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    • 6. 发明授权
    • Ultra high vacuum heating and rotating specimen stage
    • 超高真空加热和旋转样品台
    • US5412180A
    • 1995-05-02
    • US160263
    • 1993-12-02
    • Arthur W. Coombs, III
    • Arthur W. Coombs, III
    • H01J37/20C23C16/46H05B3/68
    • H01J37/20H01J2237/2001H01J2237/20214
    • A heating and rotating specimen stage provides for simultaneous specimen heating and rotating. The stage is ideally suited for operation in ultrahigh vacuum (1.times.10.sup.-9 torr or less), but is useful at atmosphere and in pressurized systems as well. A specimen is placed on a specimen holder that is attached to a heater that, in turn, is attached to a top housing. The top housing is rotated relative to a bottom housing and electrically connected thereto by electrically conductive brushes. This stage is made of materials that are compatible with UHV, able to withstand high temperatures, possess low outgassing rates, are gall and seize resistant, and are able to carry substantial electrical loading without overheating.
    • 加热和旋转的样品台提供同时的样品加热和旋转。 该阶段非常适用于超高真空(1×10 -9 torr或更低)的操作,但在大气和加压系统中也是有用的。 将样品放置在附接到加热器的样品保持器上,加热器又附接到顶部壳体。 顶部壳体相对于底部壳体旋转并通过导电刷与其电连接。 该阶段由与特高压兼容的材料制成,能够承受高温,具有低的除气速率,耐腐蚀性和抗咬合性,并且能够承载大量的电荷而不会过热。