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    • 6. 发明授权
    • Rotary motion transmitter and heat treatment method for sealed chamber
    • 旋转运动变送器和密封腔热处理方法
    • US5113102A
    • 1992-05-12
    • US697581
    • 1991-05-09
    • William Gilmore
    • William Gilmore
    • H01L21/00H01L21/68H02K5/128H02K9/197H02K29/00H02K37/14
    • H01L21/67109H01L21/68H02K37/14H02K5/128H02K9/197
    • A rotary motion transmitter with an electromagnetic feedthrough device for transmitting rotary motion from the outside to a vacuum chamber (10) designed for treating a specimen in a vacuum environment. The device comprises an evacuated and sealed rotor (14) which contains permanent magnets and, in turn, is hermetically sealed within a capsule (16). The interior of the capsule (16) communicates with the interior of the chamber (10). A removable stator winding unit (22) having electromagnetic windings which interact with the rotor (14) to transmit rotational motion to the rotor is fitted onto the capsule (16). The rotor (14) is rigidly connected to an output shaft (12) which extends into the sealed chamber (10) for supporting and positioning an object to be treated in vacuum. Thus the device combines in itself a rotary feedthrough for transmitting motion to the vacuum chamber (10) and an electric drive motor for positioning an object inside the chamber. This simplifies the construction, reduces its weight, makes it less expensive, protects it from contaminated exterior environments, etc. The transmitter also provides a method for baking the interior of the chamber to evaporate moisture components which are then removed by pumping. For this purpose, the removable stator winding unit (22) is removed and replaced by a cooling jacket (44). This allows baking without dismantling the rotor (14), since its permanent magnets are protected from thermal deterioration by cooling with the surrounding jacket (44).
    • 一种具有电磁馈通装置的旋转运动变送器,用于将旋转运动从外部传递到设计用于在真空环境中处理样品的真空室(10)。 该装置包括抽真空且密封的转子(14),该转子包含永久磁铁,并进而气密地密封在胶囊(16)内。 胶囊(16)的内部与腔室(10)的内部连通。 具有与转子(14)相互作用以将旋转运动传递到转子的电磁绕组的可拆卸定子绕组单元(22)装配到胶囊(16)上。 转子(14)刚性地连接到输出轴(12),输出轴(12)延伸到密封室(10)中,用于在真空中支撑和定位被处理物体。 因此,该装置本身组合用于将运动传递到真空室(10)的旋转馈通和用于将物体定位在室内的电驱动马达。 这简化了结构,降低了重量,使其更便宜,保护了其免受污染的外部环境等。发射机还提供了一种烘烤室内蒸发湿气成分的方法,然后通过泵送将其去除。 为此,可拆卸定子绕组单元(22)被冷却套(44)代替。 这允许在不拆卸转子(14)的情况下进行烘烤,因为通过与周围的夹套(44)的冷却来保护永磁体免受热劣化。