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    • 5. 发明申请
    • METHOD AND APPARATUS FOR MEASURING A CHARACTERISTIC OF A SAMPLE FEATURE
    • 测量样品特征的方法和装置
    • WO2007035659A1
    • 2007-03-29
    • PCT/US2006/036331
    • 2006-09-18
    • VEECO INSTRUMENTS, INC.JAIN, RohitRICHARDS, John
    • JAIN, RohitRICHARDS, John
    • G01B5/02G01B7/02G01B11/02G01B13/02G06F15/00
    • G01Q10/06G01Q30/04G03F7/70625
    • An SPM based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the surface feature. If two curves are fit on opposed edges of the feature of interest, the maximum or minimum distance between those curves can be determined to ascertain a dimension of interest such as a maximum via width, a minimum line width, etc, The scan is preferably a relatively low-resolution scan in the Y direction, typically having 8-12 scan profiles passing through the feature of interest low-resolution, which is about half that typically used by prior techniques. The low-resolution scan can be performed relatively rapidly and with high repeatability. Repeatability is also higher than with prior techniques, and the level of repeatability is relatively insensitive to the resolution in the Y direction. Using a low-resolution scan also significantly reduces tip wear and increases throughput when compared to high-resolution scans.
    • 用于测量样品表面特征的基于SPM的测量技术将曲线拟合成由于表面特征的SPM扫描而获得的特征边缘点族。 如果两条曲线拟合在感兴趣特征的相对边缘上,则可以确定这些曲线之间的最大或最小距离,以确定感兴趣的尺寸,例如最大通孔宽度,最小线宽等。扫描优选为 在Y方向上的相对较低分辨率的扫描通常具有通过感兴趣的低分辨率特征的8-12个扫描轮廓,其大约是现有技术通常使用的一半。 低分辨率扫描可以相对快速地进行并具有很高的重复性。 重复性也比现有技术更高,重复性水平对Y方向的分辨率相对不敏感。 与高分辨率扫描相比,使用低分辨率扫描也显着降低了尖端磨损并提高了吞吐量。
    • 7. 发明申请
    • RESPIRATOR EXHALATION UNIT
    • 呼吸机呼气装置
    • WO2006037000A1
    • 2006-04-06
    • PCT/US2005/034715
    • 2005-09-26
    • AVON PROTECTION SYSTEMS, INC.PENTON, JohnRICHARDS, JohnSPARKE, Robert
    • PENTON, JohnRICHARDS, JohnSPARKE, Robert
    • A62B9/02A62B7/04
    • A62B7/04A62B9/02
    • A respirator exhalation unit (10) comprises a negative pressure valve (120) and a selectively actuable positive pressure valve assembly (130). The position of the positive pressure valve assembly (130) is selectively adjustable to convert the exhalation unit (10) for use in multiple operating modes, such as a negative pressure mode, a powered air mode, and a self-contained breathing apparatus mode (SCBA). Additionally, a closed circuit breathing apparatus (CCBA) adapter assembly (200) can be attached to the exhalation unit for conversion to a CCBA operating mode. Further, the negative pressure valve (120) divides the interior of the exhalation unit into two chambers, one of which functions as a dead space that protects the user from exposure to any harmful contaminants at the end of exhalation.
    • 呼吸器呼气单元(10)包括负压阀(120)和可选择性致动的正压阀组件(130)。 正压阀组件(130)的位置可选择性地调节,以将呼气单元(10)转换成用于多种操作模式,例如负压模式,动力空气模式和自给式呼吸器模式( SCBA)。 另外,闭合呼吸装置(CCBA)适配器组件(200)可以连接到呼气单元以转换成CCBA操作模式。 此外,负压阀(120)将呼气单元的内部分成两个腔室,其中一个腔室用作死空间,其在呼气结束时保护使用者免受任何有害污染物的侵害。