , Michael Kieninger
IPC分类号： B65H3/06 , B65H5/22
CPC分类号： B65G59/068 , B28D5/0082 , H01L21/67092 , H01L31/206 , Y02E10/50 , Y02P70/521 , Y10T156/19
摘要： A device for separation of damp silicon wafers from a wafer stack, whereby the damp wafers may be removed individually from the stack, transferred to a subsequent conveyor device and the damp thin fragile wafers held in the stack can be rapidly separated and isolated even in large format. The device comprises separation rollers on which the wafer stack may be placed. On rotation of the separation rollers, the lowest wafer is displaced under a doctor strip through a wafer-thin gap between the roller plane and doctor strip and withdrawn from the wafer stack by elastic pressure by a pair of superimposed delivery rollers driven at the same speed.
摘要翻译：用于将湿硅片与晶片堆叠分离的装置，由此可以将湿的晶片从堆叠单独地移出，转移到随后的传送装置，并且保持在堆叠中的潮湿的脆弱的薄片即使在大的情况下也可以快速地分离和隔离格式。该装置包括可以放置晶片叠层的分离辊。在分离辊旋转时，最下面的晶片在刮刀条下通过辊平面和刮片之间的晶片薄的间隙移动，并通过弹性压力从相同速度驱动的一对重叠输送辊退出。

10. 发明授权

US5377476A Arrangement for storing, transporting and loading substrates 失效
标题翻译：储存，运输和装载基材的布置
公开(公告)号：US5377476A
公开(公告)日：1995-01-03
申请号：US969292
申请日：1993-03-19
申请人： Gudrun Bohmer , Josef Gentischer , Rolf Lehner , Dieter Modjesch , Wolfgang Schmutz
发明人： Gudrun Bohmer , Josef Gentischer , Rolf Lehner , Dieter Modjesch , Wolfgang Schmutz
IPC分类号： H01L21/673 , B65G49/00 , B65G49/07 , H01L21/677 , H01L21/68 , H01L21/00 , B65B31/00
CPC分类号： H01L21/68707 , H01L21/67353 , H01L21/67769 , Y10S414/137 , Y10S414/139
摘要： Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which are positively stackable. By means of a lifting means, the cassettes are positioned external to a loading slot of the clean room. A lateral sealing flap in the cassette is opened and the substrate is moved into the loading slot in a substrate drawer.
摘要翻译：用于在洁净室条件下储存和运输衬底并将衬底装载到洁净室中的布置。基板被独立地容纳在可堆叠的盒中。通过提升装置，盒被定位在洁净室的装载槽的外部。打开盒中的横向密封盖，并且将基板移动到基板抽屉中的装载槽中。

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