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    • 2. 发明申请
    • Die-first multi-chip modules and methods of manufacture
    • 首款多芯片模块及制造方法
    • US20050115065A1
    • 2005-06-02
    • US10724981
    • 2003-11-30
    • Wendy Wilkins
    • Wendy Wilkins
    • C09J5/00H01L21/68H05K3/20C09J1/00
    • H01L21/6835C09J5/00H01L2223/54473H01L2924/30105Y10T29/49128
    • Methods of making a multi component module (130) utilize a reusable carrier substrate (111) where the reusable carrier substrate (111) is light transmissive in a frequency range of an adhesive (112) that is ablated by light of a certain frequency such as light from an excimer laser (122). An electronic component (118), such as a chip, die, or passive or active component, is adhered to the reusable carrier substrate (111) with the adhesive (112). An interconnect structure (117) is fabricated on the electronic component (118) to form a multi component module (130). The excimer laser (122) illuminates the reusable carrier substrate (111) with light in the frequency range after fabricating the interconnect structure (117) to ablate the adhesive (112) to remove the multi component module (130) from the reusable carrier substrate (111).
    • 制造多组分模块(130)的方法利用可重复使用的载体衬底(111),其中可重复使用的载体衬底(111)在由特定频率的光消除的粘合剂(112)的频率范围内是透光的, 来自准分子激光器(122)的光。 使用粘合剂(112)将诸如芯片,管芯或无源或有源部件的电子部件(118)粘附到可重复使用的载体基板(111)上。 在电子部件(118)上制造互连结构(117)以形成多部件模块(130)。 准分子激光器(122)在制造互连结构(117)之后在频率范围内用光照射可重复使用的载体衬底(111)以消除粘合剂(112)以从可再使用的载体衬底(112)去除多组分模块(130) 111)。