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    • 8. 发明申请
    • Method and device for coating substrates
    • 涂覆基材的方法和装置
    • US20050155556A1
    • 2005-07-21
    • US11028364
    • 2005-01-03
    • Burkhard DanielzikMarkus KuhrWolfgang Moehl
    • Burkhard DanielzikMarkus KuhrWolfgang Moehl
    • G02B1/10C23C16/511H01J37/32C23C16/00H05H1/24
    • H01J37/32192C23C16/511
    • The device for simultaneous multi-sided coating of a substrate, especially a lens, by microwave plasma chemical vapor deposition has a reaction chamber with microwave windows and microwave guides with microwave launch sites for guiding microwaves into the reaction chamber through the windows; dielectric tuning elements at the microwave launch sites to influence the microwave field distribution and at least one substrate holder arranged so that surfaces to be coated are oriented perpendicularly to plasma propagation directions. The respective shapes of the dielectric tuning elements are adapted to corresponding shapes of the surfaces, so that inhomogeneities in plasma distributions in the plasmas formed in the reaction chamber are corrected and coatings formed on the surfaces have a uniform thickness. Coated surfaces on opposite sides of a lens have a uniformity of ±1%.
    • 用于通过微波等离子体化学气相沉积同时多面涂覆基板,特别是透镜的装置具有带有微波窗口和微波导管的反应室,微波引导装置具有用于通过窗口将微波引导到反应室中的微波发射场; 在微波发射场所的介电调谐元件,以影响微波场分布;以及至少一个衬底保持器,其布置成使被涂覆的表面垂直于等离子体传播方向取向。 介质调谐元件的各个形状适合于表面的相应形状,从而校正反应室中形成的等离子体中的等离子体分布的不均匀性,并且在表面上形成的涂层具有均匀的厚度。 透镜两侧的涂层表面的均匀度为±1%。
    • 10. 发明授权
    • Method and device for coating substrates
    • 涂覆基材的方法和装置
    • US06916512B2
    • 2005-07-12
    • US10203770
    • 2001-03-01
    • Burkhard DanielzikMarkus KuhrWolfgang Moehl
    • Burkhard DanielzikMarkus KuhrWolfgang Moehl
    • G02B1/10C23C16/511H01J37/32H05H1/46C23C16/00
    • H01J37/32192C23C16/511
    • The method for coating plural surfaces on multiple sides of a substrate, especially a lens, includes launching microwave outputs into a microwave reactor at respective microwave launch sites; selecting respective microwave outputs to be greater than or equal to thresholds at which corresponding plasmas having a reduced permeability to microwave radiation arise in the microwave reactor; setting distances between the plural surfaces and microwave launch sites greater than microwave penetrations depths in the plasmas; placing respective dielectric tuning elements in microwave fields formed from the microwave outputs at the launch sites; and adapting the shapes of the dielectric tuning elements to the plural surfaces to be coated, so that plasma inhomogeneities are corrected and coatings with a uniformity of ±1% are formed on the plural surfaces.
    • 用于在基板,特别是透镜的多个面上涂覆多个表面的方法包括在各个微波发射场处将微波输出发射到微波反应器中; 选择相应的微波输出大于或等于在微波反应器中产生具有降低的微波辐射渗透性的相应等离子体的阈值; 设置多个表面和微波发射位置之间的距离大于微波穿透等离子体的深度; 将各个介电调谐元件放置在由发射位置的微波输出形成的微波场中; 并且使介质调谐元件的形状适应于待涂覆的多个表面,从而校正等离子体不均匀性,并且在多个表面上形成均匀度为±1%的涂层。