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1. 发明授权

US6123865A Method for improving etch uniformity during a wet etching process 有权
标题翻译：在湿蚀刻工艺中提高蚀刻均匀性的方法
公开(公告)号：US6123865A
公开(公告)日：2000-09-26
申请号：US206642
申请日：1998-12-07
申请人： Wei-Chih Lin , Ming-Sheng Kao , Ming-Li Kung , Chih-Ming Lin
发明人： Wei-Chih Lin , Ming-Sheng Kao , Ming-Li Kung , Chih-Ming Lin
IPC分类号： H01L21/311 , H01L21/3213 , H01L21/302
CPC分类号： H01L21/31111 , H01L21/32134
摘要： A method for improving etch uniformity during a wet etching process is disclosed. The method comprises the steps of first rinsing the wafer to form a water film over the wafer surface, followed by liquid phase etching. The water film helps the subsequent viscous etchant to be spread across the wafer surface more uniformly to thereby improve the etch uniformity.
摘要翻译：公开了一种在湿蚀刻工艺中改善蚀刻均匀性的方法。该方法包括以下步骤：首先冲洗晶片以在晶片表面上形成水膜，然后进行液相蚀刻。水膜有助于随后的粘性蚀刻剂更均匀地分布在晶片表面上，从而提高蚀刻均匀性。

2. 发明授权

US08111528B2 DC to AC inverter 有权
标题翻译：直流到交流变频器
公开(公告)号：US08111528B2
公开(公告)日：2012-02-07
申请号：US12583867
申请日：2009-08-27
申请人： Chin-Chang Wu , Chun-Han Chen , Ming-Sheng Kao , Li-Hsiang Lai , Ya-Tsung Feng
发明人： Chin-Chang Wu , Chun-Han Chen , Ming-Sheng Kao , Li-Hsiang Lai , Ya-Tsung Feng
IPC分类号： H02M5/45
CPC分类号： H02M7/537
摘要： A DC to AC inverter has a DC power input port, a buck converter, a buck/boost converter, an output filter and an AC output port. The DC power input port has a positive input terminal and a negative input terminal, both connected to a DC source. The AC output port is connected to a single-phase utility system. When the single-phase utility system is in positive half cycle, the buck converter generates a positive half-cycle signal of sinusoidal current. When the single-phase utility system is in negative half cycle, the buck/boost converter generates a negative half-cycle signal of sinusoidal current. In either the positive or negative half cycles, only one power electronic switch is switched in high frequency to reduce switching loss. Further, the negative input terminal of the DC power input port of the invention can be connected to a neutral line of the single-phase utility system.
摘要翻译：直流到交流逆变器具有直流电源输入端口，降压转换器，降压/升压转换器，输出滤波器和交流输出端口。直流电源输入端口具有正输入端子和负输入端子，均连接到直流电源。交流输出端口连接到单相公用事业系统。当单相实用系统处于正半周期时，降压转换器产生正弦电流的正半周期信号。当单相公用事业系统处于负半周期时，降压/升压转换器产生正弦电流的负半周期信号。在正或负半周期中，只有一个电力电子开关以高频率切换以减少开关损耗。此外，本发明的直流电力输入端口的负输入端子可以连接到单相公用事业系统的中性线。

3. 发明申请

US20100254170A1 DC to AC inverter 有权
标题翻译：直流到交流变频器
公开(公告)号：US20100254170A1
公开(公告)日：2010-10-07
申请号：US12583867
申请日：2009-08-27
申请人： Chin-Chang Wu , Chun-Han Chen , Ming-Sheng Kao , Li-Hsiang Lai , Ya-Tsung Feng
发明人： Chin-Chang Wu , Chun-Han Chen , Ming-Sheng Kao , Li-Hsiang Lai , Ya-Tsung Feng
IPC分类号： H02M1/12
CPC分类号： H02M7/537
摘要： A DC to AC inverter has a DC power input port, a buck converter, a buck/boost converter, an output filter and an AC output port. The DC power input port has a positive input terminal and a negative input terminal, both connected to a DC source. The AC output port is connected to a single-phase utility system. When the single-phase utility system is in positive half cycle, the buck converter generates a positive half-cycle signal of sinusoidal current. When the single-phase utility system is in negative half cycle, the buck/boost converter generates a negative half-cycle signal of sinusoidal current. In either the positive or negative half cycles, only one power electronic switch is switched in high frequency to reduce switching loss. Further, the negative input terminal of the DC power input port of the invention can be connected to a neutral line of the single-phase utility system.
摘要翻译：直流到交流逆变器具有直流电源输入端口，降压转换器，降压/升压转换器，输出滤波器和交流输出端口。直流电源输入端口具有正输入端子和负输入端子，均连接到直流电源。交流输出端口连接到单相公用事业系统。当单相实用系统处于正半周期时，降压转换器产生正弦电流的正半周期信号。当单相公用事业系统处于负半周期时，降压/升压转换器产生正弦电流的负半周期信号。在正或负半周期中，只有一个电力电子开关以高频率切换以减少开关损耗。此外，本发明的直流电力输入端口的负输入端子可以连接到单相公用事业系统的中性线。

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