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    • 4. 发明申请
    • Method for controlling magnetostriction in a free layer of a magnetoresistive sensor
    • 用于控制磁阻传感器自由层中的磁致伸缩的方法
    • US20070144616A1
    • 2007-06-28
    • US11318274
    • 2005-12-22
    • Ben ThaiDulip Welipitiya
    • Ben ThaiDulip Welipitiya
    • H01F41/14
    • H01F41/306B82Y25/00B82Y40/00G01R33/063G01R33/093G01R33/18G11B5/3163G11B5/3906H01F10/3272H01F41/304H01L43/12Y10T29/49032
    • A method for controlling magnetostriction in a free layer of a magnetoresistive sensor. A pinned layer structure is deposited and then a spacer layer, preferably Cu is deposited. Oxygen is introduced into the spacer layer. The oxygen can be introduced either during the deposition of the spacer layer or after the spacer layer has been deposited. A free layer structure is then deposited over the spacer layer. A capping layer such as Ta can be deposited over the free layer structure. The sensor is annealed to set the magnetization of the pinned layer. In the process of annealing the sensor the oxygen migrates out of the spacer. After annealing, no significant amount of oxygen is present in either the spacer layer or the free layer structure, and only trace amounts of oxygen are present in the Ta capping layer. Although no Oxygen remains in either the spacer layer or the free layer, the introduction of oxygen during manufacture causes the finished free layer to have a lower magnetostriction (ie greater negative magnetostriction).
    • 一种用于控制磁阻传感器的自由层中的磁致伸缩的方法。 沉积被钉层结构,然后沉积间隔层,优选沉积Cu。 将氧气引入到间隔层中。 可以在间隔层的沉积过程中或在间隔层沉积之后引入氧。 然后在间隔层上沉积自由层结构。 可以在自由层结构上沉积诸如Ta的覆盖层。 将传感器退火以设定被钉扎层的磁化。 在对传感器进行退火的过程中,氧从间隔物中迁移出去。 退火后,间隔层或自由层结构中不存在显着量的氧,Ta覆盖层中仅存在微量的氧。 尽管在隔离层或自由层中不存在氧气,但是在制造过程中引入氧会导致成品自由层具有较低的磁致伸缩(即较大的负磁致伸缩)。