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1. 发明申请

US20050254804A1 Semiconductor thermal process control 失效
标题翻译：半导体热过程控制
公开(公告)号：US20050254804A1
公开(公告)日：2005-11-17
申请号：US11103968
申请日：2005-04-11
申请人： Wolfgang Aderhold , Balasubramanian Ramachandran , Leonid Tertitski , Patrick Stone
发明人： Wolfgang Aderhold , Balasubramanian Ramachandran , Leonid Tertitski , Patrick Stone
IPC分类号： H01L21/00 , F26B3/30
CPC分类号： H01L21/67248 , H01L21/67115
摘要： During fabrication, a rotating semiconductor substrate is radiated in accordance with a thermal recipe. Temperature measurements of the semiconductor substrate are obtained along with the position of the semiconductor substrate at the time of each temperature measurement. It is then determined for the position of the semiconductor substrate whether at least one particular temperature measurement of the temperature measurements should be filtered. If so, at least one filtered temperature measurement is obtained. The radiation of the semiconductor substrate is subsequently controlled based on the temperature measurements, the at least one filtered temperature measurement, and the thermal recipe.
摘要翻译：在制造期间，根据热配方照射旋转的半导体衬底。半导体衬底的温度测量结果与每个温度测量时的半导体衬底的位置一起获得。然后确定半导体衬底的位置是否应过滤温度测量的至少一个特定温度测量。如果是这样，则获得至少一个过滤的温度测量值。随后基于温度测量，至少一个过滤温度测量和热配方控制半导体衬底的辐射。

2. 发明申请

US20070108166A1 THERMAL FLUX PROCESSING BY SCANNING A FOCUSED LINE BEAM 有权
标题翻译：通过扫描聚焦线束的热通量处理
公开(公告)号：US20070108166A1
公开(公告)日：2007-05-17
申请号：US11561784
申请日：2006-11-20
申请人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
发明人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
IPC分类号： B23K26/08
CPC分类号： H01L21/02683 , B23K26/032 , B23K26/034 , B23K26/04 , B23K26/0608 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/0738 , B23K26/082 , B23K26/083 , B23K26/0838 , B23K26/0869 , B23K26/123 , B23K26/125 , B23K26/142 , B23K26/32 , B23K26/34 , B23K26/705 , B23K2101/34 , B23K2101/40 , B23K2103/08 , B23K2103/50 , C23C8/00 , C23C8/10 , C23C8/22 , C23C16/047 , C23C16/481 , G02B27/0955 , H01L21/00 , H01L21/2026 , H01L21/67115
摘要： The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
摘要翻译：热处理装置包括平台，连续波电磁辐射源，一系列透镜，平移机构，检测模块，三维自动对焦以及计算机系统。该台被配置为在其上接收基板。连续波电磁辐射源被设置在与该台相邻的位置，并且被配置成沿着朝向衬底的路径发射连续波电磁辐射。该系列透镜设置在连续波电磁辐射源和台之间，并被配置为将连续波电磁辐射冷凝成基片表面上的连续波电磁辐射线。翻译机构被配置为相对于彼此平移连续波电磁辐射的阶段和线。检测模块位于路径内，被配置为检测连续波电磁辐射。

3. 发明申请

US20050218124A1 Thermal flux processing by scanning a focused line beam 有权
标题翻译：通过扫描聚焦线束进行热通量处理
公开(公告)号：US20050218124A1
公开(公告)日：2005-10-06
申请号：US11079785
申请日：2005-03-14
申请人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
发明人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
IPC分类号： B23K26/03 , B23K26/073 , B23K26/42 , C23C8/00 , C23C8/10 , C23C8/22 , C23C16/04 , C23C16/48 , H01L21/20 , B23K26/06
CPC分类号： H01L21/02683 , B23K26/032 , B23K26/034 , B23K26/04 , B23K26/0608 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/0738 , B23K26/082 , B23K26/083 , B23K26/0838 , B23K26/0869 , B23K26/123 , B23K26/125 , B23K26/142 , B23K26/32 , B23K26/34 , B23K26/705 , B23K2101/34 , B23K2101/40 , B23K2103/08 , B23K2103/50 , C23C8/00 , C23C8/10 , C23C8/22 , C23C16/047 , C23C16/481 , G02B27/0955 , H01L21/00 , H01L21/2026 , H01L21/67115
摘要： The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
摘要翻译：热处理装置包括平台，连续波电磁辐射源，一系列透镜，平移机构，检测模块，三维自动对焦以及计算机系统。该台被配置为在其上接收基板。连续波电磁辐射源被设置在与该台相邻的位置，并且被配置成沿着朝向衬底的路径发射连续波电磁辐射。该系列透镜设置在连续波电磁辐射源和台之间，并被配置为将连续波电磁辐射冷凝成基片表面上的连续波电磁辐射线。翻译机构被配置为相对于彼此平移连续波电磁辐射的阶段和线。检测模块位于路径内，被配置为检测连续波电磁辐射。

4. 发明申请

US20080041831A1 THERMAL FLUX PROCESSING BY SCANNING A FOCUSED LINE BEAM 有权
标题翻译：通过扫描聚焦线束的热通量处理
公开(公告)号：US20080041831A1
公开(公告)日：2008-02-21
申请号：US11924298
申请日：2007-10-25
申请人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
发明人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
IPC分类号： B23K26/06
CPC分类号： H01L21/02683 , B23K26/032 , B23K26/034 , B23K26/04 , B23K26/0608 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/0738 , B23K26/082 , B23K26/083 , B23K26/0838 , B23K26/0869 , B23K26/123 , B23K26/125 , B23K26/142 , B23K26/32 , B23K26/34 , B23K26/705 , B23K2101/34 , B23K2101/40 , B23K2103/08 , B23K2103/50 , C23C8/00 , C23C8/10 , C23C8/22 , C23C16/047 , C23C16/481 , G02B27/0955 , H01L21/00 , H01L21/2026 , H01L21/67115
摘要： The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
摘要翻译：热处理装置包括平台，连续波电磁辐射源，一系列透镜，平移机构，检测模块，三维自动对焦以及计算机系统。该台被配置为在其上接收基板。连续波电磁辐射源被设置在与该台相邻的位置，并且被配置成沿着朝向衬底的路径发射连续波电磁辐射。该系列透镜设置在连续波电磁辐射源和台之间，并被配置为将连续波电磁辐射冷凝成基片表面上的连续波电磁辐射线。翻译机构被配置为相对于彼此平移连续波电磁辐射的阶段和线。检测模块位于路径内，被配置为检测连续波电磁辐射。

5. 发明申请

US20050125787A1 Convertible runtime graphical user interface 审中-公开
标题翻译：可转换运行时图形用户界面
公开(公告)号：US20050125787A1
公开(公告)日：2005-06-09
申请号：US10707343
申请日：2003-12-05
申请人： Leonid Tertitski , Andrei Ivanov
发明人： Leonid Tertitski , Andrei Ivanov
IPC分类号： G06F3/048 , G06F9/44 , G06T15/00 , G06T15/10 , G09G5/00
CPC分类号： G06F3/0481 , G06F9/451
摘要： Method to change Graphical User Interface that support runtime modification of the application's GUI without access to the application source code and/or needs no recompilation/restart of the application executable. This method allows the end-user to make runtime modifications of a widget's attributes and/or runtime conversion of widgets into different types of widgets
摘要翻译：改变支持运行时修改应用程序GUI的图形用户界面的方法，无需访问应用程序源代码和/或不需要重新编译/重新启动应用程序可执行文件。该方法允许最终用户将小部件的属性和/或小部件的运行时转换的运行时修改更改为不同类型的小部件

6. 发明申请

US20070114214A1 Scanning laser light source 审中-公开
标题翻译：扫描激光光源
公开(公告)号：US20070114214A1
公开(公告)日：2007-05-24
申请号：US11522179
申请日：2006-09-15
申请人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
发明人： Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
IPC分类号： B23K26/04
CPC分类号： H01L21/02683 , B23K26/032 , B23K26/034 , B23K26/04 , B23K26/0608 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/0738 , B23K26/082 , B23K26/083 , B23K26/0838 , B23K26/0869 , B23K26/123 , B23K26/125 , B23K26/142 , B23K26/32 , B23K26/34 , B23K26/705 , B23K2101/34 , B23K2101/40 , B23K2103/08 , B23K2103/50 , C23C8/00 , C23C8/10 , C23C8/22 , C23C16/047 , C23C16/481 , G02B27/0955 , H01L21/00 , H01L21/2026 , H01L21/67115
摘要： The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
摘要翻译：热处理装置包括平台，连续波电磁辐射源，一系列透镜，平移机构，检测模块，三维自动对焦以及计算机系统。该台被配置为在其上接收基板。连续波电磁辐射源被设置在与该台相邻的位置，并且被配置成沿着朝向衬底的路径发射连续波电磁辐射。该系列透镜设置在连续波电磁辐射源和台之间，并被配置为将连续波电磁辐射冷凝成基片表面上的连续波电磁辐射线。翻译机构被配置为相对于彼此平移连续波电磁辐射的阶段和线。检测模块位于路径内，被配置为检测连续波电磁辐射。

7. 发明授权

US06532866B2 Method and apparatus for orienting substrates 失效
公开(公告)号：US06532866B2
公开(公告)日：2003-03-18
申请号：US10117885
申请日：2002-04-08
申请人： Ilya Perlov , Eugene Gantvarg , Leonid Tertitski
发明人： Ilya Perlov , Eugene Gantvarg , Leonid Tertitski
IPC分类号： B30B1506
CPC分类号： H01L21/681 , Y10S414/136 , Y10S414/138
摘要： A multiple substrate orienter is provided that includes a rotatable substrate handler having a plurality of substrate support portions, each adapted to support a substrate. The multiple substrate orienter also includes a plurality of stacked substrate supports, each adapted to support a substrate. A plurality of substrate orientation marking (SOM) detectors are provided, and each SOM detector is coupled to a different one of the substrate supports and is adapted to identify a presence of an SOM of a substrate positioned close enough to the SOM detector to allow SOM detection by the SOM detector. The multiple substrate orienter further includes a plurality of lift and lower mechanisms, each lift and lower mechanism coupled to a different one of the substrate supports and adapted to individually lift and lower the substrate support to which the lift and lower mechanism is coupled. Numerous other aspects are provided.

8. 发明授权

US06393337B1 Method and apparatus for orienting substrates 失效
标题翻译：用于定向基板的方法和装置
公开(公告)号：US06393337B1
公开(公告)日：2002-05-21
申请号：US09482362
申请日：2000-01-13
申请人： Ilya Perlov , Eugene Gantvarg , Leonid Tertitski
发明人： Ilya Perlov , Eugene Gantvarg , Leonid Tertitski
IPC分类号： G06F700
CPC分类号： H01L21/681 , Y10S414/136 , Y10S414/138
摘要： A multiple substrate orienter is provided that includes a rotatable substrate handler having a plurality of substrate support portions, each adapted to support a substrate. The multiple substrate orienter also includes a plurality of stacked substrate supports, each adapted to support a substrate. A plurality of substrate orientation marking (SOM) detectors are provided, and each SOM detector is coupled to a different one of the substrate supports and is adapted to identify a presence of an SOM of a substrate positioned close enough to the SOM detector to allow SOM detection by the SOM detector. The multiple substrate orienter further includes a plurality of lift and lower mechanisms, each lift and lower mechanism coupled to a different one of the substrate supports and adapted to individually lift and lower the substrate support to which the lift and lower mechanism is coupled. Alternatively, each lift and lower mechanism may be coupled to a different one of the substrate support portions of the rotatable substrate handler and adapted to individually lift and lower the substrate support portion to which the lift and lower mechanism is coupled. Preferably the multiple substrate orienter includes a controller having program code adapted to simultaneously rough orient a plurality of substrates loaded onto the substrate support portions of the substrate handler, and to individually fine orient each rough oriented substrate. In further aspects of the invention, a substrate orienter capable of orienting one or more substrates is provided, as are methods for orienting substrates as described above.
摘要翻译：提供了多个基板取向器，其包括具有多个基板支撑部分的可旋转基板处理器，每个基板支撑部分适于支撑基板。多个基板取向器还包括多个层叠的基板支撑件，每个基板支撑件适于支撑基板。提供了多个基板取向标记（SOM）检测器，并且每个SOM检测器耦合到不同的一个基板支撑件，并且适于识别位于距离SOM检测器足够近的基板的SOM的存在以允许SOM 通过SOM检测器检测。多个基板取向器还包括多个提升和下部机构，每个提升和下部机构联接到不同的一个基板支撑件，并且适于单独升高和降低升降机构和下部机构所联接的基板支撑件。或者，每个提升和下部机构可以联接到可旋转基板处理器的不同的一个基板支撑部分，并且适于单独升高和降低升降机构和下部机构所联接的基板支撑部分。优选地，多个基板取向器包括具有程序代码的控制器，该程序代码适用于同时粗略地定向加载到基板处理器的基板支撑部分上的多个基板，并且单独精细地定向每个粗略取向的基板。在本发明的另一方面，提供了能够定向一个或多个基板的基板定向器，如上所述的用于定向基板的方法。

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