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    • 2. 发明授权
    • Bar-shaped magnetron or sputter cathode arrangement
    • 棒形磁控管或溅射阴极装置
    • US4904362A
    • 1990-02-27
    • US221383
    • 1988-07-19
    • Walter GaertnerFranz KoroschetzAlfred WagendristelHerwig Bangert
    • Walter GaertnerFranz KoroschetzAlfred WagendristelHerwig Bangert
    • C23C14/16C23C14/34F16C33/12H01J23/00H01J37/34
    • H01J37/3405C23C14/16C23C14/3414F16C33/06F16C33/12F16C2204/20F16C2204/24
    • The invention relates to a bar-shaped magnetron-sputter cathode arrangement having an internal, cooled permanent magnet system and a carrier tube for the target. It is provided according to the invention that at least one thermal contact layer (38) is disposed between the carrier tube (36) and the target, which consists of one or more ring(s) (37, 37', 37") shrunk, especially interchangeably, onto the carrier tube (36). During sputtering the cathode (6) and the surface to be sputtered can be subjected to a mutual relative motion in the longitudinal direction of the cathode (6), for which purpose an adjusting element is provided. The magnets (31) are disposed inside the carrier tube (36) with the magnetic fields having alternately opposing directions in the longitudinal direction of the carrier tube (36). They possess cylindrical or polygonal lateral surfaces and end faces (44) which are parallel and slope at an angle (.alpha.) to the longitudinal direction of the electrode (6) or shaft (30).
    • 本发明涉及一种具有内部冷却永磁体系统和用于目标的载体管的棒状磁控溅射阴极装置。 根据本发明提供的是,至少一个热接触层(38)设置在载体管(36)和靶之间,该靶由一个或多个环(37,37',37“)组成, 特别是可互换地收缩到载体管(36)上。 在溅射期间,阴极(6)和被溅射的表面可以在阴极(6)的纵向方向上进行相互相对运动,为此,提供了调节元件。 磁体(31)设置在载体管(36)的内部,其中磁场在载体管(36)的纵向具有交替相反的方向。 它们具有与电极(6)或轴(30)的纵向成角度(α)倾斜的圆柱形或多边形侧表面和端面(44)。