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1. 发明申请

US20070133859A1 METHODS AND SYSTEMS FOR READING MAGNETIC INK CHARACTER RECOGNITION INFORMATION 审中-公开
标题翻译：读取磁性墨水识别信息的方法和系统
公开(公告)号：US20070133859A1
公开(公告)日：2007-06-14
申请号：US11553192
申请日：2006-10-26
申请人： Robert Babanats , William Weaver
发明人： Robert Babanats , William Weaver
IPC分类号： G06K9/00
CPC分类号： G06K9/186
摘要： A system for recognizing magnetic ink characters includes at least one write head configured and arranged to scan over the magnetic ink characters while generating a modulated magnetic field to produce a magnetic response in the magnetic ink characters. The modulation of the magnetic field produces spatial modulation in the magnetic response. The system also includes at least one read head configured and arranged to scan over the magnetic ink characters after the write head and to detect the magnetic response. The system further includes a recognition module to receive the magnetic response from the read head(s) and recognize the magnetic ink characters thereby.
摘要翻译：用于识别磁性墨水字符的系统包括至少一个写入头，其被构造和布置成扫描磁性墨水字符，同时产生调制的磁场以产生磁性墨水字符中的磁响应。磁场的调制在磁响应中产生空间调制。该系统还包括至少一个读头，其配置和布置成扫描写头之后的磁墨字符并检测磁响应。该系统还包括识别模块，用于从读取头接收磁响应，并识别磁墨字符。

2. 发明申请

US20080061493A1 Document Feeder Using Gas Flow For Document Separation and Methods of Using and Manufacturing 审中-公开
标题翻译：使用气体进行文件分离的文件进纸器以及使用和制造方法
公开(公告)号：US20080061493A1
公开(公告)日：2008-03-13
申请号：US11530847
申请日：2006-09-11
申请人： William Weaver , Robert Babanats
发明人： William Weaver , Robert Babanats
IPC分类号： B65H3/12
CPC分类号： B65H3/128 , B65H3/48 , B65H2406/122
摘要： A document feeder includes a feed belt, a vacuum system, a drive system, and a separator arrangement. The feed belt defines multiple openings through the feed belt and the vacuum system provides a vacuum through the openings of the feed belt to draw a top document into contact with the feed belt. The separator arrangement provides a gas flow directed toward at least a first edge region of the top document to separate at least the first edge region of the top document from one or more documents immediately below the top document. Preferably, the separator arrangement utilizes the Coanda effect to separate the top document. The drive system rotates the feed belt.
摘要翻译：文件馈送器包括馈送带，真空系统，驱动系统和分离器装置。进料带限定通过进料带的多个开口，真空系统通过进料带的开口提供真空，以使顶部原稿与进料带接触。分离器装置提供指向顶部文件的至少第一边缘区域的气流，以将顶部文档的至少第一边缘区域与紧邻顶部文档正下方的一个或多个文档分开。优选地，分离器装置利用柯恩达效应来分离顶部文件。驱动系统使进给带旋转。

3. 发明申请

US20100062589A1 IMPLANTING A SOLAR CELL SUBSTRATE USING A MASK 失效
标题翻译：使用掩模贴合太阳能电池基板
公开(公告)号：US20100062589A1
公开(公告)日：2010-03-11
申请号：US12555005
申请日：2009-09-08
申请人： Steven Anella , William Weaver
发明人： Steven Anella , William Weaver
IPC分类号： H01L21/266 , G21F3/00
CPC分类号： H01J37/3171 , G03F1/20 , H01J2237/31711 , H01L21/266 , H01L31/022441 , H01L31/028 , H01L31/068 , Y02E10/547
摘要： Various masks for use with ion implantation equipment are disclosed. In one embodiment, the masks are formed by assembling a collection of segments and spacers to create a mask having the desired configuration. This collection of parts is held together with a carrier of frame. In another embodiment, a panel is formed by machining open-ended slots into a substrate, so as to form a comb-shaped device. Two such panels may be connected together to form a mask. In other embodiments, the panels may be used sequentially in an ion implantation process to create interdigitated back contacts. In another embodiment, multiple masks are overlaid so as to create implant patterns that cannot be created effectively using a single mask.
摘要翻译：公开了用于离子注入设备的各种掩模。在一个实施例中，通过组合段和间隔物的集合来形成掩模以产生具有所需构造的掩模。这些零件的集合与框架的承载架一起保持。在另一个实施例中，通过将开口槽加工成衬底形成面板，以便形成梳状装置。两个这样的面板可以连接在一起以形成掩模。在其他实施例中，可以在离子注入工艺中依次使用面板以产生交叉指向的后接触。在另一个实施例中，覆盖多个掩模以便产生不能使用单个掩模有效地产生的植入图案。

4. 发明申请

US20060104749A1 Datum plate for use in installations of substrate handling systems 有权
标题翻译：用于基板处理系统安装的基板
公开(公告)号：US20060104749A1
公开(公告)日：2006-05-18
申请号：US11280028
申请日：2005-11-16
申请人： William Weaver
发明人： William Weaver
IPC分类号： H01L21/677
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67772 , H01L21/67775
摘要： A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a set of predetermined attachment locations adapted to couple one or more automatic door opener platforms to the datum plate; and a set of predetermined attachment locations adapted to couple one or more substrate handlers contained within the chamber, to the datum plate. The attachment locations are positioned such that when the datum plate is coupled to the chamber, and the automatic door opener platform and the substrate handler are coupled to the datum plate, the substrate handler and automatic door opener platform are aligned for substrate transfer therebetween. Numerous other aspects are provided.
摘要翻译：提供了用于基板处理系统的安装的基准板。基准板具有适于将基准板连接到腔室的一组预定的附接位置; 一组预定的附接位置，其适于将一个或多个自动开门器平台联接到基准板上; 以及一组预定的附接位置，其适于将容纳在腔室内的一个或多个衬底处理器连接到基准板。附接位置定位成使得当基准板联接到室时，并且自动开门器平台和基板处理器联接到基准板时，衬底处理器和自动开门器平台被对准以用于其间的衬底传送。提供了许多其他方面。

5. 发明申请

US20130209198A1 TECHNIQUES FOR HANDLING MEDIA ARRAYS 有权
标题翻译：处理媒体阵列的技术
公开(公告)号：US20130209198A1
公开(公告)日：2013-08-15
申请号：US13397441
申请日：2012-02-15
申请人： Paul Forderhase , Julian Blake , William Weaver
发明人： Paul Forderhase , Julian Blake , William Weaver
IPC分类号： H01L21/683 , F16M13/00 , F28F7/00 , C23C16/48 , B05C13/00 , B44C1/22 , H01L21/68 , A47B81/00
CPC分类号： H01L21/67046 , H01L21/67333 , H01L21/67706 , H01L21/67712 , H01L21/67748 , H01L21/67754 , H01L21/67781
摘要： Techniques for handling media arrays are disclosed. The techniques may be realized as a system for handling a plurality of substrates. The system may comprise a plurality of row elements for supporting the plurality of substrates, wherein the plurality of row elements may be operable to change configuration of the substrates from open configuration to a high-density configuration, where a distance between adjacent substrates in the open configuration may be greater than a distance between the adjacent substrates in the high-density configuration.
摘要翻译：公开了处理介质阵列的技术。这些技术可以被实现为用于处理多个基板的系统。所述系统可以包括用于支撑多个基板的多个行元件，其中所述多个行元件可操作以将所述基板的构型从开放构型改变为高密度配置，其中所述相邻基板之间的距离为开放配置可以大于高密度配置中的相邻基板之间的距离。

6. 发明授权

US08418861B1 Television wall-mount with integrated shelving 失效
标题翻译：电视壁挂式集成货架
公开(公告)号：US08418861B1
公开(公告)日：2013-04-16
申请号：US12886609
申请日：2010-09-21
申请人： William Weaver , Laura Laidman
发明人： William Weaver , Laura Laidman
IPC分类号： A47F5/08 , A47B57/20
CPC分类号： A47B57/20 , A47B96/06 , F16M11/08 , F16M11/22 , F16M13/02
摘要： The television wall-mount with integrated shelving is an accessory that either mounts to a rear surface of a television or a wall-mount television to a television. The shelving accessory descends from below said television to provide at least one shelf for showcasing items used in playing audio-video upon said television. The shelving accessory is capable of lateral as well as vertical adjustment with respect to the television. The shelving accessory can also rotate about a vertical axis and in concert with the television and wall-mount in order to provide greater viewing angle of said television.
摘要翻译：具有集成式搁架的电视墙壁安装是可以安装在电视机背面或壁挂式电视机上的附件。搁架配件从所述电视机下方下降，以提供至少一个用于在所述电视机上播放音频视频中使用的物品的搁架。搁架配件能够相对于电视机进行横向和垂直调节。搁架附件也可以围绕垂直轴线旋转并且与电视机和壁挂机一起旋转，以便提供所述电视机的更大的视角。

7. 发明申请

US20090129897A1 SIDE OPENING UNIFIED POD 有权
标题翻译：侧开式统一POD
公开(公告)号：US20090129897A1
公开(公告)日：2009-05-21
申请号：US12123391
申请日：2008-05-19
申请人： Daniel Babbs , William Fosnight , Robert C. May , William Weaver
发明人： Daniel Babbs , William Fosnight , Robert C. May , William Weaver
IPC分类号： H01L21/677 , H01L21/68
CPC分类号： H01L21/67766 , H01L21/67201 , H01L21/67207 , H01L21/67213 , H01L21/67225 , H01L21/67376 , H01L21/67379 , H01L21/67393 , H01L21/67742 , H01L21/67772 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
摘要翻译：一种基板处理系统，包括：处理部，其被配置为保持其中的处理气氛;载体，其具有形成内部容积的外壳，用于保持至少一个基板用于输送到所述处理部分，所述壳体被配置为允许内部体积被泵送下降到与衬底处理系统外部的外部空气不同的预定真空压力，以及负载端口，可通信地连接到处理部分，以将处理气氛与外部大气隔离，负载端口被配置为与载体耦合，泵送载体的内部体积并将载体可通信地连接到处理部分，以通过负载端口将基板装载到处理部分中。

8. 发明申请

US20070147979A1 Substrate gripper for a substrate handling robot 有权
标题翻译：用于基板处理机器人的基板夹具
公开(公告)号：US20070147979A1
公开(公告)日：2007-06-28
申请号：US11315873
申请日：2005-12-22
申请人： Michael Rice , Jeffrey Hudgens , Charles Carlson , William Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Kirk Katwyk , Van Hoskins , Vinay Shah
发明人： Michael Rice , Jeffrey Hudgens , Charles Carlson , William Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Kirk Katwyk , Van Hoskins , Vinay Shah
IPC分类号： B66C23/00
CPC分类号： H01L21/67178 , H01L21/67173 , H01L21/67276 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68707
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

9. 发明申请

US20060182535A1 Cartesian robot design 审中-公开
标题翻译：笛卡尔机器人设计
公开(公告)号：US20060182535A1
公开(公告)日：2006-08-17
申请号：US11315778
申请日：2005-12-22
申请人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Vinay Shah
发明人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Vinay Shah
IPC分类号： H01L21/677
CPC分类号： H01L21/68707 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/67742 , H01L21/67745
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

10. 发明申请

US20060134330A1 Cluster tool architecture for processing a substrate 审中-公开
公开(公告)号：US20060134330A1
公开(公告)日：2006-06-22
申请号：US11112932
申请日：2005-04-22
申请人： Tetsuya Ishikawa , Rick Roberts , Helen Armer , Leon Volfovski , Jay Pinson , Michael Rice , David Quach , Mohsen Salek , Robert Lowrance , William Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lue , John Backer
发明人： Tetsuya Ishikawa , Rick Roberts , Helen Armer , Leon Volfovski , Jay Pinson , Michael Rice , David Quach , Mohsen Salek , Robert Lowrance , William Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lue , John Backer
IPC分类号： C23C16/00
CPC分类号： H01L21/67225 , G03B27/32 , G03D13/006 , G03F7/40 , G05B19/41825 , G05B2219/40476 , G05B2219/45031 , G05B2219/49137 , H01L21/67109 , H01L21/6715 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/6831 , H01L21/6838 , H01L21/68707 , H01L22/26 , Y02P90/087 , Y10S414/135 , Y10S414/136 , Y10T29/53187 , Y10T29/5323
摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

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