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1. 发明申请

US20120199286A1 PLASMA TREATING APPARATUS 失效
标题翻译：等离子体处理装置
公开(公告)号：US20120199286A1
公开(公告)日：2012-08-09
申请号：US13450853
申请日：2012-04-19
申请人： Wataru SHIONOYA , Naohiro SHIMIZU , Yuichiro IMANISHI , Sozaburo HOTTA
发明人： Wataru SHIONOYA , Naohiro SHIMIZU , Yuichiro IMANISHI , Sozaburo HOTTA
IPC分类号： C23F1/08
CPC分类号： B01J19/088 , B01J2219/0811 , B01J2219/0813 , B01J2219/0815 , B01J2219/083 , B01J2219/0835 , B01J2219/0841 , B01J2219/0875 , B01J2219/0894 , H05H1/2406 , H05H2001/2412 , H05H2240/10
摘要： A first electrode, a second electrode and a third electrode are provided in a middle of a passage. The second electrode is provided on an upstream side of the first electrode, and the third electrode is provided on a downstream side of the first electrode. A connecting line connects the first electrode to a first pole of a pulsed power supply, and connects the second electrode and the third electrode to a second pole of the pulsed power supply. The first electrode crosses a first gas passing surface and occupies a part of the first gas passing surface. The second electrode and the third electrode cross a second gas passing surface and a third gas passing surface and occupy a part of the second gas passing surface and the third gas passing surface respectively.
摘要翻译：第一电极，第二电极和第三电极设置在通路的中间。第二电极设置在第一电极的上游侧，第三电极设置在第一电极的下游侧。连接线将第一电极连接到脉冲电源的第一极，并将第二电极和第三电极连接到脉冲电源的第二极。第一电极穿过第一气体通过表面并占据第一气体通过表面的一部分。第二电极和第三电极与第二气体通过面和第三气体通过面交叉，分别占据第二气体通过面和第三气体通过面的一部分。

2. 发明申请

US20120139604A1 PULSE GENERATION CIRCUIT 失效
标题翻译：脉冲发生电路
公开(公告)号：US20120139604A1
公开(公告)日：2012-06-07
申请号：US13306160
申请日：2011-11-29
申请人： Tatsuya TERAZAWA , Sozaburo HOTTA , Yuji WATANABE
发明人： Tatsuya TERAZAWA , Sozaburo HOTTA , Yuji WATANABE
IPC分类号： H03K3/00
CPC分类号： H03K17/284 , H03K3/57
摘要： A DC source generates a DC voltage between a positive electrode and a negative electrode. An inductive element and a parallel-connected switch-circuits unit are provided in a conductive path extending from the positive electrode to the negative electrode. The parallel-connected switch-circuits unit includes a plurality of switch circuits connected in parallel with one another. The switch circuit opens and closes the conductive path in accordance with a drive signal inputted from a drive circuit. The drive signal causes the plurality of switch circuits to successively perform an ON operation in which the conductive path is closed and then opened. A pulse voltage generation period in which a pulse voltage occurs in the inductive element continuously follows an ON period which is a duration from when the conductive path is closed to when the conductive path is opened.
摘要翻译：直流电源在正极和负极之间产生直流电压。在从正电极延伸到负电极的导电路径中设置电感元件和并联的开关电路单元。并联的开关电路单元包括彼此并联连接的多个开关电路。开关电路根据从驱动电路输入的驱动信号来打开和闭合导电路径。驱动信号使多个开关电路依次进行导通路径闭合然后断开的接通动作。在电感元件中产生脉冲电压的脉冲电压产生周期连续地在从导通路径闭合到导通路径打开之间的持续时间的导通期间。

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