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1. 发明申请

WO2009043967A1 VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：振动微观传感器的角速度
公开(公告)号：WO2009043967A1
公开(公告)日：2009-04-09
申请号：PCT/FI2008/050539
申请日：2008-09-29
申请人： VTI TECHNOLOGIES OY , KLEMETTI, Petri , NERA, Kaisa , LIPSANEN, Antti , BLOMQVIST, Anssi , TORKKELI, Altti
发明人： KLEMETTI, Petri , NERA, Kaisa , LIPSANEN, Antti , BLOMQVIST, Anssi , TORKKELI, Altti
IPC分类号： G01P3/02 , G01P15/097 , G01C19/56
CPC分类号： G01C19/5712
摘要： The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.
摘要翻译：本发明涉及用于测量角速度的测量装置，更确切地说，涉及角速度的振动微机械传感器。在根据本发明的角速度传感器中，通过不对称的弹簧结构（1），（2），（3），（4），（22），（22），弹簧（1），（2），（3），（4），（22），（24）传送的从一种运动模式到另一种运动模式的耦合可以抵消或减轻由于弹簧的偏斜或其支撑而由非理想性造成的耦合。根据本发明的角速度传感器的结构能够以良好的性能进行可靠的测量，特别是在角速度传感器的小型振动微机械解决方案中。

2. 发明申请

WO2010100334A1 VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：振动微机械传感器的角速度
公开(公告)号：WO2010100334A1
公开(公告)日：2010-09-10
申请号：PCT/FI2010/050160
申请日：2010-03-01
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi , RUOHIO, Jaakko
发明人： BLOMQVIST, Anssi , RUOHIO, Jaakko
IPC分类号： G01C19/56 , G01P3/14 , B81B3/00
CPC分类号： G01C19/5747
摘要： The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures (1), (2), excitation structures (3), (4) and coupling seesaw type springs (6), (7). The objective of the invention is to provide an improved sensor structure, which enables reliable measuring with good efficiency particularly in small vibrating micro-mechanical angular velocity sensor solutions.
摘要翻译：本发明涉及用于测量角速度的测量装置，更确切地说，涉及用于测量角速度的振动微机械传感器。根据本发明的角速度传感器包括至少两个地震质量结构（1），（2），激励结构（3），（4）和联轴器跷跷板弹簧（6），（7）。本发明的目的是提供一种改进的传感器结构，其特别是在小型振动微机械角速度传感器解决方案中能够以高效率进行可靠的测量。

3. 发明申请

WO2006070059A1 OSCILLATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：振荡微机械传感器的角速度
公开(公告)号：WO2006070059A1
公开(公告)日：2006-07-06
申请号：PCT/FI2005/000557
申请日：2005-12-30
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/56 , G01P9/04 , B81B3/00 , G01P15/125
CPC分类号： G01C19/5712
摘要： The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1, 2, 36, 37) are connected to suppor areas by means of springs or by means of springs and stiff auxiliary structures, which give the masses (1, 2, 36, 37) a degree of freedom in relation to an axis of rotation perpendicular to the plane of the wafer formed by the masse and in relation to at least one axis of rotation parallel to the plane of the wafer. The structure of the sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in compact oscillating micro-mechanical sensors of angular velocity.
摘要翻译：本发明涉及用于测量角速度的测量装置，更具体地说，涉及角速度的振动微机械传感器。在根据本发明的角速度传感器中，地震质量（1,26,37,37）通过弹簧或弹簧和刚性辅助结构连接到支撑区域，所述弹性和刚性辅助结构使质量（1,2， 36,37）相对于垂直于由所述芯片形成的晶片的平面的旋转轴线相对于平行于所述晶片的平面的至少一个旋转轴线的自由度。根据本发明的角速度传感器的结构能够可靠和有效地测量，特别是在角速度的紧凑型振动微机械传感器中。

4. 发明申请

WO2006070060A1 OSCILLATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：振荡微机械传感器的角速度
公开(公告)号：WO2006070060A1
公开(公告)日：2006-07-06
申请号：PCT/FI2005/000558
申请日：2005-12-30
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/56 , G01P9/04 , G01P15/125 , B81B3/00
CPC分类号： G01C19/5712
摘要： The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular velocity according to the present invention, at least one pair of electrodes is provided in association with an edge of a seismic mass (1), (9), (10), (20), (30), (31), which pair of electrodes together with the surface of the mass (1), (9), (10), (20), (30), (31) form two capacitances such, that one of the capacitances of the pair of electrodes will increase and the other capacitance of the pair of electrodes will decrease as a function of the angle of rotation in the primary motion of the mass (1), (9), (10), (20), (30), (31). The structure of a sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in solutions for compact oscillating micro-mechanical sensors of angular velocity.
摘要翻译：本发明涉及用于测量角速度的测量装置，更具体地说，涉及角速度的振动微机械传感器。在根据本发明的角速度传感器中，至少一对电极与地震块（1），（9），（10），（20），（30），（10）， 31），与质量块（1），（9），（10），（20），（30），（31）的表面对的一对电极形成两个电容，使得一对电容（1），（9），（10），（20），（30），（30），（30）的主运动中的旋转角的函数将减小电极对的另一个电容，（31）。根据本发明的角速度传感器的结构使得能够可靠和有效地测量，特别是在角速度的紧凑型振动微机械传感器的解决方案中。

5. 发明申请

WO2012123631A1 POINTING METHOD, A DEVICE AND SYSTEM FOR THE SAME 审中-公开
标题翻译：指点方法，其装置和系统
公开(公告)号：WO2012123631A1
公开(公告)日：2012-09-20
申请号：PCT/FI2012/050200
申请日：2012-02-29
申请人： VTI TECHNOLOGIES OY , MERIHEINÄ, Ulf , KAUPPINEN, Ossi , KOSTIAINEN, Pekka , STOCKMANN, Sten , BLOMQVIST, Anssi
发明人： MERIHEINÄ, Ulf , KAUPPINEN, Ossi , KOSTIAINEN, Pekka , STOCKMANN, Sten , BLOMQVIST, Anssi
IPC分类号： G06F3/033 , G01C19/42 , G01C19/02
CPC分类号： G06F3/0346
摘要： The invention shows a method to control a pointing device with an angular rate sensor, that comprises generating an ensemble of orthogonal unit vector associated signals by at least one angular rate sensor to represent angular rates in a dimensional space for each mutually orthogonal unit vector direction of said dimensional space, amplifying the at least one of said signal non-linearly for determination of cursor on a screen for (x,y) coordinates of the screen, applying a decision criterion to determine the state of the pointing device as based on said unit vector associated signals. The invention also shows a pointer utilising the method and a system comprising such a pointer.
摘要翻译：本发明示出了一种用角速度传感器控制指向装置的方法，该方法包括通过至少一个角速率传感器生成正交单位矢量相关信号的集合，以表示每个相互正交的单位矢量方向的维空间中的角速率所述尺寸空间，用于非线性地放大所述信号中的至少一个信号，以在屏幕上确定用于（x，y）坐标的屏幕上的光标，应用判定标准以基于所述单元确定指示设备的状态矢量相关信号。本发明还示出了利用该方法的指针和包括这种指针的系统。

6. 发明申请

WO2006134233A1 METHOD FOR MANUFACTURING A MICROMECHANICAL MOTION SENSOR, AND A MICROMECHANICAL MOTION SENSOR 审中-公开
标题翻译：微机械运动传感器的制造方法和微机械运动传感器
公开(公告)号：WO2006134233A1
公开(公告)日：2006-12-21
申请号：PCT/FI2006/050258
申请日：2006-06-13
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi
发明人： BLOMQVIST, Anssi
IPC分类号： H01L21/461 , G01P15/125 , G01C19/56 , H01L21/78
CPC分类号： G01C3/08 , G01C19/5656 , G01P15/0802 , G01P15/125 , Y10T29/49007
摘要： The present invention relates to measuring devices used in measuring physical quantities, such as acceleration, angular acceleration, or angular velocity, and, more precisely, to micromechanical motion sensors. The area, in the wafer plane, of a motion sensor component according to the present invention is smaller than the area of the motion sensor component having been dice cut and turned by 90º. Correspondingly, the height of the motion sensor component according to the present invention, the component having been turned by 90º, is smaller, in the direction of the joint, than the thickness of the wafer stack formed by the joined wafers. The object of the invention is to provide an improved method of manufacturing a micromechanical motion sensor, and to provide a micromechanical motion sensor suitable, in particular, for use in small micromechanical motion sensor solutions.
摘要翻译：本发明涉及用于测量诸如加速度，角加速度或角速度等物理量的测量装置，更确切地说，涉及微机械运动传感器。根据本发明的运动传感器部件的晶片平面中的面积小于被切割并转动90度的运动传感器部件的面积。相应地，根据本发明的运动传感器部件的已经转动了90度的部件的高度在接合方向上比由接合的晶片形成的晶片堆叠的厚度小。本发明的目的是提供一种制造微机械运动传感器的改进方法，并且提供适用于特别是用于小型微机械运动传感器解决方案的微机械运动传感器。

7. 发明申请

WO2012120190A2 SPRING STRUCTURE, RESONATOR, RESONATOR ARRAY AND SENSOR 审中-公开
标题翻译：弹簧结构，谐振器，谐振器阵列和传感器
公开(公告)号：WO2012120190A2
公开(公告)日：2012-09-13
申请号：PCT/FI2012/050194
申请日：2012-02-27
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi , RUOHIO, Jaakko
发明人： BLOMQVIST, Anssi , RUOHIO, Jaakko
CPC分类号： G01C19/574 , G01C19/5719
摘要： The invention presents a spring structure (501), which has at least two masses (Ma, Mb) coupled in a first direction as opposite phase oscillators by means of springs (Sh1, Sh2) connected to them (Ma, Mb), via a loop (L, E) between said springs (Sh1, Sh2) connected to their coupling points, wherein oblique springs (SI45, Sr45) are connected from said coupling points of the loop (L) to the anchors (A) of the base such that the longitudinal motion of the loop (L) is arranged to occur perpendicularly or substantially perpendicularly to said first direction, to thus attenuate opposite phase oscillation other than that of the masses (Ma, Mb). The invention also presents the use of a spring structure in a resonator and/or in a resonator array as well as in a sensor or a sensor comprising system.
摘要翻译：本发明提出了一种弹簧结构（501），该弹簧结构（501）具有至少两个通过连接到它们的弹簧（Sh1，Sh2）在第一方向上作为相反相位振荡器耦合的质量块（Ma，Mb）（L，E）连接到它们的连接点上的所述弹簧（Sh1，Sh2）之间的一个环（L，E），其中倾斜弹簧（SI45，Sr45）从环（L）的所述连接点连接到（A），使得环（L）的纵向运动被布置成垂直于或基本上垂直于所述第一方向地发生，从而衰减除质量（Ma，Mb）以外的相反振动。本发明还提出了在共振器和/或共振器阵列以及传感器或包括系统的传感器中使用弹簧结构。

8. 发明申请

WO2010100333A1 MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：微观机械传感器
公开(公告)号：WO2010100333A1
公开(公告)日：2010-09-10
申请号：PCT/FI2010/050159
申请日：2010-03-01
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/56 , G01P3/14 , B81B3/00 , G01C21/10
CPC分类号： G01C19/5747
摘要： The invention presents a micro-mechanical resonator, comprising two masses coupled in the direction of a common axis by a spring structure such, that the spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. The invention also relates to a micro-mechanical resonator matrix, a sensor and a navigation device.
摘要翻译：本发明提出了一种微机械谐振器，其包括通过弹簧结构在公共轴线的方向上耦合的两个质量，使得弹簧结构包括弹簧，弹簧结合至少连接到质量块的第一杆和延伸到运动轴方向，所述弹簧被布置成在垂直于运动轴线的运动方向的方向上弯曲。本发明还涉及一种微机械谐振器矩阵，传感器和导航装置。

9. 发明申请

WO2009127782A1 VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：振动微机械传感器的角速度
公开(公告)号：WO2009127782A1
公开(公告)日：2009-10-22
申请号：PCT/FI2009/050270
申请日：2009-04-08
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/56 , G01P3/44 , G01P9/04 , B81B3/00
CPC分类号： G01C19/5762 , G01C19/5712 , G01C19/5747
摘要： The invention relates to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention is adapted to measure angular velocity in relation to two or three axes, and at the least two seismic masses (34-36, 52-53, 71-75) of the sensor of angular velocity are adapted to be activated into primary motion vibration by means of a common mode. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small size vibrating micro-mechanical sensors of angular velocity.
摘要翻译：本发明涉及用于测量角速度的测量装置，更确切地说，涉及振动角速度的微机械传感器。根据本发明的角速度传感器适于测量相对于两个或三个轴的角速度，并且角速度传感器的至少两个地震质量（34-36,52-53,71-75）是适于通过共模激活成主动作振动。根据本发明的角速度传感器的结构能够以良好的性能进行可靠的测量，特别是在角速度的小尺寸振动微机械传感器中。

10. 发明申请

WO2008145823A1 A METHOD FOR MEASURING ANGULAR VELOCITY AND A VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：用于测量角速度的方法和角速度的振动微机械传感器
公开(公告)号：WO2008145823A1
公开(公告)日：2008-12-04
申请号：PCT/FI2008/050313
申请日：2008-05-29
申请人： VTI TECHNOLOGIES OY , BLOMQVIST, Anssi
发明人： BLOMQVIST, Anssi
IPC分类号： G01P15/08 , G01C19/56
CPC分类号： G01C19/5762 , G01C19/5726
摘要： The invention relates to measuring devices used in measuring angular velocity, and, more precisely, to vibrating micromechanical sensors of angular velocity. In the solution for a sensor of angular velocity according to the invention, a mass is suspended by means of spring structures having non-orthogonal primary and secondary axes such, that a test activation in phase with the primary motion is induced in a detection resonator, and the angular velocity to be measured is, by means of a phase detector, detected from the phase difference between the primary motion and the secondary motion. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for a sensor of angular velocity.
摘要翻译：本发明涉及用于测量角速度的测量装置，更确切地说，涉及角速度的振动微机械传感器。在根据本发明的用于角速度传感器的解决方案中，通过具有非正交主轴和次轴的弹簧结构悬挂质量，使得在检测谐振器中感应与主运动相位的测试激活，并且要测量的角速度通过相位检测器从主运动和次运动之间的相位差中检测出。根据本发明的角速度传感器的结构能够以良好的性能进行可靠的测量，特别是在角速度传感器的小型振动微机械解决方案中。

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