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1. 发明授权

US06472658B2 Photoelectric position measuring system that optimizes modulation of a scanning device and the intensity of a reference mark signal 失效
标题翻译：光电位置测量系统优化扫描装置的调制和参考标记信号的强度
公开(公告)号：US06472658B2
公开(公告)日：2002-10-29
申请号：US09832358
申请日：2001-04-09
申请人： Elmar Mayer , Wolfgang Holzapfel , Andreas Franz
发明人： Elmar Mayer , Wolfgang Holzapfel , Andreas Franz
IPC分类号： H01J314
CPC分类号： G01D5/2457 , G01D5/366 , G01D5/38
摘要： An incremental position measuring system in the form of a three-grating sensor is optimized in such a way, that the degree of modulation (M) of the incremental scanning device, as well as the intensity (I) of a reference marker signal are relatively strong. To this end, a phase grating with an effective phase deviation of &lgr;/4 is embodied on a scale 2, as well as a reference marker (R) in the form of an amplitude structure. A compact structure is achieved by the divergent illumination of the grating located in front of the scale.
摘要翻译：以三光栅传感器形式的增量位置测量系统以这样的方式被优化：增量扫描装置的调制度（M）以及参考标记信号的强度（I）是相对的强大。为此，具有有效相位偏移lambd / 4的相位光栅被体现在刻度2上，以及以振幅结构形式的参考标记（R）。通过位于刻度前方的光栅的发散照明来实现紧凑的结构。

2. 发明授权

US5583798A Position measuring method and apparatus for generating periodic signals free of harmonics 失效
标题翻译：用于产生无谐波的周期信号的位置测量方法和装置
公开(公告)号：US5583798A
公开(公告)日：1996-12-10
申请号：US286702
申请日：1994-08-05
申请人： Andreas Franz , Wolfgang Holzapfel
发明人： Andreas Franz , Wolfgang Holzapfel
IPC分类号： G01D5/36 , H03M1/06 , H03M1/30 , G01B11/14
CPC分类号： G01D5/36 , H03M1/0614 , H03M1/301
摘要： A position measuring method and apparatus for obtaining signals substantially free of harmonics with the aid of a periodic graduation and a non-periodic or aperiodic scanning graduation, wherein the position of the grating lines n within the scanning graduation is determined in accordance with a statistical distribution.
摘要翻译：一种位置测量方法和装置，用于借助于周期性刻度和非周期性或非周期性扫描刻度获得基本上没有谐波的信号，其中根据统计分布来确定扫描刻度内的光栅线n的位置。

3. 发明授权

US5576537A Photoelectric position measuring system using gratings having specified dimensions to suppress harmonics 失效
标题翻译：光电位置测量系统使用具有规定尺寸的光栅来抑制谐波
公开(公告)号：US5576537A
公开(公告)日：1996-11-19
申请号：US271641
申请日：1994-07-07
申请人： Wolfgang Holzapfel , Andreas Franz
发明人： Wolfgang Holzapfel , Andreas Franz
IPC分类号： G01D5/36 , G01B11/02 , G01B11/26 , G01D5/38 , H01L27/144 , H01L27/15 , H01L31/173 , H01J3/14 , H01J40/14
CPC分类号： G01D5/38 , H01L27/1446 , H01L27/153 , H01L31/173
摘要： A light source which emits light in strips is provided for illuminating a scale of a photoelectric position measuring system. The light modulated by the scale is converted into a sinusoidal scanning signal by a scanning plate. The scanning plate is a semiconductor substrate structured in strips. The width (A) of the light-emitting areas and the width (B) of the interspersed non-emitting areas of the light source is such that defined harmonics are filtered out of the scanning signal. The scanning plate is of such configuration that further harmonics are suppressed.
摘要翻译：提供发光条的光源，用于照亮光电位置测量系统的刻度。由刻度调制的光被扫描板转换成正弦扫描信号。扫描板是以条状构成的半导体基板。发光区域的宽度（A）和光源的散布的非发光区域的宽度（B）使得定义的谐波从扫描信号中滤出。扫描板具有抑制进一步谐波的结构。

4. 外观设计

USD734636S1 Kitchen utensil 有权
公开(公告)号：USD734636S1
公开(公告)日：2015-07-21
申请号：US29466981
申请日：2013-09-13
申请人： Michael Tinius , Roland Hegmann , Wolfgang Holzapfel
设计人： Michael Tinius , Roland Hegmann , Wolfgang Holzapfel

5. 发明授权

US08822907B2 Optical position-measuring device having two crossed scales 有权
标题翻译：具有两个十字刻度的光学位置测量装置
公开(公告)号：US08822907B2
公开(公告)日：2014-09-02
申请号：US13288007
申请日：2011-11-02
申请人： Ralph Joerger , Michael Hermann , Wolfgang Holzapfel , Walter Huber
发明人： Ralph Joerger , Michael Hermann , Wolfgang Holzapfel , Walter Huber
IPC分类号： G01D5/34 , G01B11/24 , G01D5/38
CPC分类号： G01D5/38 , G01B11/2441
摘要： An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.
摘要翻译：光学位置测量装置包括沿第一或第二方向延伸的扫描杆和沿另一个方向延伸的刻度。在与第一和第二方向垂直的第三方向上，刻度尺距离扫描杆的扫描距离偏移。该装置具有光源，其光在扫描条和刻度的交点处穿过扫描条，落在刻度上并返回扫描条。在检测器处，通过衍射将光分解成不同的部分光束，在扫描条和刻度的光学有效结构上再次组合。在检测器中响应于由于组合的部分光束的干扰而在第一方向上的扫描条和标尺之间的偏移以及扫描条和标尺之间的扫描距离的变化而在检测器中获得周期性信号。

6. 发明授权

US08650769B2 Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate 有权
标题翻译：包括附接到基板的测量刻度的组件和用于将测量刻度保持在基板上的方法
公开(公告)号：US08650769B2
公开(公告)日：2014-02-18
申请号：US13260891
申请日：2010-02-23
申请人： Peter Speckbacher , Josef Weidmann , Wolfgang Holzapfel
发明人： Peter Speckbacher , Josef Weidmann , Wolfgang Holzapfel
IPC分类号： G01D5/347 , G01D5/26 , G01B11/02
CPC分类号： G01D5/34707
摘要： An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.
摘要翻译：包括保持在基板上的基板和刻度的组件，其中刻度尺具有测量刻度，并且通过气动抽吸将刻度保持在基板上。尺寸通过二维分布的间隔开的支撑件支撑在基板上，该支撑件面向由测量刻度限定的测量区域，并且其中相邻支撑件之间的相邻周期间隔较小比秤的厚度。此外，支撑体具有这样的结构，使得至少在测量区域中防止了通过支撑件和标尺之间和/或支撑件和基板之间的光学接触接合的连接。标尺和基板之间的空间通过密封结构与周围环境密封。

7. 发明申请

US20120099118A1 Optical Position-Measuring Device 有权
标题翻译：光学位置测量装置
公开(公告)号：US20120099118A1
公开(公告)日：2012-04-26
申请号：US13236250
申请日：2011-09-19
申请人： Wolfgang Holzapfel , Florian Flossmann
发明人： Wolfgang Holzapfel , Florian Flossmann
IPC分类号： G01B11/14
CPC分类号： G01S17/42 , G01S7/4812 , G01S7/4817 , G01S17/08 , G01S17/66
摘要： An optical position-measuring device includes a light source, a measuring reflector movable in space, a detection unit and a light-beam deflection unit that can align at least one beam of rays, emitted by the light source, in the direction of the measuring reflector. The light-beam deflection unit includes a cardan system having two cardan frames. A first cardan frame is adjustable by motor about a first axis of rotation, and a second cardan frame within the first cardan frame is adjustable by motor about a second axis of rotation oriented in a direction perpendicular to the first axis of rotation. The two axes of rotation intersect in a fixed reference point, at which a reference reflector is disposed. A plurality of mirrors are disposed rigidly on the cardan frames, so that the beam of rays can be pivoted about the fixed reference point via the mirrors during alignment.
摘要翻译：一种光学位置测量装置，包括光源，可在空间中移动的测量反射器，检测单元和光束偏转单元，其可以将由光源发射的至少一束光线沿测量方向对准反射器。光束偏转单元包括具有两个万向节框架的万向节系统。第一万向节框架可通过马达围绕第一旋转轴线进行调节，并且第一万向节框架内的第二万向节框架可通过马达围绕绕垂直于第一旋转轴线的方向定向的第二旋转轴线进行调节。两个旋转轴在固定的参考点相交，在该参考点处设置参考反射器。多个反射镜刚性地布置在万向节框架上，使得光束可以在对准期间经由反射镜围绕固定的参考点枢转。

8. 发明授权

US07516561B2 Optical position measuring arrangement 有权
标题翻译：光学位置测量装置
公开(公告)号：US07516561B2
公开(公告)日：2009-04-14
申请号：US11800908
申请日：2007-05-08
申请人： Wolfgang Holzapfel
发明人： Wolfgang Holzapfel
IPC分类号： G01D5/347 , G01B11/14
CPC分类号： G01D5/36 , G01D5/38
摘要： An optical position measuring arrangement for detecting the position of a first object and a second object which are movable in relation to each other in a measuring direction. The optical position measuring arrangement including a scale which is connected with the first object, the scale including an incremental graduation extending in the measuring direction and having the graduation period (TPINC). The optical position measuring arrangement including a reference marking at a reference position, wherein the reference marking includes a structure with a graduation period (TPREF), which changes locally, wherein the reference marking has a mean graduation period (TPREF,m) within a range of the graduation period (TPINC) of the incremental graduation. A scanning unit connected with the second object and including a scanning system for generating a reference signal at the reference position.
摘要翻译：一种光学位置测量装置，用于检测在测量方向上可相对于彼此移动的第一物体和第二物体的位置。所述光学位置测量装置包括与所述第一物体连接的刻度，所述刻度尺包括在所述测量方向上延伸并具有所述刻度周期（TPINC）的渐增刻度。所述光学位置测量装置包括在参考位置处的参考标记，其中所述参考标记包括具有局部变化的刻度周期（TPREF）的结构，其中所述参考标记具有范围内的平均刻度周期（TPREF，m）的毕业时期（TPINC）的渐进式毕业。与第二物体连接并包括用于在参考位置产生参考信号的扫描系统的扫描单元。

9. 发明申请

US20080067333A1 POSITION-MEASURING DEVICE 有权
标题翻译：位置测量装置
公开(公告)号：US20080067333A1
公开(公告)日：2008-03-20
申请号：US11942413
申请日：2007-11-19
申请人： Wolfgang Holzapfel , Michael Hermann , Karsten Saendig
发明人： Wolfgang Holzapfel , Michael Hermann , Karsten Saendig
IPC分类号： H01J40/14
CPC分类号： G01D5/2457 , G01D5/34784 , G01D5/38
摘要： A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field. Alternatively, the measuring graduation includes two reference-marking tracks extending in parallel in the measuring graduation and having reference markings at least one reference position, which are formed in symmetry with an axis in the measuring direction. Situated between the reference-marking tracks is an incremental-graduation track. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the reference-pulse signal and the incremental signals, a scanning beam acts upon the reference markings at least once in a reference-pulse signal scanning field, and a scanning beam acts upon the incremental graduation at least once in two incremental-signal scanning fields.
摘要翻译：位置测量装置包括扫描单元和在至少一个测量方向上可移动到其的测量刻度。测量刻度包括在测量方向上平行延伸的两个增量刻度轨迹，在该基准标记轨道上具有在参考位置处具有至少一个参考标记的参考标记轨迹延伸。扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。为了生成增量信号，扫描光束在增量信号扫描场中的每个增量刻度上至少起作用一次。或者，测量刻度包括在测量刻度中平行延伸的两个参考标记轨迹，并且具有与测量方向上的轴对称形成的至少一个参考位置的参考标记。位于参考标记轨道之间的是增量式毕业曲目。扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。为了生成参考脉冲信号和增量信号，扫描光束在参考脉冲信号扫描场中至少起作用于参考标记，扫描光束在两次增量信号扫描中至少起作用于增量刻度领域。

10. 发明授权

US07268883B2 Optoelectronic harmonically filtered detector system for a scanning unit 有权
标题翻译：用于扫描单元的光电谐波滤波检测系统
公开(公告)号：US07268883B2
公开(公告)日：2007-09-11
申请号：US10838619
申请日：2004-05-03
申请人： Wolfgang Holzapfel
发明人： Wolfgang Holzapfel
IPC分类号： G01B9/02
CPC分类号： G01D5/38 , G01D5/34715 , G01D5/366
摘要： An optoelectronic detector system is for generating a plurality of periodic, phase-shifted scanning signals from the scanning of a periodic fringe pattern. The fringe pattern extends in a detection plane with fringe-pattern period P in a fringe-displacement direction. The detector system is made up of a plurality of detector elements, the geometrical shape of the detector elements being selected such that a defined filtering of unwanted harmonics from the scanning signals thereby results. Within one fringe-pattern period P, a total of N detector elements of the same geometrical shape are arranged one immediately after the other in measuring direction x.
摘要翻译：光电检测器系统用于从周期性条纹图案的扫描产生多个周期性的相移扫描信号。条纹图案在边缘位移方向上的条纹图案周期P的检测平面中延伸。检测器系统由多个检测器元件组成，检测器元件的几何形状被选择为使得从扫描信号定义的不期望的谐波滤波得到。在一个条纹图案周期P内，相同几何形状的总共N个检测元件在测量方向x上紧接着排列。

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