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    • 4. 发明申请
    • PIEZOELECTRIC ULTRASONIC TRANSDUCER ARRAY WITH SWITCHED OPERATIONAL MODES
    • 具有切换操作模式的压电超声波传感器阵列
    • US20150097468A1
    • 2015-04-09
    • US14045713
    • 2013-10-03
    • Arman HajatiDean Gardner
    • Arman HajatiDean Gardner
    • H01L41/04B06B1/06H01L41/08
    • B06B1/0622H01L41/0825H01L41/098
    • Switchable micromachined transducer arrays are described where one or more switches, or relays, are monolithically integrated with transducer elements in a piezoelectric micromachined transducer array (pMUT). In embodiments, a MEMS switch is implemented on the same substrate as the transducer array for switching operational modes of the transducer array. In embodiments, a plurality of transducers are interconnected in parallel through MEMS switch(es) in a first operational mode (e.g., a drive mode) during a first time period, and are then interconnected through the MEMS switch(es) with at least some of the transducers in series in a second operational mode (e.g., a sense mode) during a second time period.
    • 描述了可切换的微机械传感器阵列,其中一个或多个开关或继电器与压电微加工换能器阵列(pMUT)中的换能器元件单片集成。 在实施例中,MEMS开关实现在与用于切换换能器阵列的操作模式的换能器阵列相同的基板上。 在实施例中,多个换能器在第一时间段内以第一操作模式(例如,驱动模式)通过MEMS开关并联互连,然后通过MEMS开关与至少一些 的传感器在第二时间段内以第二操作模式(例如,感测模式)串联。