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1. 发明专利

JP2010150662A Linear deposition source 审中-公开
标题翻译：线性沉积源
公开(公告)号：JP2010150662A
公开(公告)日：2010-07-08
申请号：JP2009286998
申请日：2009-12-17
申请人： Veeco Instruments Inc , ビーコインストゥルメンツインコーポレイテッド
发明人： CONROY CHAD , PRIDDY SCOTT WAYNE , DAHLSTROM JACOB A , BRESNAHAN RICH , GOTTHOLD DAVID WILLIAM , PATRIN JOHN
IPC分类号： C23C14/24 , H01L21/363 , H01L31/04
CPC分类号： C23C14/243 , C23C14/26 , C23C14/562 , Y02E10/541 , Y02P70/521
摘要： PROBLEM TO BE SOLVED: To provide a linear deposition source which correctly control the amount of the material evaporated from a plurality of crucibles fed to a plurality of nozzles. SOLUTION: The deposition source 100 comprises: (a) a plurality of crucibles 102 for containing deposition material; (b) a body 112 comprising a plurality of conductance channels; (c) a heater that is positioned in thermal communication with the plurality of crucibles and the plurality conductance channels; (d) a heat shield that provides at least partial thermal isolation for at least one of the plurality of crucibles; and (e) a plurality of nozzles, an input of each of the plurality of nozzles being coupled to an output of one of the plurality of conductance channels, evaporated deposition materials being transported from the plurality of crucibles through the plurality of conductance channels to the plurality of nozzles wherein the evaporated deposition material is ejected from the plurality of nozzles to form a deposition flux. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种线性沉积源，其可以正确地控制从多个供给多个喷嘴的多个坩埚蒸发的材料的量。解决方案：沉积源100包括：（a）多个用于容纳沉积材料的坩埚102; （b）主体112，包括多个电导通道; （c）与多个坩埚和多个电导通道热连通的加热器; （d）对所述多个坩埚中的至少一个提供至少部分热隔离的隔热罩; 和（e）多个喷嘴，所述多个喷嘴中的每一个的输入端耦合到所述多个电导通道中的一个的输出，蒸发的沉积材料从所述多个坩埚通过所述多个电导通道传送到多个喷嘴，其中蒸发的沉积材料从多个喷嘴喷射以形成沉积焊剂。版权所有（C）2010，JPO＆INPIT

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