专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06749729B1 Method and apparatus for workpiece biassing utilizing non-arcing bias rail 失效
标题翻译：利用非电弧偏压导轨进行工件偏压的方法和装置
公开(公告)号：US06749729B1
公开(公告)日：2004-06-15
申请号：US10270638
申请日：2002-10-16
申请人： Weilu Hang Xu , Sam Vi Luong , Yao-Tzung Roger Shih
发明人： Weilu Hang Xu , Sam Vi Luong , Yao-Tzung Roger Shih
IPC分类号： C23C1434
CPC分类号： H01J37/32577 , C23C14/568
摘要： A non-arcing bias rail assembly for supplying an electrical bias potential to a moving workpiece/substrate holder, comprising an elongated metal strip adapted for mounting along a wall of a workpiece/substrate treatment apparatus and having a surface bounded by first and second opposed, laterally extending side edges; a bracket comprised of an electrically insulating material and including a first portion mounted on the surface adjacent to and extending along a portion of the first side edge, and a second portion forming an upstanding wall extending perpendicularly from the first portion and including a surface facing the second side edge of the metal strip; an electrically conductive bias contact spring assembly mounted on the upstanding wall of the bracket facing the second side edge; and electrically insulated wire means electrically connected to the bias contact spring assembly for supplying an electrical bias potential.
摘要翻译：一种用于向移动的工件/衬底保持器提供电偏置电位的非电弧偏置轨道组件，包括适于沿着工件/衬底处理设备的壁安装并具有由第一和第二相对的边界限定的表面的细长金属条，横向延伸的侧边缘; 由电绝缘材料构成的支架，其包括安装在与第一侧边缘的一部分相邻并沿其延伸的表面上的第一部分，以及形成从第一部分垂直延伸的直立壁的第二部分，金属条的第二侧边缘; 导电偏压接触弹簧组件，其安装在所述托架的面向所述第二侧边缘的所述直立壁上; 以及电连接到偏置接触弹簧组件的用于提供电偏置电位的电绝缘电线装置。

IPRDB

热门服务

关于我们

友情链接

联系方式