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    • 4. 发明授权
    • Method for sensor fabrication and related sensor and system
    • 传感器制造方法及相关传感器及系统
    • US07891252B2
    • 2011-02-22
    • US12362741
    • 2009-01-30
    • Cornel CobianuViorel AvramescuIon GeorgescuStefan-Dan Costea
    • Cornel CobianuViorel AvramescuIon GeorgescuStefan-Dan Costea
    • G01L7/00
    • G01L9/0025B60C23/0408C03C27/00H01L41/1132H01L41/331Y10T29/42
    • A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate.
    • 一种方法包括在第一晶片中形成多个沟槽,在第二晶片的第一表面上形成传感器结构,以及结合第一晶片和第二晶片。 该方法还包括蚀刻第二晶片的第二表面以在第二晶片中形成传感器膜片。 该方法还包括通过在与沟槽相关联的第一晶片的多个区域中切割第一晶片来去除第一晶片的一部分。 传感器包括在基板的第一表面上的基板和表面声波(SAW)谐振器。 传感器还包括电耦合到SAW谐振器的接合焊盘和形成在衬底的第二表面中的凹口。 传感器还包括通过间隔件与衬底的第一表面分离的盖。 SAW谐振器位于盖和基板之间。
    • 6. 发明授权
    • Patterned dielectric elastomer actuator and method of fabricating the same
    • 图案介质弹性体致动器及其制造方法
    • US07719164B2
    • 2010-05-18
    • US12187124
    • 2008-08-06
    • Mihai GologanuViorel AvramescuStefan Dan CosteaLi Wang
    • Mihai GologanuViorel AvramescuStefan Dan CosteaLi Wang
    • H02N1/00
    • H01L41/082H01L41/45Y10T29/49002Y10T29/49226
    • A patterned dielectric elastomer actuator is disclosed which includes a series of thin parallel elastomer filaments, separated by certain distances sandwiched between a pair of rigid electrodes. The elastomer filaments and air acts as a patterned dielectric layer. The elastomer filaments can compress laterally from a circular cross-section to an elliptical shape when a voltage is applied between the rigid electrodes. The elastomer filaments can touch laterally, which implies no further squeezing in order to provide a minimal secure distance between the rigid electrodes. The dielectric elastomer actuator can be fabricated utilizing a reel-to-reel fabrication process with the thin elastomer filaments fabricated ahead of time, by extrusion techniques and cured completely before storing on reels.
    • 公开了一种图案化的介电弹性体致动器,其包括一系列薄的平行的弹性体细丝,其被夹在一对刚性电极之间的特定距离分开。 弹性体丝和空气用作图案化的介电层。 当在刚性电极之间施加电压时,弹性体长丝可以从圆形横截面横向压缩成椭圆形。 弹性体长丝可以横向接触,这意味着不再进一步挤压,以便在刚性电极之间提供最小的可靠距离。 电介质弹性体致动器可以利用卷对卷制造工艺制造,其中薄的弹性体细丝提前制造,通过挤出技术,并且在存储在卷轴之前完全固化。
    • 8. 发明申请
    • SYSTEM FOR MONITORING STRUCTURAL ASSETS
    • 监测结构资产的制度
    • US20120125118A1
    • 2012-05-24
    • US12949113
    • 2010-11-18
    • Cornel CobianuFrank TurnbullIon GeorgescuViorel Avramescu
    • Cornel CobianuFrank TurnbullIon GeorgescuViorel Avramescu
    • G01N29/04
    • G01N29/2462G01N29/223G01N2291/0232G01N2291/2634
    • A system for detection of stress and deformation in a structural asset, for instance, one of reinforced concrete. An area on the asset may have a structure interface, such as a patch, attached to it with a fastening mechanism which may be a layer of an epoxy or other material, or be items such as screws, bolts, welds, or the like. One or more surface acoustic wave (SAW) strain sensors may be attached to the interface with an adhesive layer of epoxy or other material, or with mechanical items. Stress may be transmitted by the interface to the strain sensors. The sensors may be interrogated with a wire or wireless reader to obtain strain measurements. The measurements may indicate stress and deformations such as bulges and breaks in the asset. The measurements may also be a basis for determining location and extent of the stress and deformations.
    • 一种用于检测结构资产中的应力和变形的系统,例如钢筋混凝土之一。 资产上的区域可以具有附接到其上的结构界面,例如贴片,其具有可以是环氧树脂或其它材料层的紧固机构,或者诸如螺钉,螺栓,焊接等的物品。 一个或多个表面声波(SAW)应变传感器可以与环氧树脂或其它材料或机械物品的粘合剂层附接到界面。 应力可以通过接口传递到应变传感器。 传感器可以用线或无线读取器询问以获得应变测量值。 测量结果可能表示压力和变形,如资产中的凸起和断裂。 测量也可能是确定应力和变形的位置和程度的基础。
    • 10. 发明授权
    • System for monitoring structural assets
    • 监测结构性资产的制度
    • US08479590B2
    • 2013-07-09
    • US12949113
    • 2010-11-18
    • Cornel CobianuFrank TurnbullIon GeorgescuViorel Avramescu
    • Cornel CobianuFrank TurnbullIon GeorgescuViorel Avramescu
    • G01N29/04G01N3/00
    • G01N29/2462G01N29/223G01N2291/0232G01N2291/2634
    • A system for detection of stress and deformation in a structural asset, for instance, one of reinforced concrete. An area on the asset may have a structure interface, such as a patch, attached to it with a fastening mechanism which may be a layer of an epoxy or other material, or be items such as screws, bolts, welds, or the like. One or more surface acoustic wave (SAW) strain sensors may be attached to the interface with an adhesive layer of epoxy or other material, or with mechanical items. Stress may be transmitted by the interface to the strain sensors. The sensors may be interrogated with a wire or wireless reader to obtain strain measurements. The measurements may indicate stress and deformations such as bulges and breaks in the asset. The measurements may also be a basis for determining location and extent of the stress and deformations.
    • 一种用于检测结构资产中的应力和变形的系统,例如钢筋混凝土之一。 资产上的区域可以具有附接到其上的结构界面,例如贴片,其具有可以是环氧树脂或其它材料层的紧固机构,或者诸如螺钉,螺栓,焊接等的物品。 一个或多个表面声波(SAW)应变传感器可以与环氧树脂或其它材料或机械物品的粘合剂层附接到界面。 应力可以通过接口传递到应变传感器。 传感器可以用线或无线读取器询问以获得应变测量值。 测量结果可能表示压力和变形,如资产中的凸起和断裂。 测量也可能是确定应力和变形的位置和程度的基础。