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    • 1. 发明授权
    • Method for depositing ultrathin laminated oxide coatings
    • 沉积超薄层叠氧化物涂层的方法
    • US4844951A
    • 1989-07-04
    • US114984
    • 1987-10-30
    • Vinod K. SarinHans E. HintermannGilbert Gindraux
    • Vinod K. SarinHans E. HintermannGilbert Gindraux
    • C23C16/40
    • C23C16/403C23C16/405
    • A method for depositing a wear resistant composite ceramic coating on a cemented carbide or hard ceramic substrate. A gas mixture is passed over the substrate, including a halide vapor of Al, Zr, or Y and one or more oxidizing gases at about 900.degree.-1250.degree. C. for the cemented carbide or about 900.degree.-1500.degree. C. for the ceramic and between about 1 torr and about ambient pressure. During the deposition of the oxide, a different halide of Al, Zr, or Y is pulsed into the gas mixture. The parameters are controlled to deposit a fully dense, adherent, wear resistant, laminated oxide coating about 0.3-20 microns thick on the substrate having at least three layers each about 0.1-3 microns thick and each predominantly of a different material than that of the adjacent layers. Optionally, the process may be controlled to produce at least one layer in which discrete particles of the material predominantly in an adjacent layer are present in a matrix of the predominant material of the layer.
    • 一种在硬质合金或硬质陶瓷基体上沉积耐磨复合陶瓷涂层的方法。 气体混合物通过衬底,包括Al,Zr或Y的卤化物蒸气和一种或多种氧化性气体,在约900°-1250℃,对于硬质合金或约900-约1500℃ 陶瓷,约1托和约环境压力之间。 在沉积氧化物期间,将不同的Al,Zr或Y的卤化物脉冲进入气体混合物。 参数被控制以在衬底上沉积约0.3-20微米厚的完全致密,粘附,耐磨的层压氧化物涂层,其具有至少三层,每层厚度约为0.1-3微米,并且各自主要具有不同于 相邻层。 任选地,可以控制该过程以产生至少一个层,其中主要在相邻层中的材料的离散颗粒存在于该层的主要材料的基质中。